Capacitive type measurement transducer with improved electrode arrangement

• US 4,878,013 A
• Filed: 05/31/1988
• Issued: 10/31/1989
• Est. Priority Date: 04/04/1986
• Status: Expired due to Term

• Current Assignee: Mitutoyo Corporation
• Original Assignee: Mitutoyo Corporation
• Inventors: Andermo, Nils I.
• Primary Examiner(s): Eisenzopf, Reinhard J.
• Assistant Examiner(s): Harvey, Jack B.
• Application Number:
  US07/200,580
• Time in Patent Office: 518 Days
• Field of Search: 324/61 R, 324/61 P, 340/870.37, 33/125 C, 341/15
• US Class Current: 324/690
• CPC Class Codes: G01B 7/003 for measuring position, not involving coordinate determination coordinate measuring G01B7/004
• CPC Class Codes: G01D 5/2415 adapted for encoders
• CPC Class Codes: H03M 1/28 with non-weighted coding

Abstract

A capacitive type measuring apparatus comprises first and second electrode arrays mounted on first and second support members which are relatively displaceable with respect to each other. The first electrode array comprises a series of discrete first electrodes uniformly spaced with a pitch P_r defining a scale wavelength and the second electrode array comprises a series of discrete second electrodes arranged so as to define a plurality of electrode groups each having N electrodes, where N is an integer greater than 2. The second electrodes forming each of the electrode groups are positioned within the respective groups so as to respectively occupy predetermined group positions which are distributed over a distance spanning more than one scale wavelength such that each of the group positions corresponds to the relation position of a different one of a set of relative scale wavelength segment positions obtained by dividing the group into intervals corresponding to the scale wavelength, and dividing each interval into N equal segments.

Claims

1. Capacitive-type measuring apparatus comprising:

first and second support members, said support members being relatively displaceable with respect to each other, and at least one of said support members being displaceable relative to a measurement axis;

first and second electrode arrays mounted on said first and second support members, respectively, in alignment with said measurement axis, for producing a varying capacitance pattern in dependence on the relative positions of said support members with respect to each other;

said first electrode array comprising a series of discrete first electrodes uniformly spaced with a pitch P_r defining a scale wavelength;

said second electrode array comprising a series of discrete second electrodes disposed so as to be capacitively coupled to differing portions of said first electrode array in dependence on the relative positions of said support members; and

said second electrodes being arranged so as to define a plurality of measuring element groups separated from each other by a group pitch Pg, and wherein each electrode group has N measuring elements, N being an integer greater than 2, and the second electrodes forming each of said electrode groups are positioned within the respective groups so as to respectively occupy predetermined group positions which are spread over a distance greater than one scale wavelength, and each of which corresponds to the relative position of a different one of a group of relative scale wavelength segments obtained by dividing the group pitch into intervals corresponding to the scale wavelength and dividing each interval into N equal segments;

signal generator means for applying at least one combination of N periodic excitation signals to the second electrodes in each of said electrode groups such that said excitation signals are respectively applied to corresponding ones of the second electrodes in each group in a relative order corresponding to the sequence of relative scale wavelength segment positions occupied by the electrodes in each group; and

detector means comprising;

detector electrode means for sensing the output signals produced by the first electrodes capacitively coupled to said second electrode array in response to said at least one combination of excitation signals, and for producing an output signal which represents a sum of the sensed first electrode output signals; and

signal processing means for deriving measurement data from said detector electrode means output signal.

2. The measuring apparatus of claim 1 wherein said signal generator means includes means for generating N successively different excitation signals.

3. The measuring apparatus of claim 1 wherein said signal generator means includes means for generating N successively different combinations of said excitation signals.

4. The measuring apparatus of claim 1 wherein said second electrodes are uniformly spaced with a pitch P_t such that said group pitch P_g is an integral multiple of the scale wavelength;

and at least one second electrode is positioned in each group interval.

5. The measuring apparatus of claim 1 wherein the second electrodes within each of said second electrode groups are grouped in at least two sub-groups, the second electrodes in each of said sub-groups being uniformly spaced from each other by a first pitch and said sub-groups being uniformly spaced from each other by a second pitch different from said first pitch.

6. The measuring apparatus of claim 5 wherein a plurality of said second electrode groups define a set of groups having a set pitch P_s which is an integral multiple of the scale positions occupied by the second electrodes of the group set is different for each group of the set and for each sub-group within the groups of the set.

7. The measuring apparatus of claim 1 wherein said signal generator means generates N signals which are successively incrementally phase-shifted from each other in steps of 360/N degrees.

8. The measuring apparatus of claim 5 wherein said signal processing means comprises means for filtering harmonics from said detector electrode means output signal to obtain a substantially sinusoidal measurement signal, and means for measuring the phase of said measurement signal relative to one of said excitation signals to obtain measurement data.

9. Capacitive-type measuring apparatus comprising:

first and second support members, said support members being relatively displaceable with respect to each other, and at least one of said support members being displaceable relative to a measurement axis;

first and second electrode arrays mounted on said first and second support members, respectively, in alignment with said measurement axis, for producing a varying capacitance pattern in dependence on the relative positions of said support members with respect to each other;

said first electrode array comprising a series of discrete first electrodes uniformly spaced with a pitch P_r defining a scale wavelength;

said second electrode array comprising a series of discrete second electrodes disposed so as to be capacitively coupled to differing portions of said first electrode array in dependence on the relative positions of said support members; and

said second electrodes being arranged so as to define a plurality of measuring element groups separated from each other by a group pitch P_g, and wherein each electrode group has N measuring elements, N being an integer greater than 2, and the second electrodes forming each of said electrode groups are positioned within the respective groups so as to respectively occupy predetermined group positions which are spread over a distance greater than one scale wavelength, and each of which corresponds to the relative position of a different one of a group of scale wavelength segments obtained by dividing the group pitch into intervals corresponding to the scale wavelength and dividing each interval into N equal segments; and

the second electrodes within each of said second electrode groups further being grouped in at least two sub-groups, the second electrodes in each of said sub-groups being uniformly spaced from each other by a first pitch and said sub-groups being uniformly spaced from each other by a second pitch different from said first pitch.

10. The measuring apparatus of claim 9 wherein a plurality of said second electrode groups define a set of groups having a set pitch P_s which is an integral multiple of the scale wavelength, and the sequence of relative scale wavelength segment positions occupied by the second electrodes in each electrode group of the group set is different for each group of the set and for each sub-group within the groups of the set.