Force detector and moment detector using resistance element
First Claim
1. A detector for detecting forces exerted in respective axial directions and moments exerted around respective axes with an origin (P) being as a working point in an XYZ three-dimensional coordinate system,wherein there are providedfirst bridging portions (214, 215) formed along the X-axis on respective both sides of said origin, andsecond bridging portions (212, 213) formed along the Y-axis on respective both sides of said origin,both the ends of said first and second bridging portions being fixed as fixed portions so that strains are produced in said respective bridging portions by applying a force to said origin, respectively, andwherein resistance element groups (R) comprising a plurality of resistance elements having a property such that electric resistance changes due to mechanical deformation are provided on the XY plane of said first and second bridging portions at principal positions of the following positions:
- a pair of positions for resistance elements (R13, R15) arranged on both sides of the X-axis in respective positive and negative directions of the Y-axis in the vicinity of said origin in the positive direction of said X-axis,a pair of positions for resistance elements (R10, R12) arranged on both sides of said X-axis in respective positive and negative directions of said Y-axis in the vicinity of said origin in the negative direction of said X-axis,a pair of positions for resistance elements (R14, R16) arranged on both sides of said X-axis in respective positive and negative directions of said Y-axis in the vicinity of said fixed portion in the positive direction of said X-axis,a pair of positions for resistance elements (R9, R11) arranged on both sides of said X-axis in respective positive and negative directions of said Y-axis in the vicinity of said fixed portion in the negative direction of said X-axis,a pair of positions for resistance elements (R5, R7) arranged on both sides of said Y-axis in respective positive and negative directions of said X-axis in the vicinity of said origin in the positive direction of said Y-axis,a pair of positions for resistance elements (R2, R4) arranged on both sides of said Y-axis in respective positive and negative directions of said X-axis in the vicinity of said origin in the negative direction of said Y-axis,a pair of positions for resistance elements (R6, R8) arranged on both sides of said Y-axis in respective positive and negative directions of said X-axis in the vicinity of said fixed portion in the positive direction of said Y-axis, anda pair of positions for resistance elements (R1, R3) arranged on both sides of said Y-axis in respective positive and negative directions of said X-axis in the vicinity of said fixed portion in the negative direction of said Y-axis,thus to detect a change in the force exerted on said origin on the basis of changes in electric resistances of respective resistance elements.
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Accused Products
Abstract
Force and moment exerted on the working point (P) on a semiconductor substrate (110; 210), on one surface of which resistance elements (r, R) having an electric resistance varying due to mechanical deformation are formed, are detected. A portion spaced from the working point of the semiconductor substrate is fixed. Since openings (113) or bridge portions (212 to 215) are formed in the semiconductor substrate, when a force or an angular moment in a fixed direction is applied to the working point, uneven stresses are produced on the semiconductor substrate. Such uneven stresses are detected as changes in electric resistances of the resistance elements. A measure is taken for an arrangement of resistance elements on the semiconductor substrate, thereby to constitute predetermined bridges. Thus, forces in three directions and angular moments in three directions in the three-dimensional space can be independently read as bridge voltages, respectively.
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Citations
4 Claims
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1. A detector for detecting forces exerted in respective axial directions and moments exerted around respective axes with an origin (P) being as a working point in an XYZ three-dimensional coordinate system,
wherein there are provided first bridging portions (214, 215) formed along the X-axis on respective both sides of said origin, and second bridging portions (212, 213) formed along the Y-axis on respective both sides of said origin, both the ends of said first and second bridging portions being fixed as fixed portions so that strains are produced in said respective bridging portions by applying a force to said origin, respectively, and wherein resistance element groups (R) comprising a plurality of resistance elements having a property such that electric resistance changes due to mechanical deformation are provided on the XY plane of said first and second bridging portions at principal positions of the following positions: -
a pair of positions for resistance elements (R13, R15) arranged on both sides of the X-axis in respective positive and negative directions of the Y-axis in the vicinity of said origin in the positive direction of said X-axis, a pair of positions for resistance elements (R10, R12) arranged on both sides of said X-axis in respective positive and negative directions of said Y-axis in the vicinity of said origin in the negative direction of said X-axis, a pair of positions for resistance elements (R14, R16) arranged on both sides of said X-axis in respective positive and negative directions of said Y-axis in the vicinity of said fixed portion in the positive direction of said X-axis, a pair of positions for resistance elements (R9, R11) arranged on both sides of said X-axis in respective positive and negative directions of said Y-axis in the vicinity of said fixed portion in the negative direction of said X-axis, a pair of positions for resistance elements (R5, R7) arranged on both sides of said Y-axis in respective positive and negative directions of said X-axis in the vicinity of said origin in the positive direction of said Y-axis, a pair of positions for resistance elements (R2, R4) arranged on both sides of said Y-axis in respective positive and negative directions of said X-axis in the vicinity of said origin in the negative direction of said Y-axis, a pair of positions for resistance elements (R6, R8) arranged on both sides of said Y-axis in respective positive and negative directions of said X-axis in the vicinity of said fixed portion in the positive direction of said Y-axis, and a pair of positions for resistance elements (R1, R3) arranged on both sides of said Y-axis in respective positive and negative directions of said X-axis in the vicinity of said fixed portion in the negative direction of said Y-axis, thus to detect a change in the force exerted on said origin on the basis of changes in electric resistances of respective resistance elements. - View Dependent Claims (2, 3, 4)
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Specification