Rasterization system utilizing an overlay of bit-mapped low address resolution databases

• US 4,879,605 A
• Filed: 02/29/1988
• Issued: 11/07/1989
• Est. Priority Date: 02/29/1988
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: ATEQ Corporation (Applied Materials Incorporated)
• Inventors: Michalski, Chris A., Rieger, Michael L., Jolley, Matthew J., Warkentin, Paul A.
• Primary Examiner(s): Broome, H.
• Assistant Examiner(s): Rogers, Scott A.
• Application Number:
  US07/161,986
• Time in Patent Office: 617 Days
• Field of Search: 400/121, 400/124, 400/125, 400/54, 358/285, 358/296, 364/519, 346/108
• US Class Current: 358/296
• CPC Class Codes: G03F 7/704 Scanned exposure beam, e.g. raster-, rotary- and vector scanning mask projection exposure involving relative movement of patterned beam and workpiece during imaging G03F7/70358
• CPC Class Codes: G06K 15/00 Arrangements for producing a permanent visual presentation of the output data , e.g. computer output printersprinting or plotting combined with another operation, e.g. with conveying, G06K17/00
• CPC Class Codes: H04N 1/40025 Circuits exciting or modulating particular heads for reproducing continuous tone value scales H04N1/401, H04N1/407 take precedence

Abstract

A method and apparatus for providing improved address resolution in a rasterization system. The rasterization system of the present invention comprises a pattern database, a pattern delivery computer, a rasterizer and a radiant energy system in which a plurality of logical passes are made across a substrate to produce photolithographically formed patterns. The plurality of passes use a combination of offset printing techniques and application of energy to photosensitive material at a plurality of intensities to provide improved address resolution.

Claims

1. A method for producing a high address resolution printed pattern from a high address resolution database, comprising the steps of:

producing a plurality of low address resolution databases based on said high address resolution database, said plurality of low address resolution database comprising a plurality of overlay patterns corresponding to said high address resolution printed pattern;

producing a plurality of low address resolution patterns from said low address resolution databases; and

printing each of said low address resolution patterns overlayed on each other, said printing step comprising the steps of printing a first set of low address resolution patterns utilizing a first plurality of pixels; and

printing a second set of said low address resolution patterns utilizing a second plurality of pixels, said second plurality of pixels offset and centered from said first plurality of pixels.

2. The method as recited by claim 1, wherein said printing process comprises the steps of:

printing a first of said plurality of low address resolution printed patterns on a substrate utilizing an energy source, said energy source producing radiant energy at a first dosage;

printing a second of said plurality of low address resolution printed patterns on a substrate utilizing an energy source, said energy source producing radiant energy at a second dosage.

3. The method as recited by claim 2, wherein said first dosage and said second dosage are approximately equal to an exposure threshold level of said substrate.

4. The method as recited by claim 1, wherein said plurality of low address resolution databases comprises four databases.

5. The method as recited by claim 1, wherein said plurality of low address resolution databases are generated based on a table look-up algorithm.

6. The method as recited by claim 1, wherein said high address resolution database comprises a first X-coordinate of said pattern, a first Y-coordinate of said pattern, a first height dimension of said pattern and a first width dimension of said pattern, and said plurality of low address resolution databases are generated by a method comprising the steps of:

for each of said plurality of low address resolution databases;

(a) accepting as input said first X-coordinate, said first Y-coordinate, said first height dimension and said first width dimension;

(b) computing a second X-coordinate based on said first X-coordinate and a first predetermined value;

(c) computing a second Y-coordinate based on said first Y-coordinate and a second predetermined value;

(d) computing a second height dimension based on said first height dimension, said first Y-coordinate and a third predetermined value;

(e) computing a second width dimension based on said first width dimension, said first X-coordinate and a fourth predetermined value.

7. In a system for producing a rasterized pattern from data representing geometric objects, said system comprising a high address resolution database representing a geometry to be printed and a low address resolution printing system, a method comprising the steps of:

producing a plurality of low address resolution databases having a format compatible with said low address resolution printing system, said plurality of said low address resolution databases representing a plurality of overlay patterns corresponding to said geometry; and

producing a plurality of bit mapped low address resolution databases for input to a radiant energy system said radiant energy system accepting said plurality bit mapped low address resolution databases and producing a plurality of overlay patterns on a substrate in response to said bit mapped low address resolution database said step of producing a plurality of overlay patterns on a substrate comprising the steps of;

printing a first of said overlay patterns utilizing a first plurality of pixels; and

printing a second of said overlay patterns utilizing a second plurality of pixels, said second plurality of pixels offset and centered from said first plurality of pixels.

8. The method as recited by claim 7, wherein said process of producing a plurality of overlay patterns on a substrate comprises the steps of:

printing a first of said overlay patterns on said substrate utilizing a energy source, said energy source producing radiant energy at a first dosage;

printing a second of said overlay patterns of said substrate utilizing a energy source, said energy source producing radiant energy at a second dosage.

9. The method as recited by claim 8, wherein said first dosage and said second dosage are approximately equal to an exposure threshold level of said substrate.

10. The method as recited by claim 7, wherein said plurality of low address resolution databases comprises four databases.

11. The method as recited by claim 8, wherein said radiant energy source is a light source.

12. The method as recited by claim 9, wherein said radiant energy source is an electron beam means.

13. In an apparatus for generating a rasterized pattern representing a geometric object, said apparatus comprising a high address resolution database and a low address resolution printing system, a method of generating said rasterized pattern comprising the steps of:

exposing a substrate to a light source at a first set of pixel locations during a first logical pass of said light source, said light source producing radiant energy at a first dosage;

exposing said substrate to a light source at said first set of pixel locations during a second logical pass of said light source producing radiant energy at a second dosage.

14. The method as recited by claim 13, further comprising the steps of:

exposing said substrate to a light source at a second set of pixel locations, said second set of pixel locations offset and centered from said first set of pixel locations during a third logical pass of a light source, said light source producing radiant energy at a third dosage;

exposing said substrate to a light source at said second set of pixel locations during a fourth logical pass of said light source, said light source producing radiant energy at a fourth dosage.

15. The method as recited by claim 13, wherein said first dosage and said second dosage are each approximately equal to the exposure threshold value of said substrate.

16. The method as recited by claim 14, wherein said first dosage, said second dosage, said third dosage and said fourth dosage are each approximately equal to the one-half exposure threshold of said substrate.

17. A method for producing a high address resolution printed pattern from a high address resolution database, said high address resolution database comprising a first X-coordinate of said pattern, a first Y-coordinate of said pattern, a first height dimension of said pattern and a first width dimension of said pattern comprising the steps of:

(A) producing a plurality of low address resolution databases based on said high address resolution database, said plurality of low address resolution databases comprising a plurality of overlay patterns corresponding to said high address resolution printed pattern;

(B) producing a plurality of low address resolution patterns from said low address resolution databases said plurality of low address resolution databases generated by a method comprising the steps of;

for each of said plurality of low address resolution databases;

(1) accepting as input said first X-coordinate, said first Y-coordinate, said first height dimension and said fist width dimension;

(2) computing a second X-coordinate based on said first X-coordinate and a first predetermined value;

(3) computing a second Y-coordinate dimension based on said first Y-coordinate and a second predetermined value;

(4) computing a second height dimension based on said first height dimension, said first Y-coordinate and a third predetermined value;

(5) computing a second width dimension based on said first width dimension, said first X-coordinate and a fourth predetermined value;

(C) printing each of said low address resolution patterns overlayed on each other.

18. A method for producing a high address resolution printed pattern from a high address solution database, comprising the steps of:

producing a plurality of low address resolution databases based on said high address resolution database, said plurality of low address resolution databases comprising a plurality of overlay patterns corresponding to said high address resolution printed pattern;

producing a plurality of low address resolution patterns from said low address resolution databases;

printing each of said low address resolution pattern overlayed on each other, said printing process comprising the steps of;

(a) printing a first of said plurality of low address resolution printed patterns on a substrate utilizing an energy source, said energy source producing radiant energy at a first dosage;

(b) printing a second of said plurality of low address resolution printed patterns on a substrate utilizing an energy source, said energy source producing radiant energy at a second dosage.

19. The method as recited by claim 18, wherein said first dosage and said second dosage are approximately equal to an exposure threshold level of said substrate.

22. The method as recited by claim 18 or 20, wherein said energy is provided by an electron beam means.

20. In a system for producing a rasterized pattern from data representing geometric objects, said system comprising a high address resolution database representing a geometry to be printed and a low address resolution printing system, a method comprising the steps of:

producing a plurality of low address resolution databases having a format compatible with said low address resolution printing system, said plurality of said low address resolution databases representing a plurality of overlay patterns corresponding to said geometry; and

producing a plurality of bit mapped low address resolution databases for input to a radiant system, said radiant energy system accepting said plurality of bit mapped low address resolution databases and producing a plurality of overlay patterns on a substrate in response to said bit mapped low address resolution databases, said process of producing a plurality of overlay patterns on a substrate comprising the steps of;

printing a first of said overlay patterns on said substrate utilizing an energy source, said energy producing radiant energy at first dosage;

printing a second of said overlay patterns of said substrate utilizing an energy source, said energy source producing radiant energy at a second dosage.

21. The method as recited by claim 20, wherein said first dosage and said second dosage are approximately equal to an exposure threshold level of said substrate.

23. In a system for producing a rasterized pattern from data representing geometric objects, said system comprising a high address resolution database representing a geometry to be printed and a low address resolution printing system, a method comprising the steps of:

producing a plurality of low address resolution on databases having a format compatible with said low address resolution printing system, said plurality of said low address resolution databases representing a plurality of overlay patterns corresponding to said geometry; and

producing a plurality of overlay patterns on a substrate in response to said low address resolution printing system accepting said plurality of bit mapped low address resolution databases, said step of producing a plurality of overlay patterns on a substrate comprising the steps of;

printing a first of said overlay patterns utilizing a first

printing a second of said overlay patterns utilizing a second plurality of pixels, said second plurality of pixels offset and centered from said first plurality of pixels.