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Semiconductor pressure sensor

  • US 4,895,026 A
  • Filed: 03/01/1989
  • Issued: 01/23/1990
  • Est. Priority Date: 03/01/1988
  • Status: Expired due to Term
First Claim
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1. A pressure sensor comprising:

  • a first pressure sensing diaphragm having first and second pressure receiving surfaces;

    means connected to said first pressure sensing diaphragm for generating a first electrical signal indicative of the fluid pressure acting on said first pressure sensing diaphragm;

    a second pressure sensing diaphragm similar to said first pressure sensing diaphragm and having first and second pressure receiving surfaces, said first and second pressure sensing diaphragms are positioned substantially in a common plane with their first pressure receiving surfaces on one side of said common plane and their second pressure receiving surfaces on the other side of said common plane;

    means connected to said second pressure sensing diaphragm for generating a second electrical signal indicative of the pressure acting on said second pressure sensing diaphragm;

    means for defining a first fluid passage connectable to a first pressure source, said first fluid passage being in communication with said first pressure receiving surface of said first pressure sensing diaphragm and said second pressure receiving surface of said second pressure sensing diaphragm;

    means for defining a second fluid passage connectable to a second pressure source, said second fluid passage being in communication with said second pressure receiving surface of said first pressure sensing diaphragm and said first pressure receiving surface of said second pressure sensing surface;

    means for making a substraction of said first and second electrical signals and providing an output electrical signal proportional to the magnitude of the result of said substraction between said first and second electrical signals.

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