Solid state light modulator incorporating metallized gel and method of metallization

• US 4,857,978 A
• Filed: 08/11/1987
• Issued: 08/15/1989
• Est. Priority Date: 08/11/1987
• Status: Expired due to Fees

• Current Assignee: North American Philips Corp. (Koninklijke Philips N.V.)
• Original Assignee: North American Philips Corp. (Koninklijke Philips N.V.)
• Inventors: Hemmer, Richard E., Goldburt, Efim S.
• Primary Examiner(s): James, Andrew J.
• Assistant Examiner(s): Crane, Sara W.
• Application Number:
  US07/084,260
• Time in Patent Office: 735 Days
• Field of Search: 357/24 LR, 357/30 L, 350/360, 350/355, 428/429, 428/447, 358/233, 358/234
• US Class Current: 257/239
• CPC Class Codes: G02B 26/00 Optical devices or arrangements for the control of light using movable or deformable optical elements control of light by modification of the optical properties of the media of the elements involved therein G02F1/00

Abstract

A solid state light modulator structure useful in a video display system includes a deformable silica containing gel layer on an array of charge storage elements, and an adherent, highly light reflective metal (e.g., Ag) electrode layer formed on the surface of the gel layer by evaporation, following treatment of the gel surface in an oxygen-containing plasma.

Claims

1. A solid state light modulator structure comprising:

(a) a solid state charge storage device comprising an array of charge storage elements formed in a semiconductor substrate, each element associated with at least one display electrode on the surface of the substrate,

(b) a deformable elastomer layer disposed on the solid state device, the layer covering the electrode array, and

(c) a thin pellicle layer on the surface of the elastomer layer, and

(d) a flexible, adherent and light reflective conductive metal layer disposed over the pellicle layer,

characterized in that the elastomer layer is a silicon and oxygen containing gel, and the pellicle layer is a silicon oxide layer bonded directly to the gel layer.

2. The solid state light modulator of claim 1 in which the silicon and oxygen containing gel is polydimethyl siloxane.

3. The solid state light modulator of claim 1 in which the metal in the conductive metal layer is selected from the group consisting of silver, aluminum and indium.

4. The solid state light modulator of claim 3 in which the metal is silver.

5. The solid state light modulator of claim 4 in which the specular reflectance of the silver layer is at, least 90 percent.