Thin film Schottky barrier device
First Claim
1. An active matrix element of a pair of thin-film diodes connected in series and back-to-back with each other, wherein said pair of thin-film diodes comprises two first electrode layers formed on a substrate and spaced apart from each other, semiconductor layers respectively formed on said first electrode layers, and a second electrode layer integrally formed on said semiconductor layers and constituting Schottky barriers with said semiconductor layers and said second electrode layer.
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Abstract
Disclosed are an active matrix element and a method of manufacturing the same, wherein two first electrode layers are formed on a substrate, semiconductor thin films are formed on regions including the two first electrode layers, respectively, a second electrode layer is formed on the semiconductor thin layers and constituting Schottky barriers between the semiconductor layers and the second electrode layer.
41 Citations
29 Claims
- 1. An active matrix element of a pair of thin-film diodes connected in series and back-to-back with each other, wherein said pair of thin-film diodes comprises two first electrode layers formed on a substrate and spaced apart from each other, semiconductor layers respectively formed on said first electrode layers, and a second electrode layer integrally formed on said semiconductor layers and constituting Schottky barriers with said semiconductor layers and said second electrode layer.
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20. An active matrix element for use in a liquid crystal cell of a pair of thin-film diodes connected in series and back-to-back with each other, the liquid crystal cell including an upper substrate, a counter electrode layer disposed on said upper substrate, a pixel electrode layer disposed on said lower substrate opposed to said counter electrode, first and second alignment layers disposed on said upper and lower substrates, respectively, and a liquid crystal layer disposed between said first and second alignment layers, said active matrix element comprising:
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two first electrode layers disposed on said lower substrate, said two first electrode layers being spaced from each other, one of said first electrode layers being in ohmic contact with said pixel electrode layer; two semiconductor layers disposed on said two first electrode layers, said two semiconductor layers being spaced from each other; and a second electrode layer disposed on said two semiconductor layers to form a Shottky barrier between said second electrode and said two semiconductor layers, said second electrode layer being continuous.
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21. An active matrix element for use in a liquid crystal cell of a pair of thin-film diodes connected in series and back-to-back with each other, the liquid crystal cell including an upper substrate, a lower substrate spaced from and parallel to the upper substrate, a pixel electrode layer disposed on the lower substrate opposed to the counter electrode, first and second alignment layers disposed on the upper and lower substrates, respectively, and a liquid crystal layer disposed between the first and second alignment layers, the active matrix element comprising:
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two first electrode layers disposed on said lower substrate, said two first electrode layers being spaced from each other, one of said two first electrode layers being formed integrally with each pixel electrode layer; two semiconductor layers disposed on said two first electrode layers, said two semiconductor layers being spaced from each other; and a second electrode layer disposed on said two semiconductor layers to form a Shottky barrier between said second electrode and said two semiconductor layers, said second electrode layer being continuous.
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22. An active matrix element for use in a liquid crystal cell of a pair of thin-film diodes connected in series and back-to-back with each other, the liquid crystal cell including an upper substrate, a lower substrate spaced from and parallel to the upper substrate, a counter electrode layer disposed on the upper substrate, a pixel electrode layer disposed on the lower substrate opposed to the counter electrode, first and second alignment layers disposed on the upper and lower substrates, respectively, and a liquid crystal layer disposed between the first and second alignment layers, the active matrix element comprising;
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two first electrode layers disposed on said lower substrate, said two first electrode layers being spaced from each other, one of said two first electrode layers being formed integrally with each pixel electrode layer; a continuous semiconductor layer disposed on said two first electrode; and a second electrode layer disposed on said semiconductor layer to form a Shottky barrier between said second electrode and said continuous semiconductor layer, said second electrode layer being continuous. - View Dependent Claims (23, 29)
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24. An active matrix element for use in a liquid crystal cell of a pair of thin-film diodes connected in series and back-to-back with each other, the liquid crystal cell including an upper substrate, a lower substrate spaced from and parallel to the upper substrate, a counter electrode layer disposed on the upper substrate, a pixel electrode layer disposed on the lower substrate opposed to the counter electrode, first and second alignment layers disposed on the upper and lower substrates, respectively, and a liquid crystal layer disposed between the first and second alignment layers, the active matrix element comprising:
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two first electrode layers disposed on said lower substrate, said two first electrode layers being spaced from each other, one of said two first electrode layers being in ohmic contact with said pixel electrode layer, each of said two first electrode layers including a lower layer portion adjacent said substrate and an upper layer portion disposed on said lower layer portion; a continuous semiconductor layer disposed on said two first electrode layer; and a second electrode layer disposed on said semiconductor layer to from a Shottky barrier between said second electrode and said continuous semiconductor layers, said second electrode layer being continuous.
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25. An active matrix element for use in a liquid crystal cell of a pair of thin-film diodes connected in series and back-to-back with each, the liquid crystal cell including an upper substrate, a lower substrate spaced from and parallel to the upper substrate, a counter electrode layer disposed on the upper substrate, a pixel electrode layer disposed on the lower substrate opposed to the counter electrode, first and second alignment layers disposed on the upper and lower substrates, respectively, and a liquid crystal layer disposed between the first and second alignment layers, the active matrix element comprising:
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two first electrode layers disposed on said lower substrate, said first electrode layers being spaced from each other, each of said two first electrode layers including an upper layer portion, an intermediate layer portion and a lower layer portion said upper layer portion including an opaque layer of highly doped n-type amorphous silicon, said intermediate layer portion including chromium opaque layers and said lower layer portions including an inidium-tin oxide transparent material, one of said lower layer portions of said two first electrode layers being formed integral with said pixel electrode layer; a continuous semiconductor disposed on said two first electrode layers; and a second electrode layer disposed on said semiconductor layers to from a Shottky barrier between said second electrode layer and said continuous semiconductor layer, said second electrode layer being continuous.
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26. An active matrix element for use in a liquid crystal cell of a pair of thin-film diodes connected in series and back-to-back with each other, the liquid crystal cell including an upper substrate, a lower substrate spaced from and parallel to the upper substrate, a counter electrode layer disposed on the upper substrate, a pixel electrode layer disposed on the lower substrate opposed to the counter electrode, first and second alignment layers disposed on the upper and lower substrates, respectively, and a liquid crystal layer disposed between the first and second alignment layers, the active matrix element comprising:
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a scanning electrode lead layer disposed on said substrate; a pixel electrode lead layer disposed on said substrate and spaced from said scanning electrode lead layer, said pixel electrode lead layer being formed integrally with said pixel electrode; a first metal layer formed on said scanning electrode lead layer; a second metal layer formed on said pixel electrode lead layer; a continuous semiconductor layer formed on said scanning electrode lead layer and said pixel electrode lead layer; and a second electrode layer formed on said semiconductor layer to form a Shottky barrier between said second electrode layer and said continuous semiconductor layer, said second electrode layer being continuous.
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27. An active matrix element for use in a liquid crystal cell of a pair of thin-film diodes connected in series and back-to-back with each other, the liquid crystal cell including an upper substrate, a lower substrate spaced from and parallel to the upper substrate, a counter electrode layer disposed on the upper substrate, a pixel electrode layer disposed on the lower substrate opposed to the counter electrode, first and second alignment layers disposed on the upper and lower substrates, respectively, and a liquid crystal layer disposed between the first and second alignment layers, the active matrix element comprising:
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a scanning electrode lead layer disposed on said substrate; a pixel electrode lead layer disposed on said substrate and spaced from said scanning electrode lead layer, said pixel electrode lead layer being formed integrally with said pixel electrode; a continuous semiconductor layer for encapsulating said scanning electrode lead layer and said pixel electrode lead layer; and a second electrode layer formed on said semiconductor layer to form a Shottky barrier between said second electrode layer and said continuous semiconductor layer, said second electrode layer being continuous.
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28. An active matrix element for use in a liquid crystal cell of a pair of thin-film diodes connected in series and back-to-back with each other, the liquid crystal cell including an upper substrate, a lower substrate spaced from and parallel to the upper substrate, a counter electrode layer disposed on the upper substrate, a pixel electrode layer disposed on the lower substrate opposed to the counter electrode, first and second alignment layers disposed on the upper and lower substrates, respectively, and a liquid crystal layer disposed between the first and second alignment layers, the active matrix element comprising:
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two first electrode layers disposed on said lower substrate, said two first electrode layers being spaced from each other, one of said two first electrode layers being in ohmic contact with said pixel electrode layer; a continuous semiconductor layer disposed on said two first electrode layers; and a second electrode layer disposed on said continuous semiconductor layer to form a Shottky barrier between said second electrode and said continuous semiconductor layer, said second electrode layer being continuous.
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Specification