Microdevice for gas and vapor sensing

• US 4,892,709 A
• Filed: 10/02/1987
• Issued: 01/09/1990
• Est. Priority Date: 10/02/1987
• Status: Expired due to Fees

• Current Assignee: SRI International, Inc.
• Original Assignee: SRI International, Inc.
• Inventors: Frese, Karl W. Jr.
• Primary Examiner(s): NOT, DEFINED
• Assistant Examiner(s): Wallen, T. J.
• Application Number:
  US07/104,338
• Time in Patent Office: 830 Days
• Field of Search: 422/83, 422/98, 338/34, 338/35, 73/23, 73/25, 73/26, 73/26 R, 73/29
• US Class Current: 422/98
• CPC Class Codes: G01N 27/4162 investigating the composition of gases, by the influence exerted on ionic conductivity in a liquid conductometry in general G01N27/06; amperometric gas sensors G01N27/404

Abstract

In accordance with the present invention a microdevice 10 is set forth for gas sensing. The microdevice 10 includes a conductive substrate 12 having an insulator layer 14 on a surface 16 thereof, the insulator layer 14 having an opening 18 therethrough exposing a portion 20 of the surface 16. A conducting member 22 is in contact with the insulator layer 14. The member 22, the insulator layer 14 and the portion 20 of the surface 16 define an ionization chamber 28. Gas can flow through the ionization chamber 28. A potential difference is applied between the substrate 12 and the member 22. The current flowing between the substrate 12 and the member 22 is measured. A microdevice 10 as disclosed herein uses very little power and has very high sensitivity.

Claims

1. A microdevice for gas and vapor sensing, comprising:

an electrically conductive substrate having an electrical insulator layer on a surface thereof, the insulator layer having an opening therethrough exposing a portion of said surface;

electrically conducting member in contact with said insulator layer and in covering relation to said opening, said member, said insulator layer and said portion of said surface defining an ionization chamber;

means for flowing gas through said ionization chamber;

means for applying a voltage difference between said substrate and said member; and

means for measuring the current flowing between said substrate and said member.

2. A microdevice as set forth in claim 1, wherein said substrate comprises a semiconductor material.

3. A microdevice as set forth in claim 2, wherein said member comprises a semiconductor material.

4. A microdevice as set forth in claim 1, wherein said insulator layer is no more than about 10,000 Angstroms thick.

5. A microdevice as set forth in claim 1, wherein said substrate is silicon or silicon carbide.

6. A microdevice as set forth in claim 5, wherein said insulator layer is silicon dioxide or silicon nitride.

7. A microdevice as set forth in claim 5, wherein said insulator layer is no more than about 10,000 Angstroms thick.

8. A microdevice as set forth in claim 7, wherein said member comprises a semiconductor material.

9. A microdevice as set forth in claim 8, wherein said substrate and said member are silicon and said insulator layer is silicon dioxide.

10. A microdevice as set forth in claim 1, wherein said insulator layer is of a thickness selected and said means for applying a voltage difference applies a voltage sufficient so as to provide an electric field strength between said substrate and said member across said opening of at least about 10⁵ volts per centimeter.

11. A microdevice as set forth in claim 10, wherein said substrate comprises a semiconductor material.

12. A microdevice as set forth in claim 11, wherein said member comprises a semiconductor material.

13. A microdevice as set forth in claim 12, wherein said substrate is silicon or silicon carbide.

14. A microdevice as set forth in claim 13, wherein said insulator layer is silicon dioxide or silicon nitride.

15. A microdevice as set forth in claim 14, wherein said substrate and said material are silicon and said insulator layer is silicon dioxide.

16. A microdevice as set forth in claim 1, wherein said ionization chamber has walls defined by said member, said insulator layer and said portion of said surface, and further including:

a liquid film on said walls.

17. A microdevice as set forth in claim 16, wherein said film is from about 10 to about 200 Angstroms thick.

18. A microdevice as set forth in claim 1, wherein said voltage difference applying means - 20 applies a voltage difference of at least about 10⁴ V/cm.

19. A microdevice for gas and vapor sensing, comprising:

an electrically conductive substrate having a substrate surface;

an electrically conducting member having a member surface generally parallel to said substrate surface;

an electrical insulator sandwiched between and abutting said substrate surface and said member surface, said insulator having an opening therethrough exposing facing portions of said substrate and member surfaces, said insulator and said facing portions of said substrate and member surfaces defining an ionization chamber;

means for flowing gas through said chamber;

means for applying a sufficient voltage difference between said substrate and said member to provide a voltage gradient therebetween of at least about 10⁴ V/cm and to cause a current to flow between said substrate and said member; and

means for measuring the current flowing between said substrate and said member.

20. A microdevice as set forth in claim 19, wherein said insulator is no more than about 10,000 Angstroms thick.

21. A microdevice as set forth in claim 20, wherein said ionization chamber has walls defined by said member, said insulator layer and said portion of said surface, and further including:

a liquid film on said walls.

22. A microdevice as set forth in claim 21, wherein said film is from about 10 to about 200 Angstroms thick.

23. A microdevice as set forth in claim 22, wherein said substrate is silicon or silicon carbide.