Semiconductor device having waveguide-coaxial line transformation structure
First Claim
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1. A semiconductor device, comprising:
- a metal base of a package, having a hole passing through a base;
a semiconductor circuit element mounted on the base;
a cap of the package air-tightly fixed to the base for sealing the circuit element within the package;
a metal terminal for waveguide-coaxial line transformation, passing through the hole of the base and having an inner end portion at which the terminal is electrically connected to the circuit element, a central transformation portion in the hole of the base, and an outer antenna portion extending toward the outside of the package; and
a dielectric spacer between the terminal and the base, the terminal being air-tightly fixed directly to the base by the dielectric spacer;
wherein the hole of the base, the dielectric spacer, and the central transformation portion of the terminal are formed so as to satisfy the following formula;
##EQU2## where Z0 is a required inherent impedance of a characteristic frequency, ε
is a dielectric constant of the dielectric spacer, d1 is a diameter of the central transformation portion of the terminal and d2 is a diameter of a portion, enclosing the central transformation portion of the terminal of the hole of the base, such that said members act as a required waveguide-coaxial line transformer.
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Abstract
In a semiconductor device which has an air tight metal package containing a high frequency wave range circuit element and which has a waveguide-coaxial line transformation structure, a metal terminal for the waveguide-coaxial line is air-tightly attached directly in a hole of a base of the metal package with a dielectric spacer, usually by glass fusion, whereby the thickness of the base may be reduced and attachment of the terminal to the base is simplified.
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Citations
23 Claims
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1. A semiconductor device, comprising:
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a metal base of a package, having a hole passing through a base; a semiconductor circuit element mounted on the base; a cap of the package air-tightly fixed to the base for sealing the circuit element within the package; a metal terminal for waveguide-coaxial line transformation, passing through the hole of the base and having an inner end portion at which the terminal is electrically connected to the circuit element, a central transformation portion in the hole of the base, and an outer antenna portion extending toward the outside of the package; and a dielectric spacer between the terminal and the base, the terminal being air-tightly fixed directly to the base by the dielectric spacer; wherein the hole of the base, the dielectric spacer, and the central transformation portion of the terminal are formed so as to satisfy the following formula;
##EQU2## where Z0 is a required inherent impedance of a characteristic frequency, ε
is a dielectric constant of the dielectric spacer, d1 is a diameter of the central transformation portion of the terminal and d2 is a diameter of a portion, enclosing the central transformation portion of the terminal of the hole of the base, such that said members act as a required waveguide-coaxial line transformer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 21)
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8. a semiconductor device, comprising:
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a metal base of a package, having a hole passing through a base, a semiconductor circuit element mounted on the base; a cap of the package air-tightly fixed to the base for sealing the circuit element within the package; a metal terminal for waveguide-coaxial line transformation, passing through the hole of the base and having an inner end portion, the inner end portion extending from the inside of the hole in the base into the package and having a flat top surface and a first diameter, a central transformation portion having a second diameter in the hole of the base, and an outer antenna portion having a third diameter and extending toward the outside of the package, the first diameter being larger than the second diameter; a wire bonded to the top surface of the inner end portion of the terminal and to the circuit element and electrically connecting the terminal with the circuit element; a dielectric spacer between the terminal including the transformation portion and a part of the inner end portion thereof and the base, the terminal being air-tightly fixed directly to the base by the dielectric spacer; wherein the hole of the base, the dielectric spacer, and the central transformation portion of the terminal are formed so as to satisfy the following formula;
##EQU3## wherein Z0 is a required inherent impedance of a characteristic frequency, ε
is a dielectric constant of the dielectric spacer, d1 is the second diameter of the central transformation portion of the terminal and d2 is a diameter of a portion, enclosing the central transformation portion of the input terminal, of the hole of the base, such that said members act as a required waveguide-coaxial line transformation. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. A semiconductor device, comprising:
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a metal flat base of a package, having a hole passing through the base; a plurality of semiconductor circuit elements mounted on the flat base; a metal cap of the package air-tightly fixed to the flat base for sealing the circuit elements within the package, the metal cap having a plurality of cup-like small rooms formed on a draw-pressed metal sheet, the cup-like small rooms forming an electromagnetic shield for each circuit element; a metal terminal for waveguide-coaxial line transformation, passing through the hole of the base and having an inner end portion at which the terminal is electrically connected to one of the circuit elements, a central transformation portion in the hole of the base, and an outer antenna portion extending toward the outside of the package, and a dielectric spacer between the terminal and the base, the terminal being air-tightly fixed directly to the base by the dielectric spacer; wherein the structure of the hole of the base, the dielectric spacer, and the central transformation portion of the terminal is so formed that said members act as a required waveguide-coaxial line transformer.
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22. A semiconductor device, comprising:
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a metal base of a package, having a hole passing through the base, a semiconductor circuit element mounted on the base; a cap of the package air-tightly fixed to the base for sealing the circuit element within the package; a metal terminal for waveguide-coaxial line transformation, passing through the hole of the base and having an inner end portion having a flat top surface and a first diameter, a central transformation portion having a second diameter in the hole of the base, and an outer antenna portion having a third diameter and extending from the inside of the hole of the base toward the outside of the package, the first diameter being larger than the second diameter; a wire bonded to the top surface of the inner end portion of the terminal and to the circuit element and electrically connecting the terminal with the circuit element; a dielectric spacer between the terminal including the transformation portion and a part of the inner end portion thereof and the base, the terminal being air-tightly fixed directly to the base by the dielectric spacer; wherein the whole of the base, the dielectric spacer, and the central transformation portion of the terminal are formed in order to satisfy the following formula;
##EQU4## where Z0 is a required inherent impedance of a characteristic frequency, is a dielectric constant of the dielectric spacer, D1 is a diameter of the central transformation portion of the terminal and d2 is a diameter of a portion, enclosing the central transformation portion of the terminal of the hole of the base, such that said members act as a required waveguide-coaxial line transformer. - View Dependent Claims (23)
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Specification