Apparatus and method for surface inspection with test and reference channel comparison

• US 4,845,356 A
• Filed: 01/27/1988
• Issued: 07/04/1989
• Est. Priority Date: 01/30/1987
• Status: Expired due to Term

• Current Assignee: Cogent Incorporated (Cognent, Inc.)
• Original Assignee: Siram SPA (Veolia Environnement SA)
• Inventors: Baker, Lionel R.
• Primary Examiner(s): Nelms, David C.
• Assistant Examiner(s): Chatman, Eric F.
• Application Number:
  US07/149,041
• Time in Patent Office: 524 Days
• Field of Search: 250/571, 250/572, 250/559, 250/563, 250/562, 250/225, 356/371, 356/431, 356/367, 356/368, 356/369
• US Class Current: 250/225
• CPC Class Codes: G01B 11/30 for measuring roughness or irregularity of surfaces
• CPC Class Codes: G01B 2290/65 Spatial scanning object beam
• CPC Class Codes: G01B 2290/70 Using polarization in the interferometer
• CPC Class Codes: G01B 9/02067 by electronic control systems, i.e. using feedback acting on optics or light

Abstract

Apparatus for comparing a test surface 23 with a reference surface 8 comprising detector means 16.17, a test channel TC for receiving radiation from the test surface 23 and a reference channel RC for receiving radiation from the reference surface 8. A selector means 12 is provided to pass radiation from the test channel means TC and the reference channel means RC to the detector means. Varying means 5 is provided to vary the radiation passed along the test channel TC and reference channel RC. Cycle means is provided to cycle the selector means 12 between a first state in which more radiation from the test channel TC than the reference channel RC is passed to the detector means and vice versa. Control means is provided to control the radiation varying means 5 to provide a zero or minimum variation of radiation received by the detector means as the selector means 12 is cycled.

Claims

1. Apparatus for comparing a test surface with a reference surface comprising

detector means;

a test channel means for receiving radiation from the test surface;

reference channel means for receiving radiation from the reference surface;

selector means to pass radiation from the test channel means and the reference channel means to the detector means,

varying means being provided to vary the radiation passed to or from at least one of the test channel means or reference channel means

cycle means being provided to cycle the selector means between a first state in which more radiation from the test channel than the reference channel is passed to the detector means and a second state in which more radiation from the reference channel than the test channel is passed to the detector means;

control means being provided to control the radiation varying means to provide a zero or minimum variation of radiation received by the detector means as the selector means is cycled by the cycle means.

2. Apparatus as claimed in claim 1 in which the test channel means includes scanning means to scan the part of the test surface under examination across the test surface;

3. Apparatus as claimed in claim 1 or 2 in which said cycle means is operable so as to cause the selector means to pass through at least one cycle for each predetermined area of the test surface as the test surface is scanned.

4. Apparatus as claimed in any one of claims 1 to 3 in which the selector means comprises a polariser, the polarisation of which is variable by the cycle means.

5. Apparatus as claimed in claim 4 in which the cycle means is adapted to rotate the polariser back and forth through a small angle.

6. Apparatus as claimed in claims 1 to 5 in which the varying means comprises a variable polariser.

7. Apparatus as claimed in any one of claims 1 to 6 in which a polarising beam splitter is provided to pass radiation from the reference channel means and test channel means to the detector.

8. Apparatus as claimed in any one of claims 1 to 7 in which the control means is adapted to receive a signal from the detector and operates in a feedback mode to control the radiation varying means to provide a null or minimum variation in the signal from the detector means as the selector means is cycled.

9. Apparatus as claimed in any one of claims 1 to 8 in which a spatial frequency filter is mounted so that the detector means receives radiation from the reference channel means and the test channel means via said filter, said filter imposing a fractional wavelength retardation on the undiffracted component of the radiation received, absorbing a high proportion of the radiation.

10. Apparatus as claimed in claim 9 in which the spatial frequency filter is a phase contrast spatial frequency filter.

11. Apparatus as claimed in claim 9 or 10 in which there is also provided a field limiting pinhole.

12. Apparatus as claimed in any one of claims 9 or 10 in which the radiation is provided by a radiation source and a pinhole is placed adjacent to said source, the image of the pinhole being passed to the filter and means being provided to provide a Fourier transform of the distribution of intensity of the pinhole image to provide a measure of the autocovariance of the test surface.

13. Apparatus as claimed in any one of claims 1 to 8 in which the detector means comprises a position sensitive detector.

14. Apparatus as claimed in any one of claims 1 to 8 in which means are provided for varying the area of the test surface under examination.

15. Apparatus as claimed in any one of claims 1 to 8 in which the test surface includes a scratch, and the distribution of intensity across the image of the scratch is obtained by providing a small pinhole in the test channel and scanning the image of the pinhole across the scratch on the test surface.

16. Apparatus as claimed in any one of claims 1 to 15 in which to the test surface is opaque to the radiation and the detector means receives radiation reflected from the test surface.

17. Apparatus as claimed in any one of claims 1 to 15 in which the test surface is transparent to the radiation and the detector means receives radiation transmitted through the test surface and retroreflected back through the test surface.

18. Apparatus as claimed in anyone of claims 1 to 17 in which the selector means and varying means comprise electro-optic modulators.

19. Apparatus as claimed in any one of claims 1 to 17 in which the selector means and varying means comprises Faraday effect modulators.

20. Apparatus as claimed in any one of claims 1 to 17 in which the selector means and the varying means comprise magneto optical modulators.