Process for manufacturing a REFET or a CHEMFET, and the manufactured REFET or CHEMFET

• US 4,882,292 A
• Filed: 09/04/1987
• Issued: 11/21/1989
• Est. Priority Date: 09/05/1986
• Status: Expired due to Term

• Current Assignee: Priva AGRO Holding BV
• Original Assignee: Stichting Centruum VOOR Micro Electronika Twente
• Inventors: Van den Berg, Albert, Van der Wal, Peter D., Skowronska-Ptasinska, Maria D., Sudholter, Ernst J., Reinhoudt, David N.
• Primary Examiner(s): Chaudhuri, Olik
• Application Number:
  US07/093,014
• Time in Patent Office: 809 Days
• Field of Search: 437/1, 437/42, 437/235, 357/25, 357/8, 357/23.15, 204/418
• US Class Current: 438/49
• CPC Class Codes: G01N 27/414 Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS

Abstract

The invention relates to a process for manufacturing a REFET and/or CHEMFET, comprising: (a) covalent bonding of a hydrophilic polymer layer to an isolator layer applied to a semiconductor material; (b) the absorption of water or a watery solution into said hydrophilic polymer layer; and (c) the binding of a hydrophobic polymer layer to the water holding hydrophilic polymer layer. It is advantageous that this water holding hydrophilic polymer layer also contains an electrolyte and/or a buffer.

Preferably an ion to be measured with the CHEMFET also forms part of the electrolyte.

Claims

1. Process for manufacturing a REFET or a CHEMFET, comprising:

(a) covalently bonding a hydrophilic polymer layer to an insulating layer applied to a semiconductor material;

(b) absorbing water or an aqueous solution into said hydrophilic polymer layer; and

(c) binding a hydrophobic polymer layer to the water containing hydrophilic polymer layer.

2. Process as claimed in claim 1, in which the water-holding hydrophilic polymer layer also contains an electrolyte.

3. Process as claimed in claim 1, in which the water containing hydrophilic polymer layer also contains a buffer to maintain the hydrophilic polymer layer at a substantially constant pH level.

4. Process as claimed in claim 1, in which the water holding hydrophilic polymer layer has a thickness of 0.0050-200 μ

m.

5. Process as claimed in claim 2, in which a receptor for a chemical compound is to be measured is incorporated in the hydrophobic polymer layer.

6. Process as claimed in claim 5, in which an ion to be measured with the CHEMFET also forms part of the electrolyte.

7. Process as claimed in claim 1, in which the hydrophilic polymer layer is covalently bonded to the insulating layer by a bi-functional organosilicon compound which is covalently bonded with the isolator layer and which is covalently bonded to the hydrophilic polymer layer.

8. Process as claimed in claim 7, in which the bi-functional organosilicon compound is selected from the group consisting of:

##STR7## in which R, R¹ ;

alkyl, aryl

X;

halogen, carboxylate, amino, oxim

Y;

H, alkyl or aryl ##STR8## a+b+c=3 a=1, 2 or 3 and

p≧

2.

9. Process as claimed in claim 7, in which the hydrophilic polymer layer is formed by polymerization and is selected from the group consisting of:

(a) monomers with the structure formulae;

##STR9## in which R³ ;

is H, alkyl, aryl, halogen

R⁴ ;

--H, --R⁵ --OH, R⁵ --NH₂, R⁵ --SH, R⁵ --N(CH₃)₂, R⁵ --sugar, R⁵ -peptide,

R⁵ ;

alkyl, aryl ##STR10## (b) copolymers with additional monomers having the structure formula III in which R₄ is C₁ -C₃₀ alkyl group,

(c) mixtures of (co)polymers with a hydrogel,

(d) copolymers of the monomers III and IV,

(e) mixtures of polymers and copolymers of the monomers III and IV,

(f) mixtures of (co)polymers of the monomers III, and IV, with the copolymers as according to point b,

(g) mixture of polymers of the monomers III and IV,

(h) mixtures of copolymers of the monomers III and IV,

(i) mixtures of (co)polymers of the monomer III with the copolymers as according to point b,

(j) mixtures of co(polymers) of the monomer IV with the copolymers as according to point b,

(k) mixtures of the polymers and copolymers named under points a-j.

10. Process as claimed in claim 1, in which the hydrophobic polymer layer is bonded physically to the hydrophilic, water holding polymer layer.

11. Process as claimed in claim 1, in which the hydrophobic polymer layer is bonded covalently to the hydrophilic, water-holding polymer layer.

12. Process as claimed in claim 11, in which a linking agent is allowed to react with the hydrophilic polymer layer and the hydrophobic polymer layer is subsequently bonded to said linking agent.

13. Process as claimed in claim 12, in which the linking agent has the following structure formula:

##STR11## in which R³ is H, alkyl, aryl, halogen and Z=halogen, alkoxy, phenoxy or hydroxy, and the hydrophobic polymer layer is formed by polymerization of monomers containing vinyl groups.

14. Process as claimed in claim 6, in which the receptor is bonded covalently to the hydrophobic polymer layer.

15. REFET or CHEMFET manufactured as claimed in claim 1.

16. Process as claimed in claim 1, in which the water containing hydrophilic polymer layer has a thickness of 0.1-100 μ

m.

17. Process as claimed in claim 1, in which the water containing hydrophilic polymer layer has a thickness of 1-50 μ

m.

18. Process as claimed in claim 9, in which the hydrogel is selected from the group consisting of gelatin, agar-agar, heparin and polyvinyl pyrrolidone.

19. Process as claimed in claim 12, in which the linking agent has the following structure formula:

##STR12## in which R₃ is H, alkyl, aryl, halogen and Z=halogen, alkoxy, phenoxy or hydroxy, and the hydrophobic polymer layer is formed by a reaction with "living" polymers.

20. Process as claimed in claim 6, in which the receptor is bonded physically to the hydrophobic polymer layer.

21. Process as claimed in claim 6, in which the receptor is cross linked to the hydrophobic polymer layer.