Dusttight storage cabinet apparatus for use in clean rooms
First Claim
1. A dusttight storage cabinet apparatus for use in clean rooms, the storage cabinet apparatus being used for storing works which require a clean atmosphere, the storage cabinet apparatus comprising:
- a housing having a front wall, the front wall having a first entrance for allowing works to come in and go out of the housing therethrough;
air supply means for supplying an inside of the housing with clean air so that cleanliness of the housing is maintained at a same level or higher level than that of the clean rooms;
a vertical rotation shaft rotatably disposed in the housing for turning about a longitudinal axis thereof;
first drive means for turning the rotation shaft; and
a rack assembly of a substantially cylindrical structure coaxially secured to the rotation shaft, the rack assembly having a plurality of compartments, opening radially outward, for storing the works therewithin, the compartments being partitioned off from one another so as to prevent cross-contamination by dust thereamong, each of the compartments having an air inlet in communication with the air supply means so that clean air is introduced into each of the compartments through a corresponding air inlet, the air inlet having an air filter for filtrating air passing through the air inlet, the compartments further having means for covering upper portions of the opening of the compartments so that each of lower portions of the openings serves as an air outlet for each of the compartments.
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Accused Products
Abstract
There is disclosed a dusttight storage cabinet apparatus used for storing works such as wafer cassettes for containing semiconductor wafers. The storage cabinet apparatus includes: a housing having an entrance, formed in its front wall, for allowing works to come in and go out of the housing therethrough; an air supply duct for supplying the inside of the housing with clean air; a vertical rotation shaft rotatably disposed in the housing for turning about its longitudinal axis; a drive motor for turning the rotation shaft; and a rack assembly of a substantially cylindrical structure. The rack assembly is coaxially secured to the rotation shaft and has a plurality of compartments for storing the works therewithin. The compartments open radially outward and are partitioned off from one another so as to prevent cross contamination by dust among the compartments.
282 Citations
15 Claims
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1. A dusttight storage cabinet apparatus for use in clean rooms, the storage cabinet apparatus being used for storing works which require a clean atmosphere, the storage cabinet apparatus comprising:
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a housing having a front wall, the front wall having a first entrance for allowing works to come in and go out of the housing therethrough; air supply means for supplying an inside of the housing with clean air so that cleanliness of the housing is maintained at a same level or higher level than that of the clean rooms; a vertical rotation shaft rotatably disposed in the housing for turning about a longitudinal axis thereof; first drive means for turning the rotation shaft; and a rack assembly of a substantially cylindrical structure coaxially secured to the rotation shaft, the rack assembly having a plurality of compartments, opening radially outward, for storing the works therewithin, the compartments being partitioned off from one another so as to prevent cross-contamination by dust thereamong, each of the compartments having an air inlet in communication with the air supply means so that clean air is introduced into each of the compartments through a corresponding air inlet, the air inlet having an air filter for filtrating air passing through the air inlet, the compartments further having means for covering upper portions of the opening of the compartments so that each of lower portions of the openings serves as an air outlet for each of the compartments. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A dusttight storage cabinet apparatus for use in clean rooms, the storage cabinet apparatus being used for storing works which require a clean atmosphere, the storage cabinet apparatus comprising:
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a housing having a front wall, the front wall having a first entrance for allowing works to come in and go out of the housing therethrough; air supply means for supplying an inside of the housing with clean air so that cleanliness of the housing is maintained at a same level or higher level than that of the clean rooms; a vertical rotation shaft rotatably disposed in the housing for turning about a longitudinal axis thereof; a linear motor for turning the rotation shaft, said linear motor having an annular secondary conductive body coaxially attached to the rotation shaft, and a plurality of primary coils disposed in the housing in such a manner that the primary coils confront the secondary conductive body; and a rack assembly of a substantially cylindrical structure coaxially secured to the rotation shaft, the rack assembly having a plurality of compartments opening radially outward, for storing the works therewith, the compartments being partitioned off from one another so as to prevent cross-contamination by dust thereamong. - View Dependent Claims (15)
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Specification