Calibration system for coordinate measuring machine
First Claim
1. Apparatus for measuring position errors in a machine having a first element and a table which are movable in at least two dimensions relative to each other, said apparatus comprising:
- a reflector assembly attachable to said first element;
a laser measuring assembly attachable to said table for directing at least one outgoing laser beam in a selected measurement direction and for sensing said at least one laser beam reflected from said reflector assembly and generating position error signals representing position errors of said first element; and
means for mounting said laser measuring assembly to said table in different orientations and for mounting said reflector assembly to said first element in different orientations, said reflector assembly and said measuring assembly being aligned in each of said different orientations so that said at least one outgoing laser beam is reflected said reflector assembly back to said laser measuring assembly.
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Accused Products
Abstract
A calibration system for measuring the parametric errors in a coordinate measuring machine having a first element and a table which are movable in three dimensions relative to each other. The apparatus comprises a reflector assembly attachable to the first element, a laser measuring assembly attachable to the table for directing a plurality of laser beams at the reflector assembly and for sensing laser beams reflected from the reflector assembly and generating displacement, straightness, pitch, yaw and roll error signals, and means for mounting the laser measuring assembly to the table in three different orientations and for mounting the reflector assembly to the first element in three different orientations. In each of the orientations, the reflector assembly and the laser measuring assembly are aligned for measurement of parametric errors at a plurality of selected positions along the direction of the laser beam. The parametric errors along each direction of movement are stored in a computer. When a part is measured with the machine, the total errors are calculated at each measurement point, and the errors are subtracted from the scale readings.
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Citations
29 Claims
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1. Apparatus for measuring position errors in a machine having a first element and a table which are movable in at least two dimensions relative to each other, said apparatus comprising:
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a reflector assembly attachable to said first element; a laser measuring assembly attachable to said table for directing at least one outgoing laser beam in a selected measurement direction and for sensing said at least one laser beam reflected from said reflector assembly and generating position error signals representing position errors of said first element; and means for mounting said laser measuring assembly to said table in different orientations and for mounting said reflector assembly to said first element in different orientations, said reflector assembly and said measuring assembly being aligned in each of said different orientations so that said at least one outgoing laser beam is reflected said reflector assembly back to said laser measuring assembly. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. In a machine having a first element and a table which are movable in at least two directions relative to each other, a method for measuring parametric errors in the relative positions of the first element and the table comprising the steps of:
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(a) mounting a reflector assembly to the first element in a first reflector orientation and positioning the first element in a first selected position; (b) mounting a laser measuring assembly to the table in a first laser orientation aligned with said reflector assembly such that at least one laser beam is directed by said measuring assembly along a selected measurement direction at said reflector assembly and is reflected back to said measuring assembly; (c) sensing said at least one laser beam reflected back to said measuring assembly to provide position error signals representing displacement, straightness, pitch, yaw and roll position errors of said first element relative to said table and storing said error signals; (d) moving said first element and said reflector assembly in said selected direction to another selected position wherein said reflector assembly is aligned with said at least one laser beam; (e) sensing said at least one laser beam reflected back to said measuring assembly to provide position error signals representing displacement, straightness, pitch, yaw and roll position errors of said first element relative to said table and storing said error signals; (f) repeating steps (d) and (e) for a number of selected positions in the direction of said at least one laser beam; (g) mounting said reflector assembly to the first element in a second reflector orientation; (h) mounting said laser assembly to the table in a second laser orientation in alignment with said reflector assembly; and (i) repeating steps (c) through (f) for said second orientation. - View Dependent Claims (13, 14, 15)
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16. In a machine having a first element and a table which are movable in a selected direction relative to each other, apparatus for measuring parametric errors in the relative positions of the first element and the table comprising:
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a reflector assembly attachable to said first element and a laser measuring assembly attachable to said table for directing a plurality of laser beams at said reflector assembly and for sensing laser beams reflected from said reflector assembly, said reflector assembly and said laser measuring assembly including first means for measuring displacement errors along the selected direction, second means for measuring straightness errors in two directions perpendicular to the selected direction comprising a retroreflector mounted to said reflector assembly, means for directing a laser beam at said retroreflector from said measuring assembly, and a photosensor in said measuring assembly partitioned into four quadrants for sensing deviations of the reflected beam from the center thereof; third means for measuring pitch and yaw errors about two mutually orthogonal axes perpendicular to the selected direction comprising a mirror mounted to said reflector assembly, means for directing the laser beam at said mirror from said measuring assembly and a photosensor located in said measuring assembly partitioned into four quadrants for sensing deviations of the reflected beam from the center thereof and fourth means for measuring roll error about the selected direction comprising a pair of retroreflectors spaced apart by a prescribed distance and mounted to said reflector assembly, means for directing individual laser beams at each of said retroreflectors from said measuring assembly, and a pair of partitioned photosensors in said measuring assembly for sensing the deviation of each reflected beam in a direction perpendicular to the selected direction and perpendicular to a line drawn between said pair of retroreflectors, said roll error being proportional to the difference between the deviation sensed by the two photosensors divided by said prescribed distance. - View Dependent Claims (17, 18, 19)
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20. Apparatus for measuring parametric position errors in a machine having a first element and a second element movable relative to each other, said apparatus comprising:
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a first calibration assembly attachable to said first element; a second calibration assembly attachable to said second element; interferometer means for measuring change of distance between the first and second calibration assemblies in a selected direction; means for generating a plurality of laser beams between said first and second calibration assemblies and positionally sensitive to transverse and rotational relative movements of said first and second calibration assemblies; beam position sensing means responsive to said position-sensitive laser beams for sensing transverse and rotational relative movements of said first and second calibration assemblies; and means responsive to the outputs of said interferometer means and said beam position sensing means for calculating parametric position errors between said first and second elements.
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21. Apparatus for measuring parametric position errors in a machine having a first element and a second element movable in at least two directions relative to each other, said apparatus comprising:
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a calibration assembly including a first subassembly attachable to said first element and a second subassembly attachable to said second element, said second subassembly including means for directing a plurality of laser beams at said first subassembly, and said first subassembly including means for receiving said plurality of laser beams, said calibration assembly further including sensing means responsive to said plurality of laser beams for providing position error signals representing parametric position errors along said at least two directions of movement, said parametric errors including displacement errors in three mutually perpendicular directions and rotation errors about said three mutually perpendicular directions; and means for mounting said first and second subassemblies so that said plurality of laser beams is successively parallel to said at least two directions of movement so that said sensing means provides said position error signals for said at least two directions of movement.
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22. Apparatus for measuring parametric position errors in a machine having a first element and a second element movable in at least two directions relative to each other, said apparatus comprising:
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a calibration assembly including a first subassembly attachable to said first element and a second subassembly attachable to said second element, said second subassembly including means for directing at least one laser beam in a selected direction at said first subassembly, and said first subassembly including means for receiving said at least one laser beam, said calibration assembly further including sensing means responsive to said at least one laser beam for providing position error signals representing said parametric position error signals along said at least said two directions of movement, said parametric errors including displacement errors in three mutually perpendicular directions and rotation errors about said three mutually perpendicular directions; and means for mounting said first and second subassemblies so that said at least one laser beam is successively parallel to said at least two directions of movement so that said sensing means provides said position error signals for said at least two directions of movement. - View Dependent Claims (23, 24, 25, 26, 27, 28, 29)
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Specification