Method of making a hermetically sealed electronic component

• US 4,906,311 A
• Filed: 03/23/1988
• Issued: 03/06/1990
• Est. Priority Date: 09/24/1985
• Status: Expired due to Fees

• Current Assignee: John Fluke Company Incorporated
• Original Assignee: John Fluke Company Incorporated
• Inventors: Gurol, I. Macit
• Primary Examiner(s): Ball, Michael W.
• Assistant Examiner(s): Aftergut, Jeff H.
• Application Number:
  US07/172,014
• Time in Patent Office: 713 Days
• Field of Search: 428/901, 428/701, 428/209, 428/210, 501/13, 501/17, 501/21, 501/69, 501/70, 501/15, 156/89, 156/285, 156/283, 156/297, 156/300, 156/311, 156/325, 65/59.21, 65/59.22, 65/59.23, 228/263.12, 264/272.11
• US Class Current: 156/89.16
• CPC Class Codes: H01C 13/02 Structural combinations of resistors impedance networks per se H03H
• CPC Class Codes: H01C 17/242 by laser trimming by laser in general B23K26/351
• CPC Class Codes: H01L 23/295 containing a filler H01L23/296 takes precedence
• CPC Class Codes: H01L 23/3121 a substrate forming part of the encapsulation
• CPC Class Codes: H01L 23/3142 Sealing arrangements between parts, e.g. adhesion promotors
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H01L 2924/09701 Low temperature co-fired ceramic [LTCC]
• CPC Class Codes: H01L 2924/19041 being a capacitor
• CPC Class Codes: H05K 1/0306 Inorganic insulating substrates, e.g. ceramic, glass
• CPC Class Codes: H05K 1/167 incorporating printed resistors
• CPC Class Codes: H05K 2201/017 Glass ceramic coating, e.g. formed on inorganic substrate
• CPC Class Codes: Y10T 156/1089 of discrete laminae to single face of additional lamina
• CPC Class Codes: Y10T 156/1093 with covering of discrete laminae with additional lamina

Abstract

A cermic substrate supports a thin or thick film electronic circuit hermetically enclosed by a vitreous glass covering sealed to the ceramic substrate by a heat fused vitreous sealing glass. The vitreous sealing glass is screened onto the vitreous glass covering in a composition comprising a binder material and a liquifier. The electronic circuit is trimmed by a laser beam directed through the vitreous glass covering as one of the final process steps after completion of those process steps which tend to affect the resistivity of the resistive element; process steps such as high temperature baking and soldering of component parts.

Claims

1. A method of making a hermetically sealed device comprising the steps of:

(a) disposing an electronic circuit on a substrate;

(b) covering the electronic circuit and substrate with a vitreous sealing glass in granular form in a binder and liquefier;

(c) firing the electronic circuit, substrate and vitreous sealing glass to decompose the binder and liquefier;

(d) fusing the vitreous sealing glass at a temperature below about 380°

C. at a pressure above about 100 psi for a predetermined time interval.

2. The method as claimed in claim 1 including the steps of:

(a) baking the electronic circuit and substrate after fusing the vitreous sealing glass to stabilize the electronic circuit; and

(b) trimming the electronic circuitry after baking.

3. The method as claimed in claim 1 wherein the covering is accomplished by screening the vitreous sealing glass, binder, and liquifier onto the electronic circuit and substrate.

4. The invention as claimed in claim 1 wherein said disposing step deposits a plurality of electronic circuits on the substrate and including the steps of:

(a) scribing said substrate into a plurality of individual substrates each containing a single electronic circuit; and

(b) breaking the substrate into a plurality of devices.

5. A method of making a hermetically sealed device comprising steps of:

(a) disposing an electronic circuit on a substrate;

(b) mixing a vitreous sealing glass in granular form with a binder and liquefier to form a sealing glass mixture;

(c) covering an annular portion of a covering with the sealing glass mixture, said annular portion sized to be larger than said electronic circuit;

(d) firing the vitreous glass covering to decompose the liquefier and binder of the glass sealing mixture to leave the vitreous sealing glass;

(e) placing the covering on said substrate with said vitreous sealing glass surrounding said electronic circuit and abutting said substrate; and

(f) fusing said vitreous sealing glass at a temperature below about 380°

C. at a pressure above about 100 psi to form a hermetic seal of vitreous sealing glass fused to said covering and said substrate.

6. The method as claimed in claim 5 including the steps of:

(a) baking the electronic circuit and substrate after fusing the vitreous sealing glass to stabilize the electronic circuit; and

(b) trimming the electronic circuitry after baking.

7. The method as claimed in claim 5 wherein the covering is accomplished by screening the vitreous sealing glass, binder, and liquifier onto the electronic circuit and substrate.

8. The invention as claimed in claim 5 wherein said disposing step disposes a plurality of electronic circuits on the substrate and including the steps of:

(a) scribing said substrate into a plurality of individual substrates containing an electronic circuit; and

(b) breaking the substrate into a plurality of devices.

9. A method of making a hermetically sealed device comprising the steps of:

(a) disposing an electronic circuit on an alumina substrate;

(b) mixing a uniformly dispersed mixture of silica, soda ash, and lime combined with the oxide of boron with a binder of hydroxypropyl cellulose and liquifier pine oil to form a vitreous sealing glass mixture;

(c) screening an annular portion of a vitreous glass covering with the vitreous sealing glass mixture through a mesh screen, said annular portion sized to be larger than said electronic circuit;

(d) firing the vitreous glass covering for at least one hour at a temperature of not more than 420°

C. to decompose the liquifier and binder of the glass sealing mixture to leave the vitreous sealing glass on said vitreous glass covering;

(e) placing the vitreous glass covering on said substrate with said vitreous sealing glass surrounding said electronic circuit and abutting said substrate; and

(f) fusing said vitreous sealing glass for at least 1/2 hour at a temperature between 370°

C. and 375°

C. at 200 psi pressure to form a hermetic seal of vitreous glass fused to said vitreous glass covering and to said substrate.

10. The method as claimed in claim 9 including the steps of:

(a) baking the electronic circuit and substrate between 100°

C. and 200°

C. after fusing the vitreous sealing glass to stabilize the electronic circuit; and

(b) laser trimming the electronic circuitry after baking.

11. The method as claimed in claim 9 wherein the covering is accomplished by screening the vitreous sealing glass in ratios ranging from 2:

1 to 9;

1 glass to binder/liquifier parts by total weight wherein said binder and liquifier is in ratios ranging from 1;

25 to 1;

250 binder to liquifier parts by total weight onto the electronic circuit and substrate through a screen of about 165 mesh to a thickness of 6 mils.

12. The invention as claimed in claim 9 wherein said disposing step disposes a plurality of electronic circuits on the substrate and said screening step screens a plurality of annular portions of the vitreous sealing glass mixture on the vitreous glass covering including the steps of:

(a) scribing the substrate into a plurality of individual substrates containing a single electronic circuit;

(b) breaking the substrate into a plurality of individual substrates;

(c) scribing the vitreous glass covering into a plurality of individual coverings sized to cover a single electronic circuit;

(d) breaking the vitreous glass covering into a plurality of individual coverings;

(e) placing the individual coverings on the individual substrates; and

(f) applying pressure to the individual coverings and the individual substrates prior to said fusing step.

13. A method of making a hermetically sealed device comprising the steps of:

(a) disposing an electronic circuit on a substrate;

(b) mixing a uniformly dispersed mixture of silica, soda ash, and lime combined with metal oxides from the group consisting of boron, calcium, lead, lithium, and cerium with a binder of hydroxyalkyl cellulose, wherein the alkyl group contains from one to three carbon atoms, and liquifier from the group consisting of pine oil and dihydric alchol to form a sealing glass mixture;

(c) covering an annular portion of a vitreous glass covering with the sealing glass mixture, said annular portion sized to be larger than said electronic circuit;

(d) firing the vitreous glass covering for at least one hour at a temperature of not more than 420°

C. to decompose the liquifier and binder of the glass sealing mixture to leave the vitreous sealing glass on said vitreous glass covering;

(e) placing the vitreous glass covering on said substrate with said vitreous glass surrounding said electronic circuit and abutting said substrate; and

(f) fusing said vitreous sealing glass below 380°

C. at above 100 psi for at least 5 minutes to form a hermetic seal of vitreous glass fused to said vitreous glass covering and to said substrate.

14. The method as claimed in claim 13 including the steps of:

(a) baking the electronic circuit and substrate between 100°

C. to 200°

C. after fusing the vitreous sealing glass to stabilize the electronic circuit; and

(b) laser trimming the electronic circuitry after baking.

15. The method as claimed in claim 13 wherein the covering is accomplished by screening the vitreous sealing glass, binder, and liquifier around the electronic circuit and onto the substrate.

16. The invention as claimed in claim 13 wherein said disposing step disposes a plurality of electronic circuits on the substrate and including the steps of:

(a) scribing said substrate into a plurality of individual substrates containing a single electronic circuit; and

(b) breaking the substrate into a plurality of devices prior to fusing.

17. A method of making a hermetically sealed device comprising the steps of:

providing a substrate;

disposing electronic circuitry on said substrate;

fusing a covering to said substrate with a vitreous sealing glass at a sealing temperature below about 380°

C. to establish a hermetic seal about said electronic circuitry, wherein said fusing step occurs at an applied pressure above about 100 psi.

18. The method of claim 17, wherein there is disposed on said substrate a passive circuitry element as said electronic circuitry.

19. The method of claim 18, wherein said electronic circuitry has package leads disposed directly on and supported by the substrate.

20. The method of claim 19, wherein said passive circuitry element is a resistive element.

21. The method of claim 17, wherein said electronic circuitry has package leads disposed directly on and supported by the substrate.

22. The method of claim 21, wherein there is a single layer of said sealing glass disposed on said substrate to cover the package leads and adjacent surface areas of the substrate.

23. The method of claim 17, wherein the vitreous sealing glass establishing said hermetic seal is disposed to have rounded corner edges in contact with the substrate.

24. A method of making a hermetically sealed device comprising the steps of:

providing a substrate;

disposing a thin film resistive electronic circuitry element on said substrate; and

fusing a covering to said substrate with a vitreous sealing glass at a sealing temperature below about 380°

C. at a pressure above about 100 psi to establish a hermetic seal about said thin film resistive element.

25. The method of claim 24, wherein said covering is a vitreous glass covering.

26. The method of claim 24, wherein said vitreous sealing glass has rounded corner edges in contact with said substrate and covering.