Method and system for dual phase scanning acoustic microscopy

• US 4,866,986 A
• Filed: 09/15/1988
• Issued: 09/19/1989
• Est. Priority Date: 09/15/1988
• Status: Expired due to Fees

• Current Assignee: Sonoscan Inc. (Nordson Corporation)
• Original Assignee: Sonoscan Inc. (Nordson Corporation)
• Inventors: Cichanski, Frank J.
• Primary Examiner(s): Levy, Stewart J.
• Assistant Examiner(s): GREGORY, BERNARR E
• Application Number:
  US07/245,003
• Time in Patent Office: 369 Days
• Field of Search: 73/588, 73/598, 73/599, 73/600, 73/620, 73/629, 358/112, 367/110
• US Class Current: 73/600
• CPC Class Codes: G01H 3/125 for representing acoustic field distribution using optical means G01H9/002; sonar systems for imaging G01S7/56, G01S15/89; acoustic holography G03H3/00
• CPC Class Codes: G01N 29/0609 Display arrangements, e.g. colour displays indicating or recording in connection with measuring in general G01D
• CPC Class Codes: G01N 29/0681 by acoustic microscopy, e.g. scanning acoustic microscopy

Abstract

In a scanning acoustic microscope of the reflection type, in which an object is insonified with a series of ultrasonic acoustic pulses in accordance with a preselected scanning pattern and reflected acoustic echo pulses are received and employed to generate an initial electrical signal comprising a sequence of electrical pulses having amplitudes and polarities representative of the magnitudes and phases of the echoes, a directly readable unified interpretative display image is produced from the entire electrical signal; that image includes the usual scanning position and depth information determined by timing of the electrical pulses, together with complete transition information regarding the nature of acoustic impedance changes, based on both the amplitudes and the polarities of those pulses. A compared dual integration method and system, with related gating and display enhancement techniques, comprises the preferred embodiment.

Claims

1. The method of examining internal structure in an object by reflection mode scanning acoustic microscopy, comprising the steps of:

(A) generating a series of acoustic pulses of ultrasonic frequency and predetermined magnitude;

(B) insonifying an object with the acoustic pulses from step A, with predetermined timing and in accordance with a preselected scanning pattern;

(C) receiving ultrasonic pulse echoes reflected from the object and developing an initial electrical signal comprising a sequence of electrical pulses of varying amplitudes and polarities representative of the magnitudes and phases, respectively, of the ultrasonic pulse echoes; and

(X) producing a unified image representative of structure of the object, the unified image simultaneously displaying positions, magnitudes, and directions of acoustic impedance transitions for at least one depth level of the object, in which image;

(1) positions of the acoustic transitions in the image and the image level in the object are determined by the timing of the pulses in the initial electrical signal,

(2) transitions between differing acoustic impedances at the surfaces of and within the object are determined by the amplitudes of the pulses in the initial electrical signal, and

(3) increases and decreases in acoustic impedance, in transitions at the surfaces of and within the object, are determined by the polarities of the pulses in the initial electrical signal.

2. A method of scanning acoustic microscopy, according to claim 1, comprising the following additional step:

(D) gating the initial electrical signal on and off at a predetermined frequency to limit that signal to desired information; and

utilizing the gated initial electrical signal to produce the image of step X.

3. A method of scanning acoustic microscopy, according to claim 1, comprising the following additional steps:

(E) integrating the positive-going pulses in the initial electrical signal to develop a positive polarity sub-signal representative of a first phase of the reflected ultrasonic energy;

(F) integrating the negative-going pulses in the initial electrical signal to develop a negative polarity sub-signal representative of a second phase of the reflected ultrasonic energy; and

utilizing the sub-signals to produce the image of step X.

4. A method of scanning acoustic microscopy, according to claim 3, comprising the following additional step:

(D) gating the initial electrical signal on and off at a predetermined frequency to limit that signal to desired information; and

utilizing the gated initial electrical signal in steps E and F.

5. A method of scanning acoustic microscopy, according to claim 4, in which the gating of step D is performed in conjunction with and concurrently with the integrations of steps E and F.

6. A method of scanning acoustic microscopy, according to claim 3, comprising the following additional steps:

(G) combining the two sub-signals on the basis of absolute amplitude, independent of polarity, to develop an amplitude content signal; and

(H) comparing the two sub-signals on the basis of the combination of amplitude and polarity to develop a polarity content signal; and

utilizing the amplitude and polarity content signals in carrying out step X.

7. A method of scanning acoustic microscopy, according to claim 6, comprising the following additional step:

(I) modifying the amplitude content signal in accordance with the polarity content signal to develop an image signal comprising a data continuum having twice the range of the amplitude content signal; and

utilizing the image signal to produce the image in step X.

8. A method of scanning acoustic microscopy, according to claim 7, comprising the following additional step:

(D) gating the initial electrical signal on and off at a predetermined frequency to limit that signal to desired information; and

utilizing the gated initial electrical signal in steps E and F.

9. A method of scanning acoustic microscopy, according to claim 8, in which the gating of step D is performed in conjunction with and concurrently with the integrations of steps E and F.

10. A method of scanning acoustic microscopy, according to claim 9, in which the gating of step D is also carried out prior to the integrations of steps E and F.

11. A display system for a scanning acoustic microscope of the kind comprising transducer means for generating a series of acoustic pulses of ultrasonic frequency and predetermined magnitude, acoustic scanning means for directing the acoustic pulses to impinge upon and insonify an object with predetermined timing and in accordance with a preselected scanning pattern, and receiver means for receiving ultrasonic pulse echoes reflected from the object and developing an initial electrical signal of varying amplitude and polarity representative of the magnitude and phase, respectively, of the ultrasonic pulse echoes, the display system comprising:

amplifier means, connected to the receiver means, for generating an amplitude content signal representative of amplitude of the initial electrical signal, independent of polarity;

comparator means, connected to the receiver means, for generating a polarity content signal representative of polarity of the initial electrical signal, independent of amplitude; and

display means, actuated by the content signals, for displaying a unified image of the object in which acoustic impedance transitions for at least one depth level of the object from which echoes of different polarities occur are clearly distinguished from each other in the image despite similarities, however close, in the magnitudes of those echoes.

12. A display system for a scanning acoustic microscope according to claim 11 and further comprising integrator means connected to the receiver means, ahead of the comparator means, the integrator means including:

a first integrator for integrating the positive-going components of the initial electrical signal to develop a positive polarity sub-signal representative of a first phase of the ultrasonic echoes; and

a second integrator for integrating negative-going components for the initial electrical signal to develop a negative polarity sub-signal representative of a second phase of the ultrasonic echoes.

13. A display system for a scanning acoustic microscope according to claim 12 in which the integrator means is also interposed between the receiver means and the amplifier means.

14. A display system for a scanning acoustic microscope according to claim 13 and further comprising:

integrator gate means, connected to both integrators, for gating the integrators on and off at a predetermined frequency.

15. A display system for a scanning acoustic microscope according to claim 13 and further comprising:

means for modifying the amplitude content signal in accordance with the polarity content signal to develop an image signal comprising a data continuum having twice the range of the amplitude content signal;

the display means being actuated by the image signal.

16. A display system for a scanning acoustic microscope according to claim 15 and further comprising:

integrator gate means, connected to both integrators, for gating the integrators on and off at a predetermined frequency.

17. A display system for a scanning acoustic microscope according to claim 16 and further comprising initial signal gate means for gating the initial electrical signal on and off at a predetermined frequency.

18. A display system for a scanning acoustic microscope according to claim 11 and further comprising:

initial signal gate means for gating the initial electrical signal on and off at a predetermined frequency.

19. A display system for a scanning acoustic microscope according to claim 18 and further comprising integrator means connected to the receiver means, ahead of the comparator means, the integrator means including

a first integrator for integrating positive-going components of the initial electrical signal to develop a positive polarity sub-signal representative of a first phase of the ultrasonic echoes;

and

a second integrator for integrating negative-going components of the initial electrical signal to develop a negative polarity sub-signal representative of a second phase of the ultrasonic echoes.

20. A display system for a scanning acoustic microscope according to claim 19 in which the integrator means is also interposed between the receiver means and the amplifier means.

21. A display system for a scanning acoustic microscope according to claim 20 and further comprising:

means for modifying the amplitude content signal in accordance with the polarity content signal to develop an image signal comprising a data continuum having twice the range of the amplitude content signal;

the display means being actuated by the image signal.

22. A display system for a scanning acoustic microscope according to claim 21 in which the display means comprises means for reproducing the data continuum, in the image, as a brightness continuum.

23. A display system for a scanning acoustic microscope according to claim 21 in which the display means comprises means for reproducing the data continuum, in the image, as a continuous color spectrum.

24. A display system for a scanning acoustic microscope according to claim 22 in which the display means comprises means for reproducing different portions of the data continuum, in the image, in different colors.

25. A display system for a scanning acoustic microscope according to claim 11 and further comprising:

means for modifying the amplitude content signal in accordance with the polarity content signal to develop an image signal comprising a data continuum having twice the range of the amplitude content signal;

the display means being actuated by the image signal.

26. A display system for a scanning acoustic microscope according to claim 25 in which the display means comprises means for reproducing the data continuum, in the image, as a brightness continuum.

27. A display system for a scanning acoustic microscope according to claim 25 in which the display means comprises means for reproducing the data continuum, in the image, as a continuous color spectrum.

28. A display system for a scanning acoustic microscope according to claim 25 in which the display means comprises means for reproducing different portions of the data continuum, in the image, in different colors.