Measuring device employing laser interferometry

• US 4,886,353 A
• Filed: 03/17/1988
• Issued: 12/12/1989
• Est. Priority Date: 03/17/1987
• Status: Expired due to Fees

• Current Assignee: Dea SpA
• Original Assignee: Dea Digital Electronic Automation Spa (BNS Holding Incorporated)
• Inventors: Fondeur, Bernard
• Primary Examiner(s): Willis, Davis L.
• Assistant Examiner(s): Koren, Matthew W.
• Application Number:
  US07/169,416
• Time in Patent Office: 635 Days
• Field of Search: 356/4-5, 356/358, 356/363, 250/203 R
• US Class Current: 356/4.09
• CPC Class Codes: G01B 9/02068 Auto-alignment of optical elements
• CPC Class Codes: G01S 17/36 with phase comparison between the received signal and the contemporaneously transmitted signal
• CPC Class Codes: G01S 17/66 Tracking systems using electromagnetic waves other than radio waves

Abstract

A measuring device employing laser interferometry, and featuring a device for tracking a mobile target; which tracking device is located between a light source and a semireflecting mirror, for the purpose of eliminating any inaccuracy due to the construction of the aforementioned measuring device.

Claims

1. A measuring device employing laser interferometry and comprising at least an interferometric cell and a mobile reflector designed to move in relation to the same;

said cell comprising a coherent light source emitting a source beam, an interferometric separator splitting said source beam into a first beam and a second beam, a fixed reflector for reflecting said first beam back to said separator, said mobile reflector receiving said second beam and reflecting a return beam to said separator whereby said first beam and said return beam form a reunited beam a receiver;

of said required beam and a tracking device located between said interferometric separator and said source and receiver for tracking displacement of said mobile reflector by controlling the direction of said source and reunited beam, no further control being provided on said second or return beam and located upstream from said interferometric separator.

2. A device as claimed in claim 1, characterised by the fact that said tracking device comprises at least drive means, the operation of which is dependent on at least the return beam from said mobile reflector traveling through a given point in the vicinity of an image of said fixed reflector in relation to the separator.

3. A device as claimed in claim 2, characterised by the fact that said drive means operates directly on said light source.

4. A device as claimed in claim 2, characterised by the fact that the said light source is fixed, and that said tracking device includes an optical assembly connected to the said drive means.

5. A device as claimed in claim 4, characterised by the fact that said optical assembly comprises at least a mirror the setting and location of which between said light source and said separator are controlled by said drive means.

6. A device as claimed in claim 5, characterised by the fact that said optical assembly comprised at least two separate mirrors controlled so as to turn about two axes perpendicular to each other and to said return beam.

7. A device as claimed in claim 2, characterised by the fact that said given point through which said return beam reflected by said mobile reflector travels consists of an optoelectric cell the output signal of which constitutes the control signal of said drive means.

8. A device as claimed in claim 2, characterised by the fact that said given point is located between said image of said fixed reflector and said interferometric separator.

9. A device as claimed in claim 2, characterised by the fact that it comprises a second cell for controlling said drive means located at a given point along the path of the beam reflected by said fixed reflector.