Formation of oxide films by reactive sputtering
First Claim
1. A method of making an oxide film comprising the steps of providing a target including a metal or metalloid element selected from the group consisting of Si, Ti, Al, Sn and combinations thereof, providing a substrate in proximity to said target, exposing a surface of said target to a plasma containing oxygen and chlorine and maintaining said target at a sputtering potential with respect to said plasma so that material is dislodged from said exposed target surface and deposited on said substrate.
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Abstract
In reactive sputtering of silicon, titanium, aluminum or tin in an oxygen-containing atmosphere to deposit a layer of the corresponding oxide on a substrate, the deposition rate is markedly enhanced by addition of chlorine to the atmosphere. The resulting films contain at most minor amounts of chlorine, so that mechanical, chemical and optical properties of the films are not substantially altered by use of chlorine in the process.
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17 Claims
- 1. A method of making an oxide film comprising the steps of providing a target including a metal or metalloid element selected from the group consisting of Si, Ti, Al, Sn and combinations thereof, providing a substrate in proximity to said target, exposing a surface of said target to a plasma containing oxygen and chlorine and maintaining said target at a sputtering potential with respect to said plasma so that material is dislodged from said exposed target surface and deposited on said substrate.
Specification