Wafer disk location monitoring system and tagged process carriers for use therewith

• US 4,888,473 A
• Filed: 05/03/1989
• Issued: 12/19/1989
• Est. Priority Date: 06/11/1987
• Status: Expired due to Term

• Current Assignee: Asyst Technologies Incorporated (Azenta, Inc.)
• Original Assignee: Fluoroware, Inc. (Entegris Incorporated)
• Inventors: Rossi, Alexander N., Sancen, Mario N.
• Primary Examiner(s): Pitts, Harold I.
• Application Number:
  US07/346,915
• Time in Patent Office: 230 Days
• Field of Search: 235/376, 235/380
• US Class Current: 235/376
• CPC Class Codes: G03F 7/70541 Tagging, i.e. hardware or software tagging of features or components, e.g. using tagging scripts or tagging identifier codes for identification of chips, shots or wafers
• CPC Class Codes: G03F 7/7075 Handling workpieces outside exposure position, e.g. SMIF box
• CPC Class Codes: G06K 7/10009 sensing by radiation using wavelengths larger than 0.1 mm, e.g. radio-waves or microwaves
• CPC Class Codes: H01L 21/67294 using identification means, e.g. labels on substrates or labels on containers
• CPC Class Codes: H01L 21/67326 Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls

Abstract

A method and system for monitoring the process of a plurality of batches or semiconductor wafers or memory disks through a series of process operations and process carriers for use therein. Each batch is placed in a carrier in which it is transported to the locations where the processing operations are performed. Each carrier is provided with a transponder tag coded to be responsive to within reading range of a reader unit which transmits a radio frequency signal to the transponder tag and reads and decodes a phase modulated signal returned by the transponder tag to uniquely identify the carrier that is positioned within the range of the reader unit. Further control apparatus receives information from the reader units to permit the monitoring process of semiconductor wafer or memory disk batches through multiple processing operations. The carriers are specially designed to protect the transponder tag from the effects of the harsh chemical environments to which the carriers and disks are normally exposed during processing operations. A separate encapsulated transponder tag is also provided for attachment to existing carriers, so that they may be tracked by this monitoring system.

Claims

1. A method for monitoring the progress of a plurality of batches of disks through a multiplicity of operations atsseveral locations comprising the steps of:

inserting each batch of disks into a carrier constructed and arranged for supporting the disks in a parallel, axially arranged spaced array;

providing each carrier with a transponder tag constructed, arranged and coded for uniquely identifying the carrier and the batch inserted therein, said transponder tag encapsulated for protection from harsh chemical environments to which the disks and carrier are normally exposed and said transponder tag maintained encapsulated in precise relationship for correct identification by a reader unit constructed and arranged for determining the identification of any transponder tag within its detection range;

detecting the presence of each carrier at one of the several locations by operating a multiplicity of limited range reader units, each of which is positioned adjacent to one of the locations; and

monitoring the progress of at least one batch of disks through various locations by updating and storing location information received from the reader units.

2. A system for tracking batches of disks through a plurality of operations comprising:

a plurality of carriers, each of which is adapted for carrying a batch of at least one disk;

a plurality of transponder tags encapsulated for protection from harsh chemical environments to which the disks and carriers are normally exposed, each tag maintained encapsulated in precise relationship for correct identification by a remote recognition reader unit;

said remote recognition reader unit constructed and arranged for transmitting an RF signal to the transponder tag and receiving a coded RF response therefrom indicative of the identity of a particular batch of disks and providing an output signal characteristic thereof; and

control means for receiving the output from the reader units and providing a control signal indicative of which carrier is within the range of which reader.

3. The system of claim 2, wherein the transponder tag is attached to the outside surface of a vertical wall of a carrier, and the tag includes a transmitting antenna oriented perpendicular to the plane of the disks.

4. The system of claim 3, wherein the transponder tag includes a surface acoustic wave crystal adapted for modifying the phase of a received signal in accordance with a predetermined code and wherein the crystal is inductively coupled to the antenna.

5. The system of claim 4, wherein each of the reader units transmits a radio frequency signal to a transponder tag within its detection range and wherein the transponder tag receives the signal and returns a phase modulated signal coded to uniquely identify the transponder tag and the carrier to which it is attached.

6. The system of claim 2, wherein the transponder tgg is attached to the carrier by:

encapsulating the tag in a capsule constructed and arranged to protect the tag from harsh chemical environments to which the disks and carriers are normally exposed;

attaching the encapsulated tag to a surface of the carrier in precise relationship for correct identification by a remote recognition reader unit.

7. The system of claim 6, wherein the capsule is a two part capsule constructed and arranged to closely accommodate the tag, encapsulating is accomplished by sealing the two part capsule around the tag, and the encapsulated tag is removably attached to the surface of the carrier parallel to the plane of disks carried in the carrier.

8. The system of claim 2, wherein the transponder tag is comprised of:

printed circuit antenna means mounted on a base; and

a surface acoustic wave transducer mounted on the base, the transduce having at least one flat surface thereof mounted to the base with the antenna means operatively coupled to the transducer.

9. The system of claim 8, wherein the transducer includes transducer antenna means and wherein the antenna means is operatively coupled to the transducer antenna means by inductive coupling.

10. The system of claim 9, wherein the transducer is operatively coupled to the antenna by conductive connection.

11. The system of claim 2, wherein each of the reader units transmits a radio frequency signal to a transponder within its detection range which receives the signal and returns a phase modulated signal coded for uniquely identifying the transponder tag and the carrier to which it is attached.

12. A transponder tagged process carrier constructed and arranged for supporting a batch of at least one disk in a parallel, axially arranged spaced array and having attached thereto a transponder tag constructed, arranged and coded for uniquely identifying the carrier and the batch inserted therein.

13. A carrier according to claim 12 wherein the tag is protected from harsh chemical environments to which the disks and carrier are normally exposed.

14. A carrier according to claim 13, wherein said transponder tag is encapsulated in a capsule for protection from harsh chemical environments to which the disks and carrier are normally exposed.

15. A carrier according to claim 14, wherein the capsule is a two part capsule constructed and arranged to closely accommodate the tag, encapsulating is accomplished by sealing the two part capsule around the tag, and the encapsulated tag is removably attached to the surface of the carrier.

16. A carrier according to claim 15, wherein the carrier and the capsule are formed of PFA or polypropylene synthetic resin, sealing is hermetic heat sealing and removable attachment is threaded screw attachment or snap-fit attachment.

17. A carrier according to claim 14, wherein the encapsulated transponder tag is maintained in precise relationship for correct identification by a reader unit constructed and arranged for determining the identification of a transponder tag within its detection range.

18. A carrier according to claim 14, wherein the transponder tag includes a surface acoustic wave crystal adapted for modifying the phase of a received signal in accordance with a predetermined code and wherein the crystal is inductively coupled to the antenna.

19. A carrier according to claim 14, wherein the transponder tag is comprised of:

printed circuit antenna means mounted on a base; and

a surface acoustic wave transducer mounted on the base, the transducer having at least one flat surface thereof mounted to the base with the antenna means operatively coupled to the transducer.

20. A carrier according to claim 19, wherein the transducer includes transducer antenna means and wherein the antenna means is operatively coupled to the transducer antenna means by inductive coupling.

21. A carrier according to claim 20, wherein the transducer is operatively coupled to the antenna by conductive connection.

22. A carrier according to claim 13, wherein the transponder tag is mounted directly on a surface of the carrier.

23. A carrier according to claim 22, wherein the tag is mounted on a vertical wall of the carrier and includes a transmitting antenna oriented perpendicular to the plane of the disks.

24. A carrier according to claim 22, wherein the transponder tag includes a surface acoustic wave crystal adapted for modifying the phase of a received signal in accordance with a predetermined code and wherein the crystal is inductively coupled to the antenna.

25. A carrier according to claim 22, wherein the transponder tag is mounted on the carrier by:

inserting the transponder tag in a recess in a surface of the carrier, the recess being constructed and arranged for supporting the transponder tag perpendicular to the plane of disks carried in the carrier; and

sealing the transponder tag in the recess with a cover means constructed and arranged for covering and sealing the transponder tag from deleterious effects of harsh chemicals normally encountered by the carrier and disks in processing operations.

26. A carrier according to claim 22, wherein the transponder tag is comprised of:

printed circuit antenna means mounted on a base; and

a surface acoustic wave transducer having at least one flat surface thereof mounted mounted to the base with the antenna means operatively coupled to the transducer.

27. A carrier according to claim 26, wherein the transducer package includes transducer antenna means and wherein the antenna means is operatively coupled to the transducer antenna means by inductive coupling.

28. A carrier according to claim 27, wherein the transducer package is operatively coupled to the antenna by a conductive connection.

29. An encapsulated transponder tag, constructed and arranged to be attached to a process carrier, said carrier constructed and arranged for supporting a batch of at least one disk in a parallel, axially arranged spaced array, said tag arranged and coded for uniquely identifying the carrier and the batch inserted therein.

30. An encapsulated transponder tag according to claim 29, wherein the tag is encapsulated in a capsule for protection from harsh chemical environments to which the disks and carrier are normally exposed.

31. An encapsulated transponder tag according to claim 30, wherein the capsule is a two part capsule constructed and arranged to closely accomodate the tag and encapsulating is accomplished by sealing the two part capsule around the tag, and the encapsulated tag is constructed and arranged to be removably attached to a surface of a carrier.

32. An encapsulated transponder tag according to claim 31, wherein the capsule is formed of PFA or polypropylene synthetic resin, sealing is hermetic heat sealing, and removable attachment is threaded screw attachment or snap-fit attachment.

33. An encapsulated transponder tag according to claim 29, wherein the transponder includes a surface acoustic wave crystal adapted for modifying the phase of a received signal in accordance with a predetermined code and wherein the crystal is inductively coupled to the antenna.

34. An encapsulated transponder tag according to claim 29, wherein the transponder tag is comprised of:

printed circuit antenna means mounted on a base; and

a surface acoustic wave transducer mounted on the base, the transponder having at least one flat surface thereof mounted to the base with the antenna means operatively coupled to the transducer.

35. An encapsulated transponder tag according to claim 34, wherein the transducer includes transducer antenna means and wherein the antenna means is operatively coupled to the transducer antenna means by inductive coupling.

36. An encapsulated transponder tag according to claim 35, wherein the transducer is operatively coupled to the antenna by conductive connection.