Electrochemical sensor facilitating repeated measurement
First Claim
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1. An electrochemical sensor comprising:
- a substrate having an insulative surface;
FET for measurement formed on said substrate and having a source, a drain, a channel portion and an enzyme-immobilized film disposed above said channel portion;
a reference electrode formed adjacently to said FET for measurement on said substrate; and
a hydrous polymer continuously covering said channel portion of said FET for measurement and said reference electrode.
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Abstract
An electrochemical sensor wherein a FET for measuring chemical substances and a reference electrode are covered with a continuous hydrous polymer on an insulating substrate, and on the hydrous polymer, an enzyme-immobilized film is formed in a region positioned on a channel part of FET for measuring chemical substances.
19 Citations
8 Claims
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1. An electrochemical sensor comprising:
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a substrate having an insulative surface; FET for measurement formed on said substrate and having a source, a drain, a channel portion and an enzyme-immobilized film disposed above said channel portion; a reference electrode formed adjacently to said FET for measurement on said substrate; and a hydrous polymer continuously covering said channel portion of said FET for measurement and said reference electrode. - View Dependent Claims (2, 3, 4, 5)
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6. An electrochemical sensor having:
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an insulative substrate; a reference electrode formed on said insulative substrate; first and second semiconductor layers formed adjacently to said reference electrode on said insulative substrate; source and drain electrodes formed on the respective opposite sides of said first and second semiconductor layers; an insulating film covering the respective surfaces of said first and second semiconductor layers; a hydrous polymer covering said insulating film and said reference electrode commonly; and an enzyme-immobilized film formed selectively on said hydrous polymer on said first semiconductor layer. - View Dependent Claims (7, 8)
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Specification