Digital technique for precise measurement of variable capacitance

• US 4,860,232 A
• Filed: 04/22/1987
• Issued: 08/22/1989
• Est. Priority Date: 04/22/1987
• Status: Expired due to Fees

• Current Assignee: Massachusetts Institute of Technology
• Original Assignee: Massachusetts Institute of Technology
• Inventors: Kung, Joseph T., Lee, Hae-Seung, Howe, Roger T.
• Primary Examiner(s): Lall, Parshotam S.
• Assistant Examiner(s): COSIMANO, EDWARD R
• Application Number:
  US07/041,773
• Time in Patent Office: 853 Days
• Field of Search: 73/718, 73/724, 73/760, 73/763, 73/777, 73/780, 324/60 C, 324/60 R, 324/61 R, 364/558, 364/571, 364/571.04
• US Class Current: 702/104
• CPC Class Codes: G01D 5/2415 adapted for encoders
• CPC Class Codes: G01L 9/125 with temperature compensating means non electric temperature compensating means G01L19/04
• CPC Class Codes: G01R 17/06 Automatic balancing arrangements
• CPC Class Codes: G01R 27/2605 Measuring capacitance capacitive sensors G01D5/24

Abstract

The present invention comprises a circuit for measuring the capacitive differences of small capacitors. The circuit comprises a reference capacitor and a sensor capacitor. Connected to one of the plates of each capacitor is a switch which connects the capacitors to one of two reference voltages. The other plate of the capacitors are connected to an input terminal of a voltage comparator. The comparator compares the input voltage with a third reference voltage. Differences in voltages detected by the comparator are applied to a feedback loop for generating an offset voltage at the input terminal. The offset voltage applied at the input terminal is proportional to the capacitive difference between the reference capacitor and the sensor capacitor. The feedback loop comprises a successive approximation register for digitizing the offset voltages and a digital to analog converter for converting the digitized voltages into analog voltages which are applied at the input terminal. Digitized offset voltages can be measured at the output of the successive approximation register.

Claims

1. A sensor comprising a sensing capacitor, the capacitor of which varies with a parameter to be sensed, the system further comprising:

means for isolating a definite amount of charge on a node electrically connected to the sensing capacitor;

means for modifying the distribution of said definite charge on the node by modifying at least a voltage applied to the sensing capacitor;

a comparator for sensing the voltage on the node; and

successive approximation means or receiving an output from the comparator and applying a feedback signal to an input to the comparator to determine a change in voltage on the node resulting from the modified distribution of the charge.

2. A sensor system as claimed in claim 1 wherein an initial potential is applied to the sensing capacitor to establish the definite amount of charge, and the means for modifying the distribution of charge applies ground potential to the sensing capacitor.

3. A sensor system as claimed in claim 1 wherein the feedback signal is applied through a coupling capacitor to the node and the node is connected to the inverting input of the comparator.

4. A sensor system as claimed in claim 1 wherein the means for isolating comprising a switch connected across the comparator.

5. A sensor system as claimed in claim 1 further comprising calibration means for storing a calibration signal indicative of a change in voltage on the node, which change results from other than change in capacitance of the sensing capacitor, to correct a determined change in voltage.

6. A sensor system as claimed in claim 5 wherein the means for isolating the charge includes a switch which injects charge to the node, and the calibration means senses, by the comparator and successive approximation means, the change in voltage at the node when the switch is opened without modifying the distribution of charge on the node.

7. A sensor system as claimed in claim 5 wherein the feedback signal to the comparator is applied through a coupling capacitor to an inverting input of the comparator and the determined change in voltage is corrected by applying a calibration voltage to the coupling capacitor.

8. A sensor system as claimed in claim 1 further comprising a reference capacitor connected to the node and wherein the means for modifying modifies the voltage applied to each of the sensing capacitor and reference capacitor.

9. A sensor system as claimed in claim 8 wherein an initial potential is applied to the sensing capacitor to establish the definite amount of charge, and the means for modifying the distribution of charge applies ground potential to the sensing capacitor.

10. A sensor system as claimed in claim 8 wherein the reference capacitor also varies with the parameter to be sensed.

11. A sensor system as claimed in claim 10 wherein positive and negative voltages are applied to the reference and sensing capacitors to establish the amount of charge on the node, and the distribution of the charge is modified by applying ground potential to each of the reference capacitor and sensing capacitor.

12. A sensor system as claimed in claim 8 further comprising calibration means for storing a calibration signal indicative of a change in voltage on the node, which change results from other than change in capacitance of the sensing capacitor, to correct the determined change in voltage.

13. A sensor system as claimed in claim 12 wherein the means for isolating the charge includes a switch which inject charge to the node, and the calibration means senses, by the comparator and successive approximation means, the change in voltage at the node when the switch is opened without modifying the distribution of charge on the node.

14. A sensor system as claimed in claim 12 further comprising means for isolating the definite amount of charge and modifying the distribution of charge in dual sequences such that the difference between the changes in voltage on the node during the two sequences are indicative of capacitance hysteresis.

15. A sensor system comprising a sensor capacitor, the capacitance of which varies with a parameter to be sensed, the system further comprising:

means for isolating a definite amount of charge on a node electrically connected to the sensing capacitor;

means for modifying the distribution of said definite charge on the node by modifying at least a voltage applied to the sensing capacitor;

a detector for determining change in voltage on the node; and

calibration means connected to the detector for storing a calibration signal indicative of a change in voltage on the node, which change results from other than change in capacitance of the sensing capacitor, and for correcting the determined change in voltage based on the calibration signal.

16. A sensor system as claimed in claim 15 wherein the means for isolating the charge includes a switch which injects charge to the node, and the calibration means senses a change in voltage at the node when the switch is opened.

17. A sensor system as claimed in claim 15 further, comprising a coupling capacitor connected to the node and wherein the calibration signal is applied across the coupling capacitor to the node as the definite amount of charge is isolated on the node.

18. A sensor system as claimed in claim 15 wherein the calibration signal is a function of a mismatch between the sensing capacitor and a reference capacitor connected to the node.

19. A sensor system as claimed in claim 15 further comprising a reference capacitor connected to the node and wherein the means for modifying modifies the voltage applied to each of the sensing capacitor and reference capacitor.

20. A sensor system as claimed in claim 19 wherein the reference capacitor also varies with the parameter to be sensed.

21. A sensor system as claimed in claim 20 further comprising means for isolating the definite amount of charge and modifying the distribution of charge in dual sequences such that the difference between the changes in voltage on the node during the two sequences are indicative of capacitance hysteresis.

22. A sensor system comprising a sensing capacitor, the capacitance of which varies with a parameter to be sensed, the system further comprising:

a node electrically connected to the sensing capacitor;

a reference capacitor connected to the node;

a comparator for sensing the voltage on the node;

a switch in parallel with the comparator for isolating a definite amount of charge on the node;

means for modifying the distribution of said definite charge on the node by modifying voltages applied to the sensing capacitor and reference capacitor;

a coupling capacitor connected to the node;

digital successive approximation means for receiving an output from the comparator and applying a feedback signal through the coupling capacitor to null and thus determine a change in voltage on the node resulting from the modified distribution of charge; and

calibration means connected to the successive approximation means for storing a calibration signal indicative of a change in voltage on the node, which change results from other than change in capacitance of the sensing capacitor, to correct the determined change in voltage.

23. The method of sensing a parameter which results in change in capacitance of at least one sensing capacitor comprising:

isolating a charge on a node electrically connected to the sensing capacitor;

modifying the distribution of said charge on the node by modifying at least a voltage applied to the sensing capacitor; and

determining change in voltage resulting from the modified distribution of charge by comparing in a comparator the voltage on the node to a reference and, responsive to an output from the comparator, performing successive approximations to generate a feedback signal applied to an input to the comparator.

24. A method as claimed in claim 23 wherein an initial potential is applied to the sensing capacitor to establish the amount of charge, and the means for modifying the distribution of charge applies ground potential to the sensing capacitor.

25. A method as claimed in claim 23 wherein the successive approximations are applied through a coupling capacitor to the node, and the node is connected to the inverting input of the comparator.

26. A method as claimed in claim 23 further comprising the step of storing a calibration signal indicative of a change in voltage on the node, which change results from other than change in capacitance of the sensing capacitor, to correct a determined change in voltage.

27. A method as claimed in claim 26 wherein the charge is isolated by a switch which inject charge to the node and further comprising the steps of sensing the change in voltage at the node when the switch is opened and correcting the determined change in voltage for injected change.

28. A method as claimed in claim 27 further comprising applying a calibration voltage through a coupling capacitor to the node as the charge is isolated.

29. A method as claimed in claim 23 further comprising modifying the voltage applied to each of the sensing capacitor and a reference capacitor connected to the node.

30. A method as claimed in claim 29 wherein positive and negative voltages are applied to the reference and sensing capacitors to establish the amount of charge on the node and distribution of the charge is modified by applying ground potential to each of the reference capacitor and sensing capacitor.

31. A method as claimed in claim 29 wherein an initial potential is applied to the sensing capacitor to establish the definite amount of charge and the distribution of charge is modified by applying ground potential to the sensing capacitor.

32. A method as claimed in claim 29 further comprising storing a calibration signal indicative of a change in voltage on the node, which charge results from other than change in capacitance of the sensing capacitor, and with the calibrating signal, correcting the change in voltage determined in the step of determining.

33. A method as claimed in claim 32 wherein the the charge is isolated by a switch which injects charge to the node, and the calibration means senses, by the comparator and successive approximation means, the change in voltage at the node when the switch is opened without modifying the distribution of charge on the node.

34. A method as claimed in claim 32 further comprising isolating the amount of charge and modifying the distribution of charge in dual sequences and determining the capacitance hysteresis based on the difference between the changes in voltage on the node during the two sequences.

35. A method of sensing a parameter which results in change in capacitance of at least one sensing capacitor comprising:

isolating a charge, on a node electrically connected to the sensing capacitor;

modifying the distribution of said charge on the node by modifying at least a voltage applied to the sensing capacitors;

determining the change in voltage on the node; and

correcting the determined change in voltage based on a calibration signal indicative of a change in the voltage on the anode which results from other than change in capacitance of the sensing capacitor.

36. A method as claimed in claim 35 wherein the charge is isolated by a switch which inject charge to the node, and the calibration means senses, by the comparator and successive approximation means, the change in voltage at the node when the switch is opened without modifying the distribution of charge on the node.

37. A method as claimed in claim 35 further comprising modifying the voltage applied to each of the sensing capacitor and a reference capacitor connected to the node.

38. A method as claimed in claim 37 further comprising isolating the amount of charge and modifying the distribution of charge in dual sequences and determining capacitance hysteresis based on the difference between the changes in voltage on the node during the two sequences.