Semiconductor pressure sensor

• US 4,895,026 A
• Filed: 03/01/1989
• Issued: 01/23/1990
• Est. Priority Date: 03/01/1988
• Status: Expired due to Term

• Current Assignee: Mitsubishi Denki Kabushiki Kaisha (Mitsubishi Electric Corporation)
• Original Assignee: Mitsubishi Denki Kabushiki Kaisha (Mitsubishi Electric Corporation)
• Inventors: Tada, Yasuo
• Primary Examiner(s): WOODIEL, DONALD
• Application Number:
  US07/317,485
• Time in Patent Office: 328 Days
• Field of Search: 73/721, 73/720, 73/718, 73/719, 73/722, 73/727, 73/753, 73/754, 73/DIG. 4, 338/4, 338/42
• US Class Current: 73/721
• CPC Class Codes: G01L 13/025 using diaphragms
• CPC Class Codes: G01L 15/00 Devices or apparatus for measuring two or more fluid pressure values simultaneously
• CPC Class Codes: G01L 19/0038 being part of the housing other details about the housing G01L19/14
• CPC Class Codes: G01L 19/0084 to the outside of the housing other details about the housing see G01L19/14
• CPC Class Codes: G01L 19/02 Arrangements for preventing, or for compensating for, effects of inclination or acceleration of the measuring device; Zero-setting means for aneroid barometers G01L7/14
• CPC Class Codes: G01L 19/143 Two part housings
• CPC Class Codes: G01L 19/148 Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
• CPC Class Codes: G01L 9/06 of piezo-resistive devices

Abstract

A semiconductor pressure sensor comprising a first and a second identical pressure sensing diaphragm each having first and second pressure receiving surfaces and supported to align in a common plane in the same orientation. Two pressure sensing diaphragms have connected thereto similar bridge circuits made of piezoelectric elements for generating electrical signals indicative of the fluid pressure acting on the pressure sensing diaphragms. A first fluid passage connectable to a first pressure source is in communication with the first pressure receiving surface of the first diaphragm and the second pressure receiving surface of the second diaphragm, and a second fluid passage is in communication with a second pressure receiving surface of the first diaphragm and the first pressure receiving surface of the second diaphragm. The two electrical signal are supplied to a differential amplifier where two signals are substracted and an output electrical signal proportional to the magnitude of the result of the substraction between the first and the second electrical signals.

Claims

1. A pressure sensor comprising:

a first pressure sensing diaphragm having first and second pressure receiving surfaces;

means connected to said first pressure sensing diaphragm for generating a first electrical signal indicative of the fluid pressure acting on said first pressure sensing diaphragm;

a second pressure sensing diaphragm similar to said first pressure sensing diaphragm and having first and second pressure receiving surfaces, said first and second pressure sensing diaphragms are positioned substantially in a common plane with their first pressure receiving surfaces on one side of said common plane and their second pressure receiving surfaces on the other side of said common plane;

means connected to said second pressure sensing diaphragm for generating a second electrical signal indicative of the pressure acting on said second pressure sensing diaphragm;

means for defining a first fluid passage connectable to a first pressure source, said first fluid passage being in communication with said first pressure receiving surface of said first pressure sensing diaphragm and said second pressure receiving surface of said second pressure sensing diaphragm;

means for defining a second fluid passage connectable to a second pressure source, said second fluid passage being in communication with said second pressure receiving surface of said first pressure sensing diaphragm and said first pressure receiving surface of said second pressure sensing surface;

means for making a substraction of said first and second electrical signals and providing an output electrical signal proportional to the magnitude of the result of said substraction between said first and second electrical signals.

2. A pressure sensor as claimed in claim 1, wherein each of said first and said second pressure sensing diaphragms is a semiconductor diaphragm formed in a semiconductor substrate.

3. A pressure sensor as claimed in claim 1, wherein said first and said second pressure sensing diaphragms are semiconductor diaphragms formed on a single common semiconductor substrate.

4. A pressure sensor as claimed in claim 3, wherein a flexible seal member is inserted between said housing and said semiconductor substrate.

5. A pressure sensor as claimed in claim 1, wherein each of said first and second signal generating means comprises four piezoelectric resistors formed on a semiconductor substrate and arranged in a bridge circuit.

6. A pressure sensor as claimed in claim 1, wherein said passage means for defining said first and said second fluid passages comprises a housing.

7. A pressure sensor as claimed in claim 1, wherein said means for making a substraction and generating said output electrical signal comprises a differential amplifier.