Method and apparatus for testing chemical and ionic sensors

• US 4,864,229 A
• Filed: 08/05/1988
• Issued: 09/05/1989
• Est. Priority Date: 05/03/1986
• Status: Expired due to Term

• Current Assignee: Integrated Ionics Incorporated
• Original Assignee: Integrated Ionics Incorporated
• Inventors: Lauks, Imants R., Wieck, Henry J.
• Primary Examiner(s): Smith, Jerry
• Assistant Examiner(s): Baker, Stephen M.
• Application Number:
  US07/230,656
• Time in Patent Office: 396 Days
• Field of Search: 73/1 R, 73/1 G, 73/23, 73/26, 73/864.81, 73/864.83, 204/1 T, 204/400, 204/401, 204/406, 204/415, 204/416, 204/418, 204/419, 324/71.1, 324/71.5, 324/158 F, 324/158 R, 357/25, 364/571
• US Class Current: 324/750.03
• CPC Class Codes: G01N 27/4148 Integrated circuits therefor, e.g. fabricated by CMOS processing CMOS processing per se H01L21/82
• CPC Class Codes: G01R 31/2621 for testing field effect transistors, i.e. FET's
• CPC Class Codes: G01R 31/2851 Testing of integrated circuits [IC] G01R31/317 takes precedence; testing individual devices G01R31/26; testing printed circuits G01R31/2801

Abstract

A method and apparatus for automatically testing chemical and ionic sensing electronic circuits is provided. A fluid used in testing is placed in a hollow pipette with at least one open end. The open end of the pipette is applied directly against a sensing layer on the sensing electronic circuit forming a leakproof seal. Alternatively, a flow-through type fluid container is used and is advantageously applied with gas measurements. Test electronics are provided to compile and analyze the performance of various sensing layers. Aligning means automatically select a sensing electronic circuit and position the circuit such that the holding device can be urged against the sensing layer automatically.

Claims

1. Apparatus for automatically testing a plurality of chemical and ionic sensing electronic circuits comprising:

a fluid confining cell having at least one open orifice to contain a known test fluid,

means for receiving a first sensing electronic circuit device of a plurality of such sensing electronic circuit device on a continuous surface, in which said means for receiving comprises an exposed sensing layer to be tested, and for aligning said circuit device such that said sensing layer is aligned with said orifice in said fluid confining cell,

positioning means for urging the open orifice of said fluid confining cell into leakproof engagement with said sensing electronic circuit device to be tested,

wherein when said cell is filled with said known test fluid, said test fluid contacts said exposed sensing layer, and

means for monitoring the response of said circuit device to said test fluid,

wherein said aligning means automatically selects and positions in succession a plurality of sensing electronic circuit devices on said continuous surface with respect to said positioning means.

2. The apparatus of claim 1 wherein said means for monitoring the response of said circuit device to said test fluid comprises means for applying a test signal to said circuit while said exposed sensing layer is in contact with said test fluid;

and for monitoring the response of said circuit device to said test signal.

3. The apparatus of claim 1 wherein said positioning means urges said fluid confining cell directly against said sensing layer so as to form a leakproof seal therebetween.

4. The apparatus of claim 1 further comprising filling means for automatically filling said fluid confining cell with said test fluid when said cell has been urged into engagement with said circuit device.

5. The apparatus of claim 1 wherein a sealing material is placed between said sensing electronic circuit device and said orifice of said cell so as to form an essentially leakproof seal.

6. The apparatus of claim 1 further comprising means for directing said fluid to flow across said sensing layer.

7. The apparatus of claim 1 wherein the temperature of said fluid is varied.

8. The apparatus of claim 1 further comprising microprocessor means for controlling said apparatus.

9. The apparatus of claim 1 further comprising controlling means for performing a series of tests of said sensing electronic circuit device employing differing fluids and for recording the response of the sensing circuit to said series of tests.

10. The apparatus of claim 1 wherein said fluid is a gas.

11. The apparatus of claim 1 wherein said sensing electronic circuit device comprises a programmable memory and said apparatus further comprises means for writing into said programmable memory a characteristic correction curve corresponding to the response of said sensing electronic circuit device to said test fluid.

12. The apparatus of claim 1 further comprising means for physically altering said sensing electronic circuit device to produce a different result in response to measurements made by said monitoring means.

13. The apparatus of claim 12 wherein said means for altering comprises a laser to trim a portion of said sensing electronic circuit device.

14. A method for testing a plurality of chemical and ionic sensing electronic circuits comprising the steps of:

(a) aligning a first sensing electronic circuit device of a plurality of such sensing electronic devices on a continuous surface and a fluid confining cell with respect to one another such that said fluid confining cell is aligned with a sensing layer of said circuit device, said cell having at least one orifice and being capable of containing a test fluid when said orifice is urged against a continuous surface,

(b) urging said orifice against said sensing layer so as to form a leakproof seal,

(c) filling said fluid confining cell with a test fluid so that said test fluid contacts said sensing layer, and

(d) measuring the response of said circuit device to said test fluid, to characterize said circuit device,

(e) and then repeating the above steps (a) through (d) so that a plurality of other sensing electronic circuit devices on said continuous surface are tested in succession to permit measuring the response of each of the circuit device to said test fluid, to characterize each of the said circuit devices.

15. The method of claim 14 wherein each of said steps are automatically accomplished a plurality of times to carry out plural tests with respect to a particular circuit device, a plurality of differing test fluids being employed in said plural tests.

16. The method of claim 14 wherein said sensing electronic circuit device comprises a programmable memory and said method further comprises the step of writing into said programmable memory a characteristic correction curve responsive to the correlation of the response of said sensing electronic circuit device to said test fluid.

17. The method of claim 14 further comprising the step of causing said fluid to flow across said sensing layer.

18. The method of claim 14 wherein the temperature of said fluid is varied.

19. The method of claim 14 wherein said fluid is a gas.

20. The method of claim 14 comprising the further step of applying a test signal to said circuit device, and monitoring the response of said circuit device to said test signal.

21. The method of claim 14 further comprising the step of altering said sensing electronic circuit device responsive to the characterization of said circuit device, so as to alter the electrical signal produced by said sensing electronic circuit device.

22. The method of claim 21 wherein said altering step comprises the step of laser trimming a portion of said sensing electronic circuit device.