Apparatus for optically measuring the three-dimensional surface shape and inner structure of an object
First Claim
1. An apparatus for optically measuring a three-dimensional surface shape and inner structure of an object, comprising:
- a pulse light source for generating pulsed light having a first pulse width;
light conducting means for guiding said pulsed light from said pulse light source to said object;
light detecting means for detecting one of a flux of reflected light pulses from a flux of transmitted light pulses through said object and measuring the change of the intensity of said one flux with respect to time and space, each of said flux of reflected light pulses and flux of transmitted light pulses having a time-delay distribution; and
analyzing means for analyzing outputs of said ultrahigh speed light detecting means.
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Accused Products
Abstract
An apparatus for optically measuring a three-dimensional surface shape and inner structure of a three-dimensional object without destruction of the object. When a light pulse having a short pulse width is applied to the object, there are observed a flux of light pulses reflected from or transmitted through the object which has information on the three-dimensional surface shape and inner structure of the object. This apparatus optically measures and analyzes in the order of a picosecond the intensity distribution of the light pulses from the object with time and space, to thereby obtain a complete three-dimensional image of the object.
19 Citations
17 Claims
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1. An apparatus for optically measuring a three-dimensional surface shape and inner structure of an object, comprising:
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a pulse light source for generating pulsed light having a first pulse width; light conducting means for guiding said pulsed light from said pulse light source to said object; light detecting means for detecting one of a flux of reflected light pulses from a flux of transmitted light pulses through said object and measuring the change of the intensity of said one flux with respect to time and space, each of said flux of reflected light pulses and flux of transmitted light pulses having a time-delay distribution; and analyzing means for analyzing outputs of said ultrahigh speed light detecting means. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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Specification