Vibrational angular velocity sensor
First Claim
1. A vibrational angular velocity sensor comprising:
- (a) an angular velocity vibration element;
(b) a glass vacuum casing for housing said angular velocity vibration element in a vacuum, an inside surface of said glass vacuum casing being coated with a metallic film to exclude external radiant heat;
(c) at least one support pin, fixed to said glass vacuum casing by glass material within said glass vacuum casing, for supporting said angular velocity vibration element;
(d) a plurality of conductive lead pins extending from the inside to the outside of said glass vacuum casing, the inside ends of said conductive lead pins being connected to signal terminals of said angular velocity vibration element and the outside of said conductive lead pins being arranged with a constant length and connected to an outside printed circuit board for a velocity sensor signal processing circuit; and
(e) a plurality of casing fixing pins also extending from the inside to the outside of said glass vacuum casing, the outside ends of said casing fixing pins being arranged with a constant length and fixed to the outside printed circuit board.
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Accused Products
Abstract
To increase the stability and sensitivity of a vibrational angular velocity sensor, the vibrator is airtightly housed within a glass vacuum casing whose inside surface is coated with a metallic film. Further, conductive lead pins electrically connected between vibrator signal terminals and a printed circuit board for a signal processing circuit and fixing pins mechanically fixed to the printed circuit board are arranged with a constant length outside the casing in parallel to each other. Further, two vibrator support pins are fixed to the glass casing by glass material. To obtain a high vacuum within the glass casing, a subcasing including a getter is connected to the casing through a connecting tube cut off or sealed after evacuation.
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Citations
7 Claims
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1. A vibrational angular velocity sensor comprising:
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(a) an angular velocity vibration element; (b) a glass vacuum casing for housing said angular velocity vibration element in a vacuum, an inside surface of said glass vacuum casing being coated with a metallic film to exclude external radiant heat; (c) at least one support pin, fixed to said glass vacuum casing by glass material within said glass vacuum casing, for supporting said angular velocity vibration element; (d) a plurality of conductive lead pins extending from the inside to the outside of said glass vacuum casing, the inside ends of said conductive lead pins being connected to signal terminals of said angular velocity vibration element and the outside of said conductive lead pins being arranged with a constant length and connected to an outside printed circuit board for a velocity sensor signal processing circuit; and (e) a plurality of casing fixing pins also extending from the inside to the outside of said glass vacuum casing, the outside ends of said casing fixing pins being arranged with a constant length and fixed to the outside printed circuit board. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A method of evacuating a casing of a vibrational angular velocity sensor into a vacuum, comprising the steps of:
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(a) connecting the casing for housing a vibrational angular velocity vibrator to a subcasing including getter through a connecting tube; (b) reducing pressure within the casing and the subcasing; (c) burning out the getter within the subcasing; and (d) sealing and cutting off the connecting tube from the subcasing.
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Specification