Video detection system

• US 4,896,206 A
• Filed: 02/21/1989
• Issued: 01/23/1990
• Est. Priority Date: 12/14/1987
• Status: Expired due to Fees

• Current Assignee: Electro Scientific Industries Incorporated (MKS Instruments Incorporated)
• Original Assignee: Electro Scientific Industries Incorporated (MKS Instruments Incorporated)
• Inventors: Denham, Munroe
• Primary Examiner(s): Groody, James J.
• Assistant Examiner(s): Kostak, Victor R.
• Application Number:
  US07/313,651
• Time in Patent Office: 336 Days
• Field of Search: 358/101, 358/107, 358/93, 358/168, 358/169, 382/8, 340/709
• US Class Current: 348/87
• CPC Class Codes: H01L 21/681 using optical controlling means

Abstract

A video detection system detects the edge line of a microcircuit component that is to be trimmed by a laser trimming apparatus. The components (46, 48, 50, 52) to be trimmed are darker than the substrate (44) upon which the components are formed. The system generates a video signal corresponding to the image of the part (26) that carries the circuit. The brightness level of a selected point in the video signal is monitored. The position of the selected point corresponds to a point on the part image and is adjustable to be aligned with the point where the laser beams (24) contacts the surface of the part (26). The image is moved relative to the selected point, and as the edge of the relatively darker component to be trimmed crosses the selected point, the corresponding change in the monitored brightness level provides an indication that the edge of the component has been detected. Also provided is an alignment symbol for superimposition on the displayed image. The selected point (90) is incorporated into the alignment symbol. The alignment symbol is preferably cross hairs (88). The symbol brightness level is automatically adjustable to contrast with the brightness level of the portions of the part image over which the symbol is superimposed.

Claims

1. A video detection system for detecting the common edge line of adjacent first and second portions of an article in a predetermined orientation, comprising:

video means for generating a video signal corresponding to a video image of the article, the video signal including a brightness level of changing magnitude in response to differences in a brightness of the image of the first and second portions of the article;

comparison means in communication with the video means for comparing a reference brightness magnitude with the magnitude of the video signal brightness level and for providing a brightness status signal that assumes first and second states whenever the magnitude of the video signal brightness level is, respectively, greater than and less than the reference brightness magnitude; and

detection point means for establishing within the video image a detection point at a selectable position that is independent of the orientation of the common edge line, the detection point means cooperating with the video means so that the detection point is movable from one of the first and second portions to the common edge line,

whereby the state of the brightness status signal changes whenever the detection point moves from one of the first and second portions to the common edge line and the change in the state of the brightness status signal represents detection of the common edge line.

2. The system of claim 1 further comprising:

video display means receiving the video signal for displaying the video image of the article on a viewing screen; and

alignment symbol means cooperating with the detection point means and the video display means for superimposing on the video image an alignment symbol including a line that is collinear with the detection point.

3. The system of claim 2 in which the alignment symbol means includes means for displaying within the alignment symbol the state of the brightness status signal.

4. The system of claim 2 in which the alignment symbol includes a pair of lines intersecting at a point and in which the detection point is positioned at the point of intersection of the intersecting lines.

5. The system of claim 2 in which the video display means includes a monochrome display apparatus.

6. The system of claim 2 in which the selected position of the detection point is fixed on the video screen and the detection point means cooperates with the video means to move the image of the article relative to the selected position of the detection point.

7. The system of claim 2 further including contrast means in cooperation with the alignment symbol means and the video means for providing sections of the alignment symbol that are superimposed on the video image of the first and second portions with brightness levels representing the second and first states, respectively, thereby to provide an alignment symbol that contrasts with portions of the video image on which the alignment symbol is superimposed.

8. The system of claim 1 further including brightness status display means receiving the brightness status signal for displaying the state of the brightness status signal.

9. The system of claim 1 in which the comparison means continuously compares the magnitude of the video signal brightness level with the reference brightness magnitude to provide a continuous brightness status signal.

10. The system of claim 9 further comprising latch means in communication with the comparison means and the detection point means for sampling the continuous brightness status signal whenever it corresponds to the detection point, thereby to determine the state of the brightness status signal corresponding to the detection point.

11. The system of claim 1 in which the comparison means includes a voltage comparator circuit.

12. The system of claim 1 in which the video signal includes synchronizing pulses that define a succession of image fields and in which the detection point means identifies the preselected detection point in successive ones of the image fields.

13. In a laser trimming apparatus having laser means for generating a laser beam to trim a component of a microcircuit in a predetermined orientation and having first and second adjacent portions with a common edge line between them, the improvement comprising:

video means for generating a video signal corresponding to a video image of the microcircuit, the video signal including a brightness level of changing magnitude in response to differences in a brightness of the image of the first and second portions of the microcircuit;

comparison means in communication with the video means for comparing a reference brightness magnitude with the magnitude of the video signal brightness level and for providing a brightness status signal that assumes first and second states whenever the magnitude of the video signal brightness level is, respectively, greater than and less than the reference brightness magntidue; and

detection point means for establishing within the video image a detection point at a selectable position that is independent of the orientation of the common edge line, the detection point means cooperating with the video means so that the detection point is movable from one of the first and second portions to the common edge line,

whereby the state of the brightness status signal changes whenever the detection point moves from one of the first and second portions to the common edge line and the change in the state of the brightness status signal represents detection of the common edge line.

14. The system of claim 13 further comprising:

video display means receiving the video signal for displaying the video image of the article on a viewing screen; and

alignment symbol means cooperating with the detection point means and the video display means for superimposing on the video image an alignment symbol including a line that is collinear with the detection point.

15. The system of claim 14 in which the alignment symbol means includes means for displaying within the alignment symbol the state of the brightness status signal.

16. The system of claim 14 in which the alignment symbol includes a pair of lines intersecting at a point and in which the detection point is positioned at the point of intersection of the intersecting lines.

17. The system of claim 14 in which the video display means includes a monochrome display apparatus.

18. The system of claim 14 in which the selected position of the detection point is fixed on the viewing screen and the detection point means cooperates with the video means to move the image of the article relative to the selected position of the detection point.

19. The system of claim 14 further including contrast means in cooperation with the alignment symbol means and the video means for providing sections of the alignment symbol that are superimposed on the video image of the first and second portions with brightness levels representing the second and first states, respectively, thereby to provide an alignment symbol that contrasts with portions of the video image on which the alignment symbol is superimposed.

20. The system of claim 13 further including brightness status display means receiving the brightness status signal for displaying the state of the brightness status signal.

21. The system of claim 13 in which the comparison means continuously compares the magntidue of the video signal birghtness level with the reference brightness magntidue to provide a continuous brightness status signal.

22. The system of claim 21 further comprising latch means in communication with the comparison means and the detection point means for sampling the brightness status signal whenever it corresponds to the detection point, thereby to determine the state of the brightness status signal corresponding to the detection point.

23. The system of claim 13 in which the comparison means includes a voltage comparator circuit.

24. The system of claim 13 in which the video signal includes synchronizing pulses that define a succession of image fields and in which the detection point means identifies the preselected detection point in successive ones of the image fields.