Metal-insulator-semiconductor control of guided optical waves in semiconductor waveguides
First Claim
1. Apparatus for changing the refractive index of a light transmitting semiconductor waveguide comprising:
- (a) a light transmitting doped semiconductor waveguide;
(b) an electrically insulating dielectric member in contact with and overlaying at least a portion of said waveguide;
(c) electrically conductive gate electrode means in contact with and overlaying at least a portion of said dielectric member; and
(d) voltage supply means coupled to said gate electrode means and to said waveguide for inducing depletion of mobile charge carriers within said light transmitting semiconductor waveguide.
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Abstract
This invention describes an infrared lightwave modulation and switching aratus for very rapidly changing the refractive index of a light-transmitting, doped, semiconductor waveguide. Electrical control is exerted by a MIS diode or MISFET. The apparatus includes a transparent crystalline silicon waveguide, an electrically insulating dielectric layer overlaying a portion of that waveguide, and an elongated, conductive gate electrode in contact with the insulator. A gate voltage applied between the semiconductor and gate serves to deplete free charge carriers from the region of the waveguide under the gate. Elongated source and drain electrodes may be added to enhance electro-optic control.
72 Citations
37 Claims
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1. Apparatus for changing the refractive index of a light transmitting semiconductor waveguide comprising:
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(a) a light transmitting doped semiconductor waveguide; (b) an electrically insulating dielectric member in contact with and overlaying at least a portion of said waveguide; (c) electrically conductive gate electrode means in contact with and overlaying at least a portion of said dielectric member; and (d) voltage supply means coupled to said gate electrode means and to said waveguide for inducing depletion of mobile charge carriers within said light transmitting semiconductor waveguide. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 34)
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29. Apparatus for changing the refractive index of a light transmitting doped semiconductor waveguide comprising:
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(a) a multimode light transmitting doped semiconductor waveguide having first and second side portions contacting first and second electrically insulating dielectric layers in turn contacting first and second electrically conductive gate electrodes; and (b) voltage supply means for enabling selective application of voltages to said first and second gate electrodes for inducing depletion of mobile charge carriers within said light transmitting semiconductor waveguide near said gates and for selectively altering the phase of one mode with respect to another mode supported by said light transmitting waveguide. - View Dependent Claims (30, 31, 32, 33, 35, 36, 37)
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Specification