Automatic calibration apparatus for a partial gas pressure measuring sensor
First Claim
1. An automatic calibration apparatus for a partial gas pressure measuring sensor, for calibrating said sensor in atmospheres of at least two kinds of standard gases, comprising standard gas suppliers for supplying said at least two kinds of standard gases, sensor support means on which said partial gas pressure measuring sensor to be calibrated is placed, for exposing said sensor to the atmospheres of said standard gases, gas supply path means for individually introducing said at least two kinds of standard gases from said standard gas suppliers to said sensor support means, detection means coupled to said gas supply path means for detecting an abnormal supply of said standard gases, gas selection means connected to said gas supply path means for selecting any one of said at least two kinds of standard gases to be supplied from said standard gas suppliers and supplying the selected gas to said sensor support means, storing means for storing an output of said partial gas pressure measuring sensor, and control means for normally storing the output of said partial gas pressure measuring sensor in said storing means when the partial gas measuring sensor placed on said sensor support means, is exposed to the atmospheres of the standard gases, said control means stopping the storage of the output of said partial gas pressure measuring sensor in said storing means when said detection means detects that the supply of the standard gases does not meet set conditions thereby indicating said abnormal supply.
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Accused Products
Abstract
An automatic calibration apparatus for a partial gas pressure measuring sensor supplies a gas having a high partial pressure (referred to as the high gas) and a gas having a low partial pressure (referred to as the low gas), to a gas selection device (103) from a gas supplier (101) through a detector device (102) which detects an abnormal gas supply condition outside given, satisfactory gas supply conditions. The selection device (103) selects the high gas or the low gas for supplying the selected gas to a sensor support (27 or 104). A partial gas pressure measuring sensor to be calibrated is placed on the sensor support and an automatic calibration controller (106) stores an output of the partial gas pressure measuring sensor (105) in an information storing memory. When the detector device, detects an abnormal gas supply of the high gas or the low gas, the automatic calibration controller stops the storing of the output of the partial gas pressure measuring sensor (105) in the storing means (107).
73 Citations
15 Claims
- 1. An automatic calibration apparatus for a partial gas pressure measuring sensor, for calibrating said sensor in atmospheres of at least two kinds of standard gases, comprising standard gas suppliers for supplying said at least two kinds of standard gases, sensor support means on which said partial gas pressure measuring sensor to be calibrated is placed, for exposing said sensor to the atmospheres of said standard gases, gas supply path means for individually introducing said at least two kinds of standard gases from said standard gas suppliers to said sensor support means, detection means coupled to said gas supply path means for detecting an abnormal supply of said standard gases, gas selection means connected to said gas supply path means for selecting any one of said at least two kinds of standard gases to be supplied from said standard gas suppliers and supplying the selected gas to said sensor support means, storing means for storing an output of said partial gas pressure measuring sensor, and control means for normally storing the output of said partial gas pressure measuring sensor in said storing means when the partial gas measuring sensor placed on said sensor support means, is exposed to the atmospheres of the standard gases, said control means stopping the storage of the output of said partial gas pressure measuring sensor in said storing means when said detection means detects that the supply of the standard gases does not meet set conditions thereby indicating said abnormal supply.
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13. An automatic calibration method for a partial gas pressure measuring sensor, for calibrating said sensor in atmospheres of at least two kinds of standard gases, comprising the steps of:
- placing said partial gas pressure measuring sensor on sensor support means, supplying any one of said at least two kinds of standard gases to said sensor placing means to expose said sensor to the atmosphere of the supplied standard gas, storing an output of said partial gas pressure measuring sensor placed in the atmosphere of said standard gas, detecting a state of supply of said standard gas, stopping the storage of the output of said partial gas pressure measuring sensor upon detection of an abnormal gas supply condition which is outside of given gas supply conditions for the supply of said standard gas, and notifying the presence of a detected abnormal gas supply condition.
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14. An automatic calibration apparatus for a partial gas pressure measuring sensor, for calibrating said sensor in atmospheres of at least two kinds of standard gases, comprising standard gas suppliers for supplying said at least two kinds of standard gases, sensor support means on which said sensor to be calibrated is placed for a calibration procedure, said sensor support means comprising a gas reservoir for storing said standard gases and exposing a sensitive surface of said sensor to the atmosphere of said standard gases, a gas inlet path for supplying said standard gases to said gas reservoir, a gas outlet path for maintaining pressure in said gas reservoir to be substantially equal to an atmospheric pressure and for rapidly performing the gas replacement, said sensor support means further including seal means for keeping an airtight seal between said sensor and said gas reservoir, gas supply path means for intermittently introducing said standard gases from said standard gas suppliers into said gas reservoir of said sensor means, gas selection means connected to said gas supply path means for selecting any of said at least two kinds of standard gases to supply the selected gas to said gas supply path means, time measuring means for measuring predetermined time intervals of supply of the standard gas selected by said gas selection means, input means for inputting an information that said partial gas pressure measuring sensor is placed on said sensor support means, control means connected to said gas selection means for determining whether a calibration is to be performed, said control means further determining, while a calibration is not being performed, whether one of said standard gases is being supplied and if so, which of said standard gases is being supplied each time said time measuring means has measured a predetermined time interval in response to the input of said input means, for intermittently exposing said partial gas pressure measuring sensor to a predetermined gas atmosphere, thereby to control said gas selection means for intermittently supplying the determined standard gas to said gas reservoir of said sensor support means, whereby the measuring precision is improved and the consumption of standard gas reduced.
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15. An automatic calibration method for a partial gas pressure measuring sensor, for calibrating said sensor in atmospheres of at least two kinds of standard gases, comprising the steps of:
- placing said partial gas pressure measuring sensor to be calibrated on sensor support means, supplying any one of said at least two kinds of standard gases to said sensor support means to expose said sensor to the atmosphere of the supplied standard gas, inputting an input signal signifying that said partial gas pressure measuring sensor is placed on said sensor support means, determining whether a calibration is performed in response to said input signal, and measuring, while a calibration is not being performed, an intermittent supply time interval of said standard gases, determining the standard gas to be supplied each time a predetermined time interval has been measured, and intermittently performing said supplying of the determined standard gas into a reservoir in said sensor support means in accordance with said intermittent supply time interval for improving the measuring precision and reducing the consumption of standard gas.
Specification