Multi-chamber deposition system

• US 4,874,631 A
• Filed: 02/16/1988
• Issued: 10/17/1989
• Est. Priority Date: 06/23/1986
• Status: Expired due to Term

• Current Assignee: 3M Company
• Original Assignee: 3M Company
• Inventors: Jacobson, Richard L., Jeffrey, Frank R., Westerberg, Roger K.
• Primary Examiner(s): BUEKER, RICHARD R
• Application Number:
  US07/157,238
• Time in Patent Office: 609 Days
• Field of Search: 427/39, 427/74, 427/177, 427/255.5, 427/255.7, 427/294, 118/718, 118/719, 118/723
• US Class Current: 427/578
• CPC Class Codes: C23C 16/0245 by etching with a plasma
• CPC Class Codes: C23C 16/54 Apparatus specially adapted for continuous coating

Abstract

A system for the simultaneous deposition of different coatings onto a thin web within a large volume vacuum chamber is disclosed which chamber is provided with a plurality of deposition chambers in which the different layers are deposited onto the film as its moves from a supply roll to a finished take-up roll of coated web. The deposition chambers provided within the large vacuum chamber are provided with separate seals which minimize back diffusion of any dopant gas from adjacent deposition chambers.

Claims

1. A method for depositing thin coatings on a substrate comprising the steps of:

evacuating a large chamber in which has been placed a roll of web material;

advancing the web material from the supply roll through a web cleaning chamber disposed within said large evacuated chamber in the presence of a glow discharge;

advancing the web material through a deposition chamber disposed within said large evacuated chamber and depositing thereon elements in the presence of a glow discharge resulting from the introduction of process gas into said deposition chamber at a pressure above that of said large chamber;

advancing the web material through a second deposition chamber disposed within said large evacuated chamber in which is applied a second coating on the web material from elements in a process gas applied in the presence of glow discharge at a pressure above that of said large chamber;

advancing the web material through a third deposition chamber disposed within said large evacuated chamber to apply a third thin coating on the web material of an element in the presence of a glow discharge of a process gas;

rewinding the web material on a take-up roll disposed within said large chamber; and

maintaining the reduced atmosphere within said large chamber below the pressure in said deposition chambers for restricting diffusion of process gas from one deposition chamber to another deposition chamber.