Rate sensor
First Claim
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1. An angular rate sensor comprises:
- a pair of driven tines and excitation means, responsive to an applied drive signal, for exciting a vibration of the driven tines, a pair of output tines coupled mechanically to the driven tines; and
detection means responsive to a vibration of the output tines for generating a detection signal related to angular rate;
means for generating a feedback signal related to torsional imbalance of the driven tines, and feedback means, responsive to the feedback signal, for driving the driven tines towards a condition of torsional balance.
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Abstract
An angular rate sensor comprises a pair of driven tines and a pair of output tines connected to the driven tines by a stem portion. A detection circuit including a set of output electrodes, associated with each output tines, generates a detection signal related to angular rate. A feedback circuit, including a further set of electrodes associated with each driven tine; utilizes a phase quadrature component of the detection signal so as to drive the driven tines towards a condition of torsional balance.
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Citations
12 Claims
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1. An angular rate sensor comprises:
a pair of driven tines and excitation means, responsive to an applied drive signal, for exciting a vibration of the driven tines, a pair of output tines coupled mechanically to the driven tines; and
detection means responsive to a vibration of the output tines for generating a detection signal related to angular rate;
means for generating a feedback signal related to torsional imbalance of the driven tines, and feedback means, responsive to the feedback signal, for driving the driven tines towards a condition of torsional balance.- View Dependent Claims (2, 3, 4, 5, 6)
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7. An angular rate sensor comprises a single pair of tines, excitation means responsive to an applied drive signal for exciting a vibration of said tines;
- detection means responsive to a vibration of the tines for generating a detection signal related to angular rate;
means for generating a feedback signal related to torsional imbalance of the tines; and
feedback means, responsive to the feedback signal, for driving the tines towards a condition of torsional balance. - View Dependent Claims (8, 9, 10, 11, 12)
- detection means responsive to a vibration of the tines for generating a detection signal related to angular rate;
Specification