Apparatus utilizing charged-particle beam

• US 4,894,541 A
• Filed: 07/28/1988
• Issued: 01/16/1990
• Est. Priority Date: 07/31/1987
• Status: Expired due to Fees

• Current Assignee: JEOL Limited
• Original Assignee: JEOL Limited
• Inventors: Ono, Akishige
• Primary Examiner(s): Howell, Janice A.
• Assistant Examiner(s): NGUYEN, KIET TUAN
• Application Number:
  US07/225,342
• Time in Patent Office: 537 Days
• Field of Search: 250/306, 250/310, 250/492.1, 250/398
• US Class Current: 850/10
• CPC Class Codes: H01J 37/256 using scanning beams

Abstract

In an apparatus irradiating a specimen with a scanning charged-particle beam to detect x-rays or backscattered electrons emanating from the specimen to display an image thereof on a viewing screen, the beam is fixed on a certain point on the specimen to analyze only that region. The size of the analyzed region is indicated on the viewing screen by a circle, for example, and this circle is superimposed on the image of the specimen. The size of the circle is determined from the accelerating voltage at which the beam is accelerated, the magnification of the image of the specimen, and the mean atomic number of the specimen.

Claims

1. An apparatus utilizing a charged-particle beam for scanning a specimen in a two-dimensional manner and displaying an image of the specimen based upon x-rays or backscattered electrons emitted from the specimen on a display device having a viewing screen, said apparatus comprising:

a position-specifying means for specifying a desired position within the image of the specimen and displaying that position as a first mark upon the viewing screen;

a means for fixing the charged-particle beam on the position specified by the position-specifying means;

a means for switching the accelerating voltage at which the beam is accelerated to at least one other value;

a means for receiving the at least one other value of the accelerating voltage;

a means for detecting the x-rays or backscattered electrons emitted from the specimen in response to the irradiation of the fixed beam;

a means for receiving the mean atomic number of the irradiated portion of the specimen; and

a second mark display means which superimposes a second mark indicating the position and the size of an analyzed region on the image of the specimen displayed on the viewing screen according to information indicating the accelerating voltage and information indicating the mean atomic number of the specimen.

2. The apparatus of claim 1, wherein said mark display means comprises;

a storage means for storing a table of various combinations of values of the accelerating voltage, the mean atomic number, and the size of the region producing x-rays or backscattered electrons;

a reading means for reading information about the size from the table in response to the combination of the information indicating the accelerating voltage and the information indicating the mean atomic number of the specimen; and

a display means for displaying a mark that represents the size of the analyzed region according to the output from the correcting means.

3. An apparatus utilizing a charged-particle beam for scanning a specimen in a two-dimensional manner and displaying an image of the specimen based upon x-rays or backscattered electrons emitted from the specimen on a display device having a viewing screen, said apparatus comprising:

a position-specifying means for specifying a desired position within the image of the specimen and displaying that position as a first mark upon the viewing screen;

means for fixing the charged-particle beam on the position specified by the position-specifying means;

a means for switching the accelerating voltage at which the beam is accelerated to at least one other value;

a means for receiving the at least one other value of the accelerating voltage;

a means for switching the magnification of the image of the specimen to at least one other value;

a means for detecting the x-rays or backscattered electrons emitted from the specimen in response to the irradiation of the fixed beam;

a means for receiving the mean atomic number of the irradiated portion of the specimen; and

a second mark display means which superimposes a second mark indicating the position and the size of an analyzed region on the image of the specimen displayed on the viewing screen according to the information indicating the magnification of the image of the specimen, information indicating the accelerating voltage, and information indicating the mean atomic number of the specimen.

4. The apparatus of claim 3, wherein said mark display means comprises:

a storage means for storing a table of various combinations of values of the accelerating voltage, the mean atomic number, and the size of the region producing x-rays or backscattered electrons;

a reading means for reading information about the size from the table in response to the combination of the information indicating the accelerating voltage and the information indicating the mean atomic number of the specimen; and

a display means for displaying a mark that represents the size of the analyzed region, according to the output from the correcting means.