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Capacitor array sensors for determining conformity to surface shape

  • US 4,908,574 A
  • Filed: 07/29/1988
  • Issued: 03/13/1990
  • Est. Priority Date: 09/03/1986
  • Status: Expired due to Term
First Claim
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1. A capacitance sensor array for sensing and quantifying conformity of a workpiece surface contour to design requirements comprising a plurality of capacitor elements formed in a three-dimensional array of contour topology conforming to the topology of the design requirements of said workpiece, means for actively connecting each of said capacitor elements and said workpiece to one of a plurality of corresponding oscillator circuits while said capacitor elements are closely spaced from said workpiece so that the oscillation frequency of each of said circuits is a function of the capacitance between each said capacitor element and said workpiece, and means for generating an output from said sensor which is a function of the conformity of the contour topology of said workpiece to the contour topology of said array of capacitor elements determined by response of the said plurality of oscillator circuits.

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