Optical waveguide device
First Claim
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1. An optical waveguide device, comprising a low refractive index layer having a refractive index nb, a core layer having a refractive index nc (where nc >
- nb) and a cladding layer having a refractive index ncl (where ncl <
nc) formed on a substrate, wherein thermal expansion coefficients of said low refractive index layer, said core layer and said cladding layers, respectively, are made substantially equal to each other at respective boundaries.
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Abstract
An optical waveguide device comprises a low refractive index layer having a refractive index nb, a core layer having a refractive index nc (where nc >nb) and a cladding layer having a refractive index nc1 (where nc1 <nc) formed on a substrate. Thermal expansion coefficients of the low refractive index layer, the core layer and the cladding layers, respectively, are made substantially equal to each other at respective boundaries.
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6 Claims
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1. An optical waveguide device, comprising a low refractive index layer having a refractive index nb, a core layer having a refractive index nc (where nc >
- nb) and a cladding layer having a refractive index ncl (where ncl <
nc) formed on a substrate, wherein thermal expansion coefficients of said low refractive index layer, said core layer and said cladding layers, respectively, are made substantially equal to each other at respective boundaries. - View Dependent Claims (2, 3, 4, 5, 6)
- nb) and a cladding layer having a refractive index ncl (where ncl <
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