Surface profiling interferometer

• US 4,884,697 A
• Filed: 06/21/1988
• Issued: 12/05/1989
• Est. Priority Date: 06/21/1988
• Status: Expired due to Term

• Current Assignee: Brookhaven Science Associates, LLC (Government of the United States of America)
• Original Assignee: Peter Z. Takacs, Shi-Nan Qian
• Inventors: Takacs, Peter Z., Qian, Shi-Nan
• Primary Examiner(s): Willis, Davis L.
• Assistant Examiner(s): TURNER, SAMUEL A
• Application Number:
  US07/209,549
• Time in Patent Office: 532 Days
• Field of Search: 356/345, 356/351, 356/353, 356/360, 356/376
• US Class Current: 356/516
• CPC Class Codes: G01B 11/306 for measuring evenness

Abstract

The design of a long-trace surface profiler for the non-contact measurement of surface profile, slope error and curvature on cylindrical synchrotron radiation (SR) mirrors. The optical system is based upon the concept of a pencil-beam interferometer with an inherent large depth-of-field. The key feature of the optical system is the zero-path-difference beam splitter, which separates the laser beam into two colinear, variable-separation probe beams. A linear array detector is used to record the interference fringe in the image, and analysis of the fringe location as a function of scan position allows one to reconstruct the surface profile. The optical head is mounted on an air bearing slide with the capability to measure long aspheric optics, typical of those encountered in SR applications. A novel feature of the optical system is the use of a transverse "outrigger" beam which provides information on the relative alignment of the scan axis to the cylinder optic symmetry axis.

Claims

1. An interferometer for profiling the surface along one axis of an optical surface comprising:

a. an incoming light beam;

b. first beam splitter means optically oriented to receive and to split said incoming light beam into first and second pencil light beams;

c. first reflector means to reflect back into said first beam splitter means the first pencil light beam;

d. second reflector means to reflect back into said first beam splitter means the second pencil light beam;

e. said first beam splitter means including means to direct outwardly said first and second pencil light beams parallel to and laterally displaced from each other along said axis;

f. second beam splitter means for receiving from said first beam splitter means and passing through said first and second pencil beams toward said optical surface, said optical surface being oriented to reflect said first and second pencil beams back to said second beam splitter means;

g. said second beam splitter means including means to redirect the reflected first and second pencil beams away from said first beam splitter means;

h. means to receive the redirected first and second pencil beams and form an interference pattern from said redirected first and second pencil beams to represent the profile of said optical surface; and

i. said first and second reflector means being positioned to obtain a predetermined path difference between said first and second parallel beams from said first beam splitter means to said optical surface.

2. The interferometer of claim 1 in which said predetermined path difference is zero.

3. The interferometer of claim 2 in which said first and second reflector means are right angle prisms.

4. The interferometer of claim 3 in which said first and second beam splitter means are cubes.

5. The interferometer of claim 1 in which said light beam is a laser beam.

6. The interferometer of claim 1 wherein lateral separation of said redirected first and second pencil beams is adjustable by the relative translation of said first and second reflector means.

7. An interferometer for aligning and profiling the surface of an aspheric optical surface along an axis of said surface comprising:

a. an incoming light beam;

b. first beam splitter means optically oriented to receive and to split said incoming light beam into first and second pencil light beams;

c. first reflector means to reflect back into said first beam splitter means the first pencil light beam;

d. second reflector means to reflect back into said first beam splitter means the second pencil light beam, said first and second reflector means being positioned to obtain a zero path difference;

e. said first beam splitting means including means to direct the reflected first and second pencil light beams parallel to and displaced from each other;

f. second beam splitting means to receive and split said parallel pencil beams from said first beam splitting means to produce a first pair of spaced parallel beams directed toward said axis and at least one beam offset from one of said spaced a parallel beam from which said offset beam is split transversely to said axis, and means to reflect said offset beam to said surface displaced from said axis, said surface reflecting back along the same path said directed beams;

g. blocking means for alternatively unblocking either said pair of spaced parallel beams or said offset beam and the spaced parallel beam from said which said offset beam was split; and

h. means for receiving the reflected offset beam and its spaced parallel beam for aligning said surface and for receiving the reflected spaced parallel beams for profiling the surface of said surface in accordance with the position of said blocking means.

8. The interferometer of claim 7 in which said first and second reflector means are right angle prisms.

9. The interferometer of claim 8 in which said first and second beam splitter means are cubes.

10. The interferometer of claim 7 wherein separation of said redirected first and second pencil beams is adjustable by the relative translation of said first and second reflector means.

11. The interferometer of claim 7 in which said predetermined path difference is zero.

12. The interferometer of claim 7 in which said means to reflect said offset beam is adjustable to direct said offset beam at right angles to said surface where said offset beam is reflected.

13. A method of profiling the surface of an aspheric optical surface having a first axis along which said profile is to be taken comprising the steps of splitting an incoming light beam into first and second pencil light beams, reflecting said pencil light beams utilizing zero path difference reflectors to form a pair of spaced beams, directing said spaced beams at said surface along said axis to said surface where said spaced beams are reflected back, and forming an interference pattern from the reflected beams to represent the profile of said optical surface.

14. The method of claim 13 wherein at least one of said spaced beams is split and displaced from said axis for reflection by said surface to form an interference pattern with said one of said spaced beams reflected from said surface to obtain axial alignment of said mirror.