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Method and system for determining surface profile information

  • US 4,850,712 A
  • Filed: 02/01/1988
  • Issued: 07/25/1989
  • Est. Priority Date: 02/01/1988
  • Status: Expired due to Term
First Claim
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1. A system for determining profile information from the surface of an object, comprising:

  • an optical beam source for generating an optical beam for application to the surface;

    means for receiving a reflected optical beam from the surface;

    means for splitting said received reflected optical beam into a first portion and a second portion;

    optical detecting means for producing a first signal and a second signal in response to the magnitude of said first portion and said second portion, respectively; and

    processing means for determining the profile of said surface in response to the respective magnitudes of successive first and second signals wherein said processing means divides a difference of the first and second signals by the sum of the first and second signals to derive a beam position signal.

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