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Wafer disk location monitoring system and tagged process carriers for use therewith

  • US 4,888,473 A
  • Filed: 05/03/1989
  • Issued: 12/19/1989
  • Est. Priority Date: 06/11/1987
  • Status: Expired due to Term
First Claim
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1. A method for monitoring the progress of a plurality of batches of disks through a multiplicity of operations atsseveral locations comprising the steps of:

  • inserting each batch of disks into a carrier constructed and arranged for supporting the disks in a parallel, axially arranged spaced array;

    providing each carrier with a transponder tag constructed, arranged and coded for uniquely identifying the carrier and the batch inserted therein, said transponder tag encapsulated for protection from harsh chemical environments to which the disks and carrier are normally exposed and said transponder tag maintained encapsulated in precise relationship for correct identification by a reader unit constructed and arranged for determining the identification of any transponder tag within its detection range;

    detecting the presence of each carrier at one of the several locations by operating a multiplicity of limited range reader units, each of which is positioned adjacent to one of the locations; and

    monitoring the progress of at least one batch of disks through various locations by updating and storing location information received from the reader units.

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