Measuring device employing laser interferometry
First Claim
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1. A measuring device employing laser interferometry and comprising at least an interferometric cell and a mobile reflector designed to move in relation to the same;
- said cell comprising a coherent light source emitting a source beam, an interferometric separator splitting said source beam into a first beam and a second beam, a fixed reflector for reflecting said first beam back to said separator, said mobile reflector receiving said second beam and reflecting a return beam to said separator whereby said first beam and said return beam form a reunited beam a receiver;
of said required beam and a tracking device located between said interferometric separator and said source and receiver for tracking displacement of said mobile reflector by controlling the direction of said source and reunited beam, no further control being provided on said second or return beam and located upstream from said interferometric separator.
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Abstract
A measuring device employing laser interferometry, and featuring a device for tracking a mobile target; which tracking device is located between a light source and a semireflecting mirror, for the purpose of eliminating any inaccuracy due to the construction of the aforementioned measuring device.
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Citations
9 Claims
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1. A measuring device employing laser interferometry and comprising at least an interferometric cell and a mobile reflector designed to move in relation to the same;
- said cell comprising a coherent light source emitting a source beam, an interferometric separator splitting said source beam into a first beam and a second beam, a fixed reflector for reflecting said first beam back to said separator, said mobile reflector receiving said second beam and reflecting a return beam to said separator whereby said first beam and said return beam form a reunited beam a receiver;
of said required beam and a tracking device located between said interferometric separator and said source and receiver for tracking displacement of said mobile reflector by controlling the direction of said source and reunited beam, no further control being provided on said second or return beam and located upstream from said interferometric separator. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
- said cell comprising a coherent light source emitting a source beam, an interferometric separator splitting said source beam into a first beam and a second beam, a fixed reflector for reflecting said first beam back to said separator, said mobile reflector receiving said second beam and reflecting a return beam to said separator whereby said first beam and said return beam form a reunited beam a receiver;
Specification