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On chip heater element and temperature sensor

  • US 4,899,180 A
  • Filed: 04/29/1988
  • Issued: 02/06/1990
  • Est. Priority Date: 04/29/1988
  • Status: Expired due to Fees
First Claim
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1. A thermal ink jet array device formed on a silicon substrate comprising:

  • an array of ink jet channels,an ink inlet,connecting means for allowing ink to flow from said inlet to said ink jet channels,a sensor means for sensing the temperature of said device and for outputting a signal which is a function of the device temperature, said sensor means comprising a temperature sensing element, and a differential amplifier for outputting said signal which is a function of the temperature sensed by said sensing element, andmeans for heating coupled to said signal for heating said device,said channels, inlet and connecting means being cavities etched into said silicon substrate, and said sensor means and means for heating being integrated on said silicon substrate.

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