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Capacitance type sensitive element and a manufacturing method thereof

  • US 4,893,214 A
  • Filed: 09/09/1988
  • Issued: 01/09/1990
  • Est. Priority Date: 09/29/1987
  • Status: Expired due to Fees
First Claim
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1. A capacitance type sensitive element comprising:

  • a pair of electrodes formed on an insulating substrate and having opposite electrode faces perpendicular or slantingly formed with respect to a face of the insulating substrate; and

    sensitive material disposed between the opposite electrode faces of the pair of electrodes and on both of the electrodes and having electrical characteristics changed on the basis of the physical or chemical interaction between the sensing means and a substance to be detected.

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