Sensors for detecting electromagnetic parameters utilizing resonating elements

• US 4,897,541 A
• Filed: 06/02/1988
• Issued: 01/30/1990
• Est. Priority Date: 05/18/1984
• Status: Expired due to Term

• Current Assignee: Luxtron Corp. (Advanced Energy Industries, Inc. (China))
• Original Assignee: Luxtron Corp. (Advanced Energy Industries, Inc. (China))
• Inventors: Phillips, Stephen R.
• Primary Examiner(s): Nelms, David C.
• Assistant Examiner(s): Allen, Stephone B.
• Application Number:
  US07/201,599
• Time in Patent Office: 607 Days
• Field of Search: 250/227, 250/231 R, 250/231 P, 250/237 G, 324/96, 332/7.51, 350/355, 350/356, 374/117, 73/653-657
• US Class Current: 250/227.21
• CPC Class Codes: G01D 5/268 using optical fibres G01D5/28 - G01D5/38 take precedence
• CPC Class Codes: G01L 1/167 optical excitation or measuring of vibrations
• CPC Class Codes: G01R 15/248 using a constant light source and electro-mechanically driven deflectors

Abstract

To detect a physical parameter, a resonator is connected to a body which changes in dimension when subjected to the parameter. Thus, when the body changes in dimension in response to the parameter, the resonance frequency of the resonator is modulated thereby. Such modulations are detected optically to detect and measure the parameter. In the preferred embodiment, the resonator transmits light and light is applied to the resonator so that the light supplied is transmitted through the resonator and so that the modulations of the resonance frequency also modulates the intensity of the light transmitted by the resonator. The modulations of the intensity of the light transmitted by the resonator is detected to detect the parameter.

Claims

1. A transducer apparatus for detecting a physical parameter comprising:

a body that changes dimension in response to the parameter;

a resonator adapted to vibrate mechanically at a resonance frequency, said resonator connected to said body so that when said body changes dimension, said body applies a force on said resonator or causes the resonator to change dimension, thereby modulating the resonance frequency of the resonator;

means for supplying light to the resonator to resonate the resonator; and

means for optically detecting modulations of the resonance frequency of the resonator caused by the force applied by the body to detect said parameter.

2. The transducer apparatus of claim 1, wherein said physical parameter is an electromagnetic parameter.

3. The transducer apparatus of claim 1, wherein said parameter is a changing or substantially constant electric field, magnetic field, voltage or current.

4. The transducer apparatus of claim 1, said apparatus further comprising means for shielding the resonator and body from any electromagnetic noise.

5. The transducer apparatus of claim 1, wherein said resonator is bonded to the body by a bonding material.

6. The transducer apparatus of claim 1, wherein said resonator reflects light, and wherein said detecting means comprises:

means for supplying light to the resonator so that the light supplied is reflected by the resonator, and so that the modulations of the resonance of the resonator also modulates the intensity of the light reflected by the resonator;

wherein the detecting means detects the modulations of the intensity of the light reflected by the resonator.

7. The transducer apparatus of claim 1, wherein said resonator absorbs light, and wherein said detecting means comprises:

means for supplying light to the resonator so that the light supplied is absorbed by the resonator, and so that the modulations of the resonance of the resonator also modulates the intensity of the light absorbed by the resonator;

wherein the detecting means detects the modulations of the intensity of the light absorbed by the resonator.

8. The apparatus of claim 1, wherein said parameter is a voltage, and wherein said body includes two capacitive plates spaced apart from each other, so that when said voltage is applied across the plates, the distance between the plates changes, causing either a force to be applied to the resonator or causing the resonator to change in dimension.

9. The transducer apparatus of claim 1, wherein said resonator has two ends, said body comprising:

two end caps each attached to an end of the resonator; and

an annular member connecting the two end caps, said annular member having an axis and changing in dimension along its axis when subjected to the parameter.

10. The transducer apparatus of claim 1, wherein said resonator transmits light, and wherein said detecting means comprises:

means for supplying light to the resonator so that the light supplied is transmitted through the resonator, and so that the modulations of the resonance of the resonator also modulates the intensity of the light transmitted by the resonator;

wherein the detecting means detects the modulations of the intensity of the light transmitted by the resonator.

11. The transducer apparatus of claim 1, wherein said parameter is a magnetic field, said body comprising a magnetostrictive material so that when the body is placed in a magnetic field, the body changes in dimension.

12. The transducer apparatus of claim 1, wherein said parameter is a voltage, said body comprising a piezoelectric material so that when a voltage is applied across the body, the body changes its dimension.

13. The transducer apparatus of claim 1, wherein said parameter is a current, said apparatus further comprising means responsive to the current for providing a magnetic field which is a function of the current wherein said body comprises a magnetostrictive material so that when the body is placed in the magnetic field, the body changes in dimension.

14. The apparatus of claim 1, wherein said body includes a portion that is spaced apart from the resonator and that changes in dimension when subjected to the parameter, and wherein said change in dimension of the portion causes a force to be applied to the resonator, or causes the resonator to change in dimension.

15. The transducer apparatus of claim 9, said annular member comprising a first annular section which changes in dimension along the axis of the member in response to the parameter, and a second annular section whose coefficient of thermal expansion is such that the thermal expansion of the annular member matches or compensates for that of the resonator in the direction along the axis of the member.

16. The transducer apparatus of claim 10, wherein said resonator is a tuning fork type transducer.

17. The transducer apparatus of claim 16, wherein in said resonating means includes optical and electrical feedback means responsive to the light supplied by the light supplying means for applying a voltage to the resonator for resonating the resonator.

18. The transducer apparatus of claim 11, wherein said magnetostrictive material saturates in the magnetic field when the strain in the resonator is lower than its breaking strain so that the resonator is not overloaded when the body is subjected to large magnetic fields.

19. The transducer apparatus of claim 11, wherein said magnetostrictive material saturates in response to increasing magnetic fields when the strain in the resonator is less than about 80% of its breaking strain so that the change in resonance frequency of the resonator varies substantially linearly with the the magnetic field.

20. The transducer apparatus of claim 12, wherein said piezoelectric material saturates in response to increasing voltages when the strain in the resonator is lower than its breaking strain so that the resonator is not overloaded when the body is subjected to large voltages.

21. The transducer apparatus of claim 12, wherein said piezoelectric material saturates in response to increasing voltages when the strain in the resonator is less than about 80% of its breaking strain so that the change in resonance frequency of the resonator varies substantially linearly with the the magnetic field.

22. The transducer apparatus of claim 13, wherein said magnetic field providing means comprises a magnetically conducting magnetic core which completely surrounds a conductor carrying the current except for a gap, wherein the magnetic field is provided across the gap.

23. The transducer apparatus of claim 13, wherein said magnetic field providing means comprises an electrical conductor which forms a first loop around a conductor carrying the current and a second loop for providing the magnetic field inside the second loop.

24. The transducer apparatus of claim 23, said apparatus further comprising means for shielding the resonator, body and the second loop from any electromagnetic noise and the magnetic field caused by the current in the conductor and the current in the first loop.

25. The transducer apparatus of claim 14, wherein the parameter is a voltage, said portion of the body comprising two electrically conductive capacitive plates;

and wherein said body further comprises;

two levers connected at their fulcrums, said portion and said resonator being connected to the two levers such that, when the voltage is applied across the two plates, the two plates are urged further apart or closer together, thereby causing the two levers to move relative to each other about their fulcrums to apply a force on the resonator, or to cause the resonator to change in dimension.

26. THe apparatus of claim 14, wherein said resonator but not said portion is shielded from said parameter.

27. The transducer apparatus of claim 14, said resonator having two ends, said apparatus further comprising an assembly for connecting the resonator to the body, said assembly comprising:

a first and a second lever connected at their fulcrums;

said body and said resonator connected to the two levers such that when the body changes in dimension, it causes the two levers to move relative to each other at their fulcrums to apply a force to the resonator or causes the resonator to change in dimension.

28. The transducer apparatus of claim 27, wherein said portion of the body comprises a first element, and wherein said body further comprises a second element, wherein the first element is attached to the end of one member and the second element is attached to the end of the other member, and wherein said two elements are connected such that:

when the first element changes in dimension in response to the parameter along a first direction, it causes the two ends of the two members attached to the body to move closer together or further apart in the first direction, said movement of the members causing a force to be applied to the resonator or causing the resonator to change dimension along a second direction; and

wherein the second element has a coefficient of thermal expansion which is such that the combined thermal expansion or contraction of the first and second elements in the first direction matches or compensates for that of the resonator in the second direction.

29. The transducer apparatus of claim 13, said apparatus further comprising means for shielding the resonator but not the body from the physical parameter.

30. A method for detecting an electromagnetic parameter by means of a body which changes in dimension when subjected to the parameter and a resonator connected to said body so that when said body changes dimension in response to the parameter, said body applies a force on said resonator or causes said resonator to change in dimension, thereby modulating the resonance frequency of the resonator, said method comprising:

supplying light to resonate the resonator; and

optically detecting modulations of the resonance frequency of the resonator as a result of change in dimension, caused by the body or caused by the force applied by the body, to detect said parameter.

31. The method of claim 30, wherein said resonator transmit light, and wherein said detecting step comprises:

supplying light to the resonator so that the light supplied is transmitted through the resonator, and so that the modulations of the resonance of the resonator also modulates the intensity of the light transmitted by the resonator;

wherein the detecting step detects the modulations of the intensity of the light transmitted by the resonator.

32. The method of claim 30, wherein the parameter detected is a current carried in a conductor, wherein the detecting step detects the magnetic fields at least two different points adjacent to the conductor.

33. A transducer apparatus for detecting an electrical signal comprising:

a piezoelectric member which transmits light;

means for applying the electrical signal to the member to vibrate the member;

means for supplying light to the member, so that the light transmitted by the member is in a direction transverse to the vibration of the member, wherein the vibration of said member modulates the light transmitted by the member; and

means for detecting modulations of the light transmitted by the member to detect said electrical signal.

34. The transducer of claim 33, wherein said modulations detecting means detects the frequency modulations of the light.

35. A transducer apparatus for detecting a physical parameter, wherein said parameter is a magnetic field, a current or a voltage, said apparatus comprising:

a body;

a resonator connected to said body, said body being such that when said body is subjected to the magnetic field, current or voltage, said body applies a force on said resonator thereby modulating the resonance frequency of the resonator;

means for resonating the resonator; and

means for detecting modulations of the resonance frequency of the resonator caused by the force applied by the body to detect said parameter.

36. A transducer apparatus for detecting a physical parameter comprising:

means for supplying light;

a piezoelectric resonator for altering the intensity of light supplied by the supplying means, wherein the resonance of the resonator alters the intensity of the light;

means for resonator the member piezoelectrically so that the physical parameter influences the resonance of the member; and

means responsive to the light intensity modulations for determining changes in the resonance frequency of the resonator in order to detect said physical parameter.

37. A transducer apparatus for detecting a physical parameter comprising:

a body that changes dimension in response to the parameter;

a resonator adapted to vibrate mechanically at a resonance frequency, said resonator connected to said body so that when said body changes dimension, said body applies a force on said resonator or causes the resonator to change dimension, thereby modulating the resonance frequency of the resonator;

means for resonating the resonator; and

means for detecting modulations of the resonance frequency of the resonator caused by the force applied by the body to detect said parameter.

38. The apparatus of claim 37, wherein said resonating means resonates the resonator optically.

39. The apparatus of claim 37, wherein said detecting means detects the modulations optically.