Surface profile measurement of workpieces

• US 4,903,413 A
• Filed: 02/05/1987
• Issued: 02/27/1990
• Est. Priority Date: 02/07/1986
• Status: Expired due to Fees

• Current Assignee: Taylor Hobson Limited (Ametek Incorporated)
• Original Assignee: Rank Taylor Hobson Limited
• Inventors: Bellwood, Philip R.
• Primary Examiner(s): HAROIAN, HARRY
• Application Number:
  US07/011,102
• Time in Patent Office: 1,118 Days
• Field of Search: 33/551.554, 33/178 D, 33/178 E, 33/178 R
• US Class Current: 33/551
• CPC Class Codes: G01B 5/207 using a plurality of fixed, simultaneously operating transducers G01B5/213 - G01B5/22 take precedence
• CPC Class Codes: G01B 7/282 for measuring roundness

Abstract

In order to measure the surface profile of a workpiece, a yoke having two fixed feet is held in contact with the surface as the workpiece is rotated. A dynamic probe is mounted on the yoke by means of a transducer which outputs a signal dependent upon the position of the dynamic probe relative to a transducer datum. The fixed feet and the foot of the dynamic probe have a similar shape and size so that they detect irregularities in the workpiece surface with equal sensitivity. Fourier analysis of the signal caused by movement of the dynamic probe directly by the workpiece and also by movement of the yoke enables the profile of the workpiece to be determined. In order to improve the frequency response of the transducer output over the range of harmonics considered, the angles between the dynamic probe and the fixed probes are unequal. The apparatus does not require a precision spindle type machine to rotate the workpiece and is therefore particularly suitable for in situ measurement of workpiece profiles.

Claims

1. An apparatus for measuring a surface profile of a workpiece having a generally circular section, comprising a probe assembly, means for rotating the workpiece relative to the probe assembly, the probe assembly comprising a yoke, a pair of feet mounted on the yoke for engagement with the workpiece surface at the section to be measured at first and second locations spaced in the direction of relative movement so that the feet and yoke follow variations in the surface profile upon such movement, and detector means which is mounted on the yoke operable to provide a signal dependent upon the distance relative to the probe assembly of a third location on the work piece surface spaced from the feet locations in the direction of relative movement, the signal varying in accordance with the relative rotational position of the workpiece and the probe assembly, the feet being adapted to follow variations in the surface profile substantially as closely as the detector means, the apparatus further comprising signal processing means responsive to the signal from the detector means for determining the surface profile of the workpiece, said signal processing means being operable to take into account variations in the detected distance due to movement of the yoke caused by the feet engaging irregularities in the surface profile in addition to variations in the detected distance due to surface irregularities directly detected by the detector means.

2. An apparatus as claimed in claim 1, characterized in that the feet are adapted to make essentially point contact with the workpiece.

3. An apparatus as claimed in claim 1, characterized in that the feet are each fixed rigidly to the yoke.

4. An apparatus as claimed in claim 1, characterized in that the relative spacings of the first and second locations and the second and third locations are not equal.

5. An apparatus as claimed in claim 4, characterised in that the relative spacings are in the ratio of an even number to one.

6. An apparatus as claimed in claim 5, characterised in that the relative spacings are in the ratio of 4:

1.

7. An apparatus as claimed in claim 1, characterized by a further detector means for providing a signal dependent upon the distance relative to the probe assembly of a fourth location on the workpiece surface spaced from the first, second and third locations in the direction of relative movement of the workpiece and the probe assembly.

8. An apparatus as claimed in claim 7, characterized in that the relative spacings of the second and third locations and the first and third locations are not equal and in that the relative spacings of the first and fourth locations is equal to the relative spacing of the second and third locations.

9. An apparatus as claimed in claim 7, characterized in that the relative spacing of the first and fourth locations is not equal to the relative spacing of the second and third locations.

10. An apparatus as claimed in claim 7, further comprising means for adding the signals of the two detector means.

11. An apparatus as claimed in claim 1, and including a second such probe assembly spaced from and connected to the first mentioned probe assembly and further detector means mounted with respect to the first and second probe assemblies for providing a signal dependent upon the distance to a further location on the workpiece spaced from the planes of detection of the detector means of the first and second probe assemblies.

12. An apparatus as claimed in claim 1, characterized in that the feet are adapted to make essentially line contact with the workpiece along a line transverse to the direction of relative movement.

13. Apparatus as claimed in claim 1 wherein said signal processing means includes means for deriving from said detector signal amplitudes and phases associated with each harmonic of a Fourier series representing the surface profile of the workpiece as a plurality of harmonics.

14. Apparatus as claimed in claim 13, wherein said means for deriving said amplitudes and phases of said Fourier series representing the surface profile includes means for determining amplitudes and phases of another Fourier series representing said detector signal as a plurality of harmonics, each harmonic in said detector signal Fourier series having a first amplitude and phase attributable to movement of the third location relative to the probe assembly, in combination with second and third amplitudes and phases attributable to the movement of the probe assembly at the first location and the second location, respectively, the second and third amplitudes having predetermined ratios with respect to the first amplitude, and the second and third phases having predetermined offsets from the first phase.