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Micromachined cold cathode vacuum tube device and method of making

  • US 4,855,636 A
  • Filed: 10/08/1987
  • Issued: 08/08/1989
  • Est. Priority Date: 10/08/1987
  • Status: Expired due to Fees
First Claim
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1. A device comprising:

  • a vacuum chamber, wherein said vacuum chamber comprises a first insulating layer, a second insulating layer spaced apart from said first layer, and a side insulating layer positioned between and sealed to said first layer and said second layer such that a vacuum space is formed within said first, second and side layers;

    a cathode disposed within said vacuum chamber and on said first layer, wherein said cathode comprises a planar field emitter having a small radius of curvature tip; and

    an anode disposed within said vacuum chamber and on said first layer, spaced apart from said cathode; and

    a gate positioned between and spaced apart from said cathode and said anode.

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