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Method and product for fabricating a resonant-bridge microaccelerometer

  • US 4,893,509 A
  • Filed: 12/27/1988
  • Issued: 01/16/1990
  • Est. Priority Date: 12/27/1988
  • Status: Expired due to Term
First Claim
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1. A method for forming an accelerometer comprising the following steps:

  • providing a silicon substrate;

    forming a buried layer in said silicon substrate;

    forming a predetermined proof mass of appropriate lateral dimensions on said silicon substrate symmetrically disposed generally over said buried layer;

    removing silicon from said silicon substrate, so as to delineate a pattern which generally corresponds to said lateral dimensions of said predetermined proof mass and so as to delineate a plurality of microbridges; and

    removing said buried layer in said silicon substrate so as to form a cavity generally everywhere therebetween said proof mass and said microbridges, and said silicon substrate.

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