Process control interface with simultaneously displayed three level dynamic menu

• US 4,873,623 A
• Filed: 05/15/1987
• Issued: 10/10/1989
• Est. Priority Date: 04/30/1985
• Status: Expired due to Term

• Current Assignee: Tencor Instruments (KLA Corporation)
• Original Assignee: Prometrix Corp (KLA Corporation)
• Inventors: Perloff, David S., Lane, Leslie A., Kumagi, Shoji, Lybeck, Lynn V.
• Primary Examiner(s): Jablon, Clark A.
• Application Number:
  US07/050,925
• Time in Patent Office: 879 Days
• Field of Search: 364/551, 364/146, 364/188, 364/191, 364/192, 364/193, 364/171, 364/200 MS File, 340/706, 340/712, 340/707, 340/708, 340/709, 340/710, 340/711, 340/718
• US Class Current: 700/83
• CPC Class Codes: G06F 3/0482 Interaction with lists of selectable items, e.g. menus
• CPC Class Codes: G06F 3/04895 Guidance during keyboard input operation, e.g. prompting

Abstract

A system and method for computer control of machine processes. The operator of the system selects and specifies process control parameters through the use of a three level dynamic menu. The first level of the menu is used to select a group of process parameters. The second and third menus together have the visual appearance of a set of index cards, the second menu forming tabs on the index cards, and the third menu comprising the set of process parameters listed on each index card. Each process parameter has a preassigned entry status: operator unalterable, operator alterable, forced operator entry, or single time forced entry (value must be entered only once when the process is run several times). The selected process cannot be run until values have been entered for all parameters having an entry status of forced operator entry or single time forced entry. Edit field parameters limit the operator'"'"'s options to a predefined set of parameter values. Edit field parameters are also used to specify complicated parameter values having a multiplicity of subparameter values. The defination of each process can include a measurement data structure which defines measurement data to be collected during the running of the process. The measurement data to be collected is specified by specifying a set of data analysis tasks, and specifying the measurement data needed for each data analysis task. The measurement data structure includes definitions of the specified data analysis tasks and the measurements to be collected.

Claims

1. A method of using a programmed digital computer having a display to provide values for a predefined set of parameters for use by a selected process:

establishing a set of processes which can be run under the control of said computer, each process having a predetermined set of process parameters which control said process;

selecting a process, from said set of established processes, to be run under the control of said computer, said selected process having a predefined set of process parameters which control said process;

concurrently displaying three menus in three distinct areas on the display;

establishing a pointer for each said menu for selecting an item in the corresponding menu;

displaying the item in each menu currently selected by the corresponding pointer so that a person viewing the display can identify said selected item;

listing;

(a) in a first one of said menus, a multiplicity of set names, (b) in a second one of said menus, a set of subgroup names corresponding to the selected item in said first menu, and (c) in a third one of said menus, a predefined subset of said process parameters, said subset corresponding to the selected subgroup name in said second menu;

automatically responding to a position change of said pointer in said first menu by updating said second menu to display the subgroup names corresponding to the set name pointed to by said pointer in said first menu, and updating said third menu to display the subset of said parameters corresponding to the subgroup name pointed to by said pointer in said second menu;

automatically responding to a position change of said pointer in said second menu by updating said third menu to display the subset of said parameters corresponding to the subgroup name pointed to by said pointer in said second menu; and

providing interactive parameter entry means for entering parameter values for the parameter pointed to by said pointer in said third menu;

wherein said second and third menus together have the visual appearance of a set of indexes cards, said second menu forming tabs on the index cards, and said third menu forming the information listed on each index card;

whereby said process parameters are hierarchically organized into into sets and subsets.

2. The method of claim 1, further including the steps of:

defining a parameter data structure for each of said established processes, including

parameter denoting means for denoting an operator entry status for each of said process'"'"'s process parameters, wherein said entry status is selected from a set including operator unalterable (parameter has a fixed value), operator alterable (parameter has default value which may be changed by operator), and forced operator entry (parameter must be supplied with a value before the process is run);

parameter value storing means for storing a value for each of said predefined parameters;

defining at least one editable set of parameters values, each editable set defining the full set of legal entries for a corresponding one of said process parameters;

wherein said step of providing interactive parameter entry means comprises the step of establishing an operator control program for enabling interactive computer controlled performance of the steps of;

selecting one of said processes;

entering values, utilizing said parameter denoting means, for said parameters of a said selected process selected process which do not have an entry status of operator unalterable;

said entering step including the step of entering a value for at least one of said parameters by selecting a value from a corresponding one of said editable sets of parameter values; and

running the selected process only after values have been entered for all of said process'"'"'s parameters having an entry status equal to forced operator entry.

3. A method of using a programmed digital computer as set forth in claim 1, further including the steps of:

establishing a set up program for interactively performing the steps of;

defining a multilevel edit field, including the steps of providing a set of primary values and a plurality of primary subparameter values corresponding to each said primary parameter value;

providing a secondary set of parameter values and a plurality of secondary subparameter value corresponding to each said secondary parameter value;

wherein said primary subparameter values are selected form said secondary set of parameter values; and

storing said primary and secondary sets of parameter values and corresponding subparameter values;

establishing an operator process control program for enabling interactive computer controlled performance of the steps of;

selecting one of said processes;

entering values for said process parameters of said selected process;

said entering step including the step of selecting a value for a predefined one of said process parameters by selecting a value from said set of primary parameter values of said multilevel edit field; and

running said selected process, including the step of accessing said stored sets of primary and secondary parameter values and using the stored subparameter values corresponding to said primary parameter value selected during said entering step.

4. A method of using a programmed digital computer as set forth in claim 1, said computer having data storage means for storing measurement data, and means for controlling the operation of an apparatus coupled to said computer, said apparatus including means for performing a multiplicity of measurements and communicating the resulting measurement values to said computer, said method including the steps of:

establishing a process definition data structure for each said process, each said process definition data structure including a measurement definition data structure which defines the measurements to be performed by said process;

establishing a set up program for interactively performing the steps of;

selecting one of said processes;

selecting a subset of the measurements which said apparatus can perform, and storing a representation of the selection subset in said measurement definition data structure for said selection process;

wherein a different subset of measurements can be selected for each selected process;

establishing an operator process control program for enabling interactive computer controlled performance of the steps of;

selecting one of said processes;

running said selected process, and storing the measurement values conveyed by the apparatus to said computer in said data storage means;

wherein said running step includes the steps of accessing the measurement definition data structure corresponding to said selected process and controlling the operation of the apparatus so that only the measurements specified in said measurements definition data structure are performed and so that only the measurement values corresponding to the measurements specified in said measurement definition data structure are stored in said data storage means.

5. The method of claim 4, wherein

said subset selecting step in said set up program includes the steps of:

defining a plurality of trend chart definitions for said selected process, each said trend chart definition including a specification of a quantity to be tracked, said quantity being a selected one or a specified combination of the measurements which said apparatus can perform;

and storing in said measurement definition data structure for said selected process a representation of all of the measurements included in said trend chart definitions;

whereby only the measurements specified in said trend chart definitions for said selected process are performed and only the measurement values corresponding to the measurements specified in said trend chart definitions are stored in said data storage means.

6. The method of claim 4, wherein

said subset selecting step in said set up program includes the steps of:

defining a plurality of data analysis task definitions for said selected process, each said data analysis task definition denoting a quantity to be analyzed, said quantity being a selected one or a specified combination of the measurements which said apparatus can perform;

and storing in said measurement definition on data structure for said selected process a representation of all of the measurements included in said data analysis task definitions; and

said operator process control program further enables interactive computer controlled performance of the steps of;

selecting one of said data analysis task definitions for said selected process, and automatically, in response to said selection, performing the corresponding analysis task.