Wafer centration device

• US 4,880,348 A
• Filed: 05/15/1987
• Issued: 11/14/1989
• Est. Priority Date: 05/15/1987
• Status: Expired due to Term

• Current Assignee: Asyst Technologies Incorporated (Azenta, Inc.)
• Original Assignee: Roboptek Incorporated
• Inventors: Baker, Gregory G., Boyle, Edward F.
• Primary Examiner(s): Werner, Frank E.
• Assistant Examiner(s): KRIZEK, JANICE LEE
• Application Number:
  US07/050,951
• Time in Patent Office: 914 Days
• Field of Search: 414/754, 414/783, 414/757, 198/394, 406/87
• US Class Current: 414/783
• CPC Class Codes: H01L 21/68 for positioning, orientation or alignment
• CPC Class Codes: Y10S 414/136 including wafer orienting means

Abstract

A device for centering an object and rotating it to a desired angular position relative to a discerning feature. The centration device is particularly adapted for use as a station in a semiconductor wafer handling apparatus, and includes a rotatably driven chuck on which a wafer may be placed by a robot manipulator arm. The perimeter of the wafer is rotated between a light source and a linear array of charge coupled device elements, casting a shadow on the light sensitive elements as the wafer is rotated. A processor connected to the charge couple devices and to an angular position encoder on a shaft of the chuck rotating the wafer is operative to collect data relating the displacement of the perimeter from a reference point to the angular position of the wafer. The processor determines from the data a distance over which the wafer should be shifted on the chuck to center it relative to the reference point. Once the robot manipulator arm has centered the wafer, a minimum displacement of a point on the perimeter corresponding to a flat or notch on the wafer is located and positioned at the desired angular orientation.

Claims

1. Apparatus for centering a wafer-like object relative to a reference point, comprising:

(a) a rotatably driven support on which the wafer-like object is positioned, a diametrical extent of the rotatably driven support being substantially less than that of the wafer-like object so that a perimeter of the wafer-like object extends beyond that of the rotatably driven support, a rotational axis of the rotatably driven support being coincident with the reference point, the rotatably driven support including an angular position sensor for producing a signal indicative of the angular position of the rotatably driven support about its rotational axis;

(b) an array of light sensors disposed adjacent the rotatably driven support, each light sensor being operative to produce a signal corresponding to the intensity of light incident on it;

(c) a light source illuminating the wafer-like object and the array of light sensors and disposed so that the perimeter of the wafer-like object is intermediate the light source and the array of light sensors and casts a shadow on said array of light sensors;

(d) a manipulator adapted to lift the wafer-like object from the rotatably driven support and to reposition it thereon; and

(e) control means connected to the array of light sensors, the angular position sensor, the rotatably driven support, and the manipulator, and responsive to the signals produced by the angular position sensor and the array of light sensors, for;

(i) causing the rotatably driven support to rotate, so that substantially the entire perimeter of the wafer-like object passes between the light source and the array of light sensors;

(ii) in response to the signals produced by the light sensors in the array and by the angular position sensor, determining the angular position of the rotatably driven support where the perimeter of the wafer-like object is at one of a maximum and a minimum displacement relative to the reference point;

(iii) determining a distance proportional to said one of the maximum and the minimum displacement, that the wafer-like object should be moved to bring a center of the wafer-like object into coincidence with the reference point; and

(iv) causing the manipulator to lift the wafer-like object and to move it along said distance prior to returning it to the rotatably driven support.

2. The apparatus of claim 1, wherein the control means are further operative to cause the rotatably driven support to rotate the wafer-like object so that said one of the maximum and minimum displacements is disposed diametrically opposite the manipulator prior to causing the manipulator to lift the wafer-like object.

3. The apparatus of claim 1, wherein the wafer-like object includes one of a flat and an indent disposed on its perimeter and wherein the control means are operative to determine the angular position where the perimeter is at the maximum displacement from the reference point, and further operative after the manipulator has moved the wafer-like object, to determine the angular position of a point on the perimeter which is at a minimum displacement from the reference point, said point on the perimeter corresponding to a center of said one of the flat and the indent.

4. The apparatus of claim 1, wherein the wafer-like object includes a discerning feature on its perimeter and wherein after the center of the wafer-like object is moved into coincidence with the reference point, the control means are further operative:

(a) to cause the rotatably driven support to rotate so that said discerning feature passes between the light source and the array of light sensors;

(b) in response to the signals produced by the light sensors in the array and by the angular position sensor, to determine the angular position of the rotatably driven support where the perimeter of the wafer-like object is at the other of a maximum and a minimum displacement relative to the reference point; and

(c) causing the rotatably driven support to rotate the wafer-like object so that said discerning feature corresponding to a part of the perimeter at which is located said other of the maximum and the minimum displacements is positioned at a desired orientation.

5. The apparatus of claim 1, wherein the array of light sensors comprise a charge coupled device.

6. The apparatus of claim 1, wherein the control means are operative to repeat functions (e)(i)-(e)(iv) of that claim to improve the accuracy with which the center of the wafer-like object is brought into coincidence with the reference point.