Oscillating quartz atomic force microscope

• US 4,851,671 A
• Filed: 03/07/1988
• Issued: 07/25/1989
• Est. Priority Date: 05/12/1987
• Status: Expired due to Term

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Pohl, Wolfgang D.
• Primary Examiner(s): Eisenzopf, Reinhard J.
• Assistant Examiner(s): Nguyen, Vinh P.
• Application Number:
  US07/164,941
• Time in Patent Office: 505 Days
• Field of Search: 250/492.2, 250/306, 250/307, 250/423 F, 250/310, 250/311, 324/158 R, 324/158 P, 324/158 F, 324/73 PC
• US Class Current: 850/4
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01Q 10/045 Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe
• CPC Class Codes: G01Q 10/065 Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself
• CPC Class Codes: G01Q 60/32 AC mode
• CPC Class Codes: Y10S 977/851 Particular movement or positioning of scanning tip
• CPC Class Codes: Y10S 977/863 Atomic force probe

Abstract

This atomic force microscope includes a pointed tip (1) mounted on top of an oscillating crystal (2) which is translatable in xyz-directions by a conventional xyz-drive (4). A potential applied to a pair of electrodes (5, 6) coated on opposite faces of the crystal (2) causes the latter to oscillate with its resonance frequency. As the tip (1) is approached to a surface to be investigated, the frequency of oscillation of the crystal deviates from its original frequency. This deviation can be used in a feedback loop to control the distance in z-direction of the tip (1) from the surface being investigated and to plot an image of the contour of each scan performed by the tip (1) across the surface.

Claims

1. Atomic force microscope comprising a pointed tip (1) provided for interaction with a surface (12) to be investigated and means (4) for approaching said tip (1) to said surface (12) to within a working distance on the order of one tenth of a nanometer, and for scanning said tip (1) across said surface (12) in a matrix fashion, characterized in that said tip (1) is directly attached to one surface of an oscillating body (2) carrying, on opposite sides thereof, a pair of electrodes connected to an oscillator driver circuit (7) permitting an electrical potential to be applied, that, in operation, and with said tip (1) remote from said surface (12), said body is excited to oscillate at its resonance frequency and to cause said tip directly attached thereto to move with an oscillatory motion normal to said surface, and that, with said tip (1) maintained at said working distance from said surface 12), said body oscillates at a frequency deviating in a characteristic manner from said resonance frequency as a result of oscillatory motion of said tip, that said deviation is combined with a reference signal (9) by a summing circuit (8) to produce a differential signal representative of said deviation of said oscillating frequency from said resonance frequency, and that the resulting differential signal is passed through a feedback loop (10, 11) to control said means (4) for approaching the tip (1) to said surface (12).

2. Atomic force microscope in accordance with claim 1, characterized in that said oscillating body (2) is a quartz crystal arranged on top of a substrate (3) which extends from said means for approaching (4), said quartz crystal (2) carrying said pair of electrodes (5, 6) at opposite surfaces thereof which are connected to said oscillator driver circuit 7 to provide a quartz oscillator (2,7), that said oscillator driver circuit (7) is connected to supply an output signal to one input of said summing circuit (8) the other input of said summing circuit (8) is connected to a reference frequency generator (9), that the output of said summing circuit (8) is connected to said feedback loop including a counter (10) which is adapted to supply an analog output signal representative of the variation of the resonance frequency of said quartz oscillator (2, 7) and a control unit (11) which in turn is connected to said means for approaching (4).

3. Atomic force microscope in accordance with claim 1, characterized in that said oscillating body (2) is a quartz crystal having said tip (1) directly attached thereto as an integral part of said crystal (2) protruding from one of its surfaces.

4. Atomic force microscope in accordance with claim 1, characterized in that said oscillating body (2) is a piezoelectric element other than quartz arranged on top of a substrate (3) which extends from a said means for approaching (4), said piezoelectric element (2) carrying a pair of electrodes (5, 6) at opposite surfaces thereof which are connected to said oscillator driver circuit (7), that said oscillator driver circuit (7) is connected to supply an output signal to one input of said summing circuit (8) the other input of said summing circuit (8) is connected to said reference frequency generator (9), that the output of said summing circuit (8) is connected to a counter (10) which is adapted to supply an analog output signal representative of the variation of the resonance frequency of the piezoelectric element (2) to a control unit (11) which in turn is connected to said means for approaching (4).

5. Atomic force microscope in accordance with claim 1, characterized in that said oscillating body (2) is mounted on means or approaching (4), said oscillating body (2) carrying a pair of electrodes (5,6) at opposite surfaces thereof which are connected to said oscillator driver circuit (7), that said oscillator driver circuit (7) is connected to supply an output signal to one input of said summing circuit (8) the other input of said summing circuit (8) is connected to said reference frequency generator (9), that the output of said summing circuit (8) is connected to a counter (10) which is adapted to supply an analog output signal representative of the variation of the resonance frequency of said oscillating body (2) to a control unit (11) which in turn is connected to said means for approaching (4).