Method and apparatus for sensing or determining one or more properties or the identity of a sample

• US 4,885,709 A
• Filed: 01/16/1987
• Issued: 12/05/1989
• Est. Priority Date: 01/17/1986
• Status: Expired due to Term

• Current Assignee: Infrared Engineering Ltd (Nordson Corporation)
• Original Assignee: Infrared Engineering Ltd (Nordson Corporation)
• Inventors: Hindle, Peter H., Edgar, Roger F.
• Primary Examiner(s): NOT, DEFINED
• Application Number:
  US07/004,347
• Time in Patent Office: 1,054 Days
• Field of Search: 364/524, 364/526, 364/563, 356/382, 356/432, 358/75, 358/80, 358/93, 250/225, 250/560
• US Class Current: 702/30
• CPC Class Codes: B29C 2948/92152 Thickness
• CPC Class Codes: B29C 2948/92247 Optical properties
• CPC Class Codes: B29C 2948/92485 Start-up, shut-down or parameter setting phase; Emergency shut-down; Material change; Test or laboratory equipment or studies
• CPC Class Codes: B29C 2948/92647 Thickness
• CPC Class Codes: B29C 2948/92742 Optical properties
• CPC Class Codes: B29C 2948/9298 Start-up, shut-down or parameter setting phase; Emergency shut-down; Material change; Test or laboratory equipment or studies
• CPC Class Codes: B29C 48/04 Particle-shaped making granules B29B9/00
• CPC Class Codes: B29C 48/08 flexible, e.g. films
• CPC Class Codes: B29C 48/21 the layers being joined at their surfaces
• CPC Class Codes: B29C 48/92 Measuring, controlling or regulating
• CPC Class Codes: G01B 11/06 for measuring thickness ; e.g. of sheet material thickness measurement by thermal means G01B21/085
• CPC Class Codes: G01N 2021/1738 Optionally different kinds of measurements; Method being valid for different kinds of measurement
• CPC Class Codes: G01N 21/21 Polarisation-affecting properties G01N21/19 takes precedence
• CPC Class Codes: G01N 21/31 Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry G01N21/72 takes precedence
• CPC Class Codes: G01N 21/3554 for determining moisture content
• CPC Class Codes: G01N 21/8422 Investigating thin films, e.g. matrix isolation method

Abstract

In the method and apparatus, optimum correlation between measured and known values of transmittance or reflectance determines the property or identity of a sample. Three or more discrete radiation components can be selected which are transmitted or reflected by relatively different amounts due to interference, absorption or scatter, thereby enabling fewer radiation components to be used to provide an accurate result. The known values can be derived by analogue or digital techniques, the digital technique employing a model or models taking account of absorption, interference and/or scatter. Techniques are disclosed for reducing computing time by range ajustment, identification of a zero correlation value in a differential function of the model or models and computation of correlation coefficients for two or more groups of radiation components.

Claims

1. A method of sensing or determining a characteristic feature of a sample, the method comprising the steps of:

(a) selectively utilizing electromagnetic radiation whose optical character is changed by said sample due to an optical effect which is at least one of optical interference, absorption, or scatter;

(b) causing said electromagnetic radiation to be directed to said sample whereby the optical character of said radiation is changed as a result of the relevant transmission or reflection by said sample, the selection of said radiation being such as to include at least three discrete components selected from a spectral range so that at least one of said components is subjected to said optical effect so that said optical character is changed;

(c) measuring the relevant transmittance or reflectance of said sample for each of said components to derive respective measured values;

(d) correlating said measured values with different known values of relevant transmittance or reflectance, said different known values representing different values of known characteristic features of a known material or materials; and

(e) selecting the known values having an optimum correlation with said measured values, the selected known values representing the characteristic feature of the sample which is sensed or to be determined.

2. A method according to claim 1 wherein said components are selected so that where said radiation is subjected to:

(a) interference, said components have an irregular wavenumber or mean wavenumber spacing;

(b) absorption, at least two of said components are located at or adjacent to an absorption band or edge for the sample so that at least three of said components are relatively and differently absorbed by said sample;

(c) scatter, at least three of said components are scattered by different amounts by said sample.

3. A method according to claim 2 wherein the wavenumber spacing of said components is given by minimum redundancy linear sequences or Golomb rulers.

4. A method according to claim 1 wherein at least one mathematical model is used to derive said different known values.

5. A method according to claim 4 wherein said optimum correlation is a zero correlation value in the correlation between measured values and known values derived from a differential function of said model or models.

6. A method according to claim 4 when applied to a sample having an unknown magnitude to be sensed or determined, the method further including the steps of:

using said measured values to provide a first estimation of the unknown magnitude;

setting limits to a range of magnitudes containing said first estimation as a mean value;

using the limited range of magnitudes in the mathematical model or models to compute said known values; and

sequentially reducing the limits of said range depending on said correlation of known values and measured values.

7. A method according to claim 4, wherein said radiation is subject to optical interference and wherein:

(a) correlation coefficients are computed between said measured values and the known values derived from the mathematical model or models for two or more groups of said radiation components, each said group including said selection of said at least three components;

(b) the highest correlation coefficient is determined for each group of said radiation components over a limited range of known magnitudes used in said mathematical model or models to derive said known values;

(c) the highest correlation coefficients derived from said latter step (b) are used to compute magnitudes at which peaks occur in the correlation coefficients for each of said groups; and

(d) the known values are selected at the known magnitudes where the correlation coefficient peaks are coincident, or most nearly coincident.

8. A method according to claim 7 which is employed when there is more than one magnitude at which the correlation coefficients are coincident, or nearly coincident, the method further including the steps of limiting the range of known magnitudes to those providing said coincident or most nearly coincident peaks and selecting, from the limited range, the known values at the known magnitude at which the correlation coefficients are highest.

9. A method according to claim 1 wherein said radiation components are selected so that they have at least one of;

(i) respectively different wavelengths, the bandwidth of each component being less than the difference between adjacent wavelengths, or

(ii) respectively different angles of incidence, or

(iii) respectively different polarisations, or

(iv) combinations thereof.

10. A method according to claim 1 wherein the characteristic feature to be determined is the amount of anisotropy in the sample, said known values representing the transmittance or reflectance values of predetermined amounts of anisotropy over a predetermined range of anisotropies.

11. A method according to claim 1 which is initially employed to determine the optical thickness of the sample and which is subsequently employed to provide the identity of the sample, said known values taking account of said optical thickness before correlating said measured values with said known values to determine said identity.

12. A method according to claim 1 wherein the characteristic feature to be determined is the thickness of the sample.

13. A method according to claim 1 wherein the sample is a substance having a sorbed material, the quantity of the sorbed material being the characteristic feature to be determined.

14. A method according to claim 1 wherein the sample is a composition, the structure or at least one constituent of the composition being determined or sensed.

15. A method according to claim 1 which is initially employed to identify the sample and which is subsequently employed to determine the optical thickness of the sample, said known values taking account of said identity before correlating said measured values with said known values to determine said thickness.

16. A method according to claim 1 wherein said known values are derived by an analog technique in which said electromagnetic radiation is directed to a material similar to the sample and having different known magnitudes of a characteristic feature of the sample to be sensed or determined.

17. A method according to claim 1 wherein said known values are derived by an analog technique in which said electromagnetic radiation is directed to different known materials having different known magnitudes of the characteristic feature to be sensed or determined.

18. A method for sensing or determining a characteristic feature of a sample, the method comprising the steps of:

(a) selectively utilizing electromagnetic radiation whose optical character is changed by said sample due to an optical effect which is at least one of optical interference, absorption, or scatter;

(b) causing said electromagnetic radiation to be directed to said sample, said radiation including at least three components having respectively different properties;

(c) measuring the relevant transmittance or reflectance of said sample for each of said radiation components to derive respective measured values;

(d) providing known model values of relevant transmittance or reflectance as an output from at least one mathematical model into which is input (i) known values relating to the properties of the radiation components, and (ii) different magnitudes of the characteristic feature to be sensed or determined, said model taking account of the relevant absorption and interference and/or scatter;

(e) correlating said measured values with said output model values; and

(f) selecting the output model values having an optimum correlation with said measured values, the selected output model values representing the characteristic feature of the sample which is sensed or to be determined.

19. A method for sensing or determining a characteristic feature of a sample comprising the steps of:

(a) selectively utilizing electromagnetic radiation whose optical character is changed by said sample due to an optical effect which is at least one of optical interference, absorption, or scatter;

(b) causing electromagnetic radiation to be directed to said sample, said radiation including at least three components having respectively different properties;

(c) measuring the relevant transmittance or reflectance of said sample for each of said radiation components to derive respective measured values;

(d) computing model values on the basis of a differential function of a mathematical model to which are input (i) known values relating to properties of the radiation components, and (ii) different magnitudes of the characteristic feature to be sensed or determined and from which said model values are output;

(e) correlating said measured values with said computed output model values;

(f) determining optimum correlation from a zero correlation value in the correlation between said measured values and said computed output model values; and

(g) selecting the computed output model values at which the correlation is optimum as the values which represent the characteristic feature of the sample which is sensed or to be determined.

20. A method for sensing or determining a characteristic feature of a sample comprising the steps of:

(a) selectively utilizing electromagnetic radiation whose optical character is changed by said sample due to an optical effect which is at least one of optical interference, absorption, or scatter;

(b) causing electromagnetic radiation to be directed to said sample, said radiation including two or more groups of radiation components, each group including at least three components having respectively different properties;

(c) measuring the relevant transmittance or reflectance of said sample for each of said radiation components to derive respective measured values;

(d) providing known model values of relevant transmittance or reflectance as an output from at least one mathematical model into which is input (i) known values relating to the properties of the radiation components, and (ii) different magnitudes of the characteristic feature to be sensed or determined;

(e) computing correlation coefficients between said measured values and said output model values for said two or more groups of radiation components;

(f) determining the highest correlation coefficient for each of said groups of radiation components over a limited range of known magnitudes;

(g) deriving the highest correlation coefficients from the latter step (f) and using them to compute the magnitudes at which peaks occur in the correlation coefficients for each of said groups; and

(h) selecting the output model values at the known magnitudes where the correlation coefficient peaks are coincident, or most nearly coincident.

21. A method according to claim 20 which is employed when there is more than one magnitude at which the correlation coefficients are coincident, or nearly coincident, the method further including the steps of limiting the range of known magnitudes to those providing said coincident or most nearly coincident peaks and selecting, from the limited range, the model values at the known magnitude at which the correlation coefficients are highest.

22. Apparatus for sensing or determining a characteristic feature of a sample utilizing electromagnetic radiation selected to be subject to an optical effect which is at least one of optical interference, absorption, or scatter, the apparatus comprising:

(a) means for causing said electromagnetic radiation to be directed to said sample, said radiation including at least three discrete components selected from a spectral range so that at least one of said components is subjected to said optical effect so that the optical character of said component is changed;

(b) means for receiving the relevant transmitted or reflected radiation components and for providing corresponding measurement values;

(c) means for providing different known values of relevant transmittance or reflectance, said different known values representing different values of known characteristic features of a known material;

(d) means for determining the correlation between said measured values and said known values and for selecting the known values having an optimum correlation with said measured values, the selected known values representing the characteristic feature of the sample which is sensed or to be determined.

23. Apparatus according to claim 22 wherein means (b) is detector means for providing signals representing respective measurement values, the apparatus further including means for converting said measurement values into digital form;

and wherein means (c) and (d) are computing means programmed with a mathematical model to which is input known magnitudes relating to the radiation components and different magnitudes of the characteristic feature of the sample to be sensed or determined in order to derive said known values, said computing means correlating said measured values with said known values and selecting the optimum correlation.

24. Apparatus according to claim 23, wherein the computing means is programmed to select the highest correlation coefficient as optimum.

25. Apparatus according to claim 23 wherein the computing means is programmed to identify a zero correlation value in the correlation between said measured values and said known values derived from a differential function of the model to which said magnitudes relating to the radiation components and said different magnitudes of the characteristic feature of the sample are input.

26. Apparatus according to claim 23, wherein said computing means automatically limits the range of known magnitudes on the basis of a first estimated value derived from said measurement values.

27. Apparatus according to claim 23, further including means for providing a respective measurement value or values from which a first estimation of the characteristic feature of the sample can be determined, the latter means being additional to said means for causing said radiation to be at least one of transmitted through or reflected from the sample, said computing means using said estimated value as a basis for automatically limiting the range of said magnitudes.

28. Apparatus according to claim 23, wherein said computing means is programmed:

(a) to compute correlation coefficients for two or more groups of said radiation components, each said group including said selection of said at least three or more components having relatively different properties;

(b) to determine the highest correlation coefficient for each group of said radiation components over a limited range of known magnitudes;

(c) to use the maximum correlation coefficients derived from the latter determination to compute the magnitudes at which peaks occur in the correlation coefficients for each of said groups; and

(d) to select the model values at the known magnitude where the correlation coefficient peaks are coincident, or most nearly coincident.

29. Apparatus according to claim 28, wherein the computing means is further programmed to limit the range of known magnitudes to those providing said coincident or most nearly coincident peaks and to select, from the limited range, the model values at the known magnitude at which the correlation coefficients are highest.

30. Apparatus according to claim 22 including means for storing said known values, said means containing stored values which have been derived by relevant transmission or reflection of said electromagnetic radiation by a material similar to the sample having different known magnitudes of a characteristic feature of the sample to be sensed or determined.

31. Apparatus according to claim 22 including means for storing said known values, said means containing stored values which have been derived by relevant transmission or reflection by different known materials having different known magnitudes of the characteristic feature to be sensed or determined.

32. Apparatus for sensing or determining a characteristic feature of a sample utilizing electromagnetic radiation selected to be subject to an optical effect which is at least one of interference, absorption, or scatter, the apparatus comprising:

(a) means for causing said electromagnetic radiation to be directed to said sample, said radiation including at least three components having respectively different properties;

(b) means for receiving the relevant transmitted or reflected radiation components in order to provide measured values of the relevant transmittance or reflectance, and for converting said measured values into digital form;

(c) computing means programmed with at least one mathematical model to which is input known values relating to the properties of the radiation components and different magnitudes of the characteristic feature to be sensed or determined in order to output model values, said model taking account of said optical effect, said computing means correlating said measured values with said model values and selecting the model values with the optimum correlation as representative of the characteristic feature of the sample to be sensed or determined.

33. Apparatus for sensing or determining a characteristic feature of a sample utilizing electromagnetic radiation selected to be subject to an optical effect which is at least one of interference or absorption, the apparatus comprising:

(a) means for causing said electromagnetic radiation to be directed to said sample, said radiation including at least three components having respectively different properties;

(b) means for receiving the relevant transmitted or reflected radiation components in order to provide measurement values and for converting said measurement values into digital form;

(c) computing means programmed with at least one differential function of at least one mathematical model to which is input known values relating to properties of the radiation components and different magnitudes of the characteristic feature to be sensed or determined in order to output model values, said computing means being further programmed to determine optimum correlation from a zero correlation value in the correlation between said measured values and said output model values.

34. Apparatus for sensing or determining a characteristic feature of a sample utilizing electromagnetic radiation selected to be subject to an optical effect which is at least one of interference, absorption, or scatter, the apparatus comprising:

(a) means for causing said electromagnetic radiation to be directed to said sample, said radiation including at least three components having respectively different properties;

(b) means for receiving the relevant transmitted or reflected radiation components in order to provide measurement values and for converting said measurement values into digital form;

(c) computing means programmed (i) with at least one mathematical model to which is input known values relating to the properties of the radiation components and different magnitudes of the characteristic feature to be sensed or determined in order to output model values, (ii) to compute correlation coefficients between said measured values and said output model values for two or more groups of said radiation components, (iii) to determine the highest correlation coefficient for each group of said radiation components over a limited range of known magnitudes, (iv) to derive the highest correlation coefficients from the latter step and to use them to compute the magnitudes at which peaks occur in the correlation coefficients for each of said groups, and (v) to select the output model values at the known magnitudes where the correlation coefficient peaks are coincident, or most nearly coincident.

35. Apparatus according to claim 34 wherein said computing means is further programmed to limit the range of known magnitudes to those providing said coincident or most nearly coincident peaks and selecting, from the limited range, the model values at the known magnitude at which the correlation coefficients are highest.