Methods of making silicon-based sensors
First Claim
1. A method of fabricating a sensor comprising the steps of:
- (a) forming a trough area in a surface of a silicon block;
(b) forming an etch-stop layer in the trough area;
(c) depositing a sensor element onto said trough area;
(d) sealing at least the periphery of said trough area to a surface of a substrate to thereby encapsulate said sensor element; and
(e) selectively etching away regions of said silicon block so that said etch-stop layer remains as a protective diaphragm sealed to said substrate and covering said sensor element.
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Accused Products
Abstract
A silicon-based sensor includes a substrate, a sensor element, and a protective diaphragm mounting and covering the sensor element. The diaphragm is a silicon layer which, in a preferred embodiment, includes an etch-stop dopant. The etch-stop layer is sealed to the substrate so that the layer covers and mounts the sensor element to the substrate. The sensor is fabricated by forming a trough area in a surface of a silicon block (e.g., a silicon chip or wafer), treating the trough area with an etch-stop dopant (e.g., boron), depositing a sensor element onto the doped trough area, sealing at least the periphery of the doped trough area to a surface of a substrate (e.g., glass) so as to encapsulate the sensor element, and then etching away undoped regions of the silicon block so that the doped trough area remains as a protective diaphragm sealed to the substrate and covering the sensor element. It is also possible to form a bonding pad on untreated (e.g., undoped) discontinuous regions of an otherwise etch-stop treated trough layer so that when etched, the bonding pad is exposed to permit interconnection with electronic circuitry, yet the etch-stop treated layer remains so as to mount the bonding pad to the substrate.
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Citations
9 Claims
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1. A method of fabricating a sensor comprising the steps of:
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(a) forming a trough area in a surface of a silicon block; (b) forming an etch-stop layer in the trough area; (c) depositing a sensor element onto said trough area; (d) sealing at least the periphery of said trough area to a surface of a substrate to thereby encapsulate said sensor element; and (e) selectively etching away regions of said silicon block so that said etch-stop layer remains as a protective diaphragm sealed to said substrate and covering said sensor element. - View Dependent Claims (2, 3, 4)
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5. A method of fabricating a sensor comprising the steps of:
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(a) forming a trough area in a surface of a silicon substrate; (b) discontinuously doping the trough area with an etch-stop dopant to form a doped layer thereon having at least one undoped region; (c) depositing a metallic layer over said at least one undoped region; (d) etching away undoped silicon of said substrate, including said at least one undoped region so that said doped layer of said trough area remains and so that said metallic layer is exposed. - View Dependent Claims (6, 7)
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8. A method of making a sensor of the type having a sensor element and a metallic bonding pad adapted to permit interconnection between said sensor element and electronic circuitry, said method comprising the steps of:
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(a) forming respective trough areas in a silicon substrate for said sensor element and said bonding pad; (b) doping said respective trough areas with an etch-stop dopant so that at least that one of said trough areas includes at least one undoped region; (c) forming said bonding pad and said sensor element in said one and the other said trough areas, respectively; and (d) etching away undoped regions of said silicon substrate, including said at least one undoped region of said one trough area, so that said doped trough areas remain and so that said bonding pad is exposed. - View Dependent Claims (9)
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Specification