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Apparatus for generating and transporting a charged particle beam

  • US 4,845,371 A
  • Filed: 03/29/1988
  • Issued: 07/04/1989
  • Est. Priority Date: 03/29/1988
  • Status: Expired due to Term
First Claim
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1. An apparatus for generating and transporting a beam of charged particles, comprising:

  • (a) a beam source for generating said beam of charged particles at two different current levels, said charged particles being energetically dispersed around a preset energy value;

    (b) a magnet system for transporting said beam of charged particles through a passageway, said charged particles being spatially dispersed around a beam axis such that along a selected direction in a specific plane across the beam axis the spatial dispersion of said charged particles is at least approximately a monotone function of their energy dispersion; and

    (c) an energy selection filter disposed in said specific plane within the passageway, said filter including a first bimetallic element projecting along said selected direction into the beam by a given interception distance which defines the energy range of the charged particles passing the electron selection filter, said bimetallic element being adapted such that at the lower of the two different current levels the interception distance is longer and thereby said energy range smaller than at the higher of the two current levels.

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