Pressure sensor having sealing member for sealing housing interior with respect to external space
First Claim
1. A pressure sensor including a cylindrical metallic housing having an open end having an opening, a ceramic pressure sensing element having a ceramic diaphragm and fixedly accommodated within an open end portion of said metallic housing, and strain detecting means associated with said ceramic diaphragm, said ceramic diaphragm being exposed at one of opposite major surfaces thereof to an external space through said opening of the metallic housing and deformable in response to a pressure of a measurement fluid in said external space, an electrical output of said strain detecting means varying with an amount of deformation of said ceramic diaphragm, thereby representing said pressure of the measurement fluid, wherein an improvement comprising:
- a metallic sealing member which is fluid-tightly bonded to a peripheral portion of said ceramic pessure sensing element with a bonding material, and which is fluid-tightly welded to said open end portion of said cylindrical metallic housing, so that said pressure sensing element is fluid-tightly secured to said metallic housing through said metallic sealing member, such that an interior of said metallic housing is sealed with respect to said external space.
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Accused Products
Abstract
A pressure sensor including a cylindrical metallic housing having an open end having an opening, a ceramic pressure sensing element having a ceramic diaphragm and fixedly accommodated within an open end portion of the metallic housing, and a strain detector associated with the ceramic diaphragm. The ceramic diaphragm is exposed at one of opposite major surfaces thereof to an external space through the opening of the metallic housing and is deformable in response to a pressure of a measurement fluid in the external space. An electrical output of the strain detector varies with an amount of deformation of the ceramic diaphragm, thereby representing the pressure of the fluid. The sensor further includes a metallic sealing member which is fluid-tightly bonded to a peripheral portion of the ceramic pressure sensing element with a bonding material, and which is fluid-tightly welded to the open end portion of the cylindrical metallic housing, so that the pressure sensing element is fluid-tightly secured to the metallic housing through the metallic sealing member, whereby an interior of the metallic housing is sealed with respect the external space.
40 Citations
11 Claims
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1. A pressure sensor including a cylindrical metallic housing having an open end having an opening, a ceramic pressure sensing element having a ceramic diaphragm and fixedly accommodated within an open end portion of said metallic housing, and strain detecting means associated with said ceramic diaphragm, said ceramic diaphragm being exposed at one of opposite major surfaces thereof to an external space through said opening of the metallic housing and deformable in response to a pressure of a measurement fluid in said external space, an electrical output of said strain detecting means varying with an amount of deformation of said ceramic diaphragm, thereby representing said pressure of the measurement fluid, wherein an improvement comprising:
a metallic sealing member which is fluid-tightly bonded to a peripheral portion of said ceramic pessure sensing element with a bonding material, and which is fluid-tightly welded to said open end portion of said cylindrical metallic housing, so that said pressure sensing element is fluid-tightly secured to said metallic housing through said metallic sealing member, such that an interior of said metallic housing is sealed with respect to said external space. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
Specification