Optically phased-locked speckle pattern interferometer

• US 4,913,547 A
• Filed: 01/29/1988
• Issued: 04/03/1990
• Est. Priority Date: 01/29/1988
• Status: Expired due to Fees

• Current Assignee: Moran, Steven E.
• Original Assignee: Moran, Steven E.
• Inventors: Moran, Steven E.
• Primary Examiner(s): McGraw, Vincent P.
• Assistant Examiner(s): TURNER, SAMUEL A
• Application Number:
  US07/150,380
• Time in Patent Office: 795 Days
• Field of Search: 356/349, 356/360, 73/655, 73/656
• US Class Current: 356/489
• CPC Class Codes: G01B 9/02067 by electronic control systems, i.e. using feedback acting on optics or light
• CPC Class Codes: G01B 9/02096 detecting a contour or curvature

Abstract

An optically phase-locked electronic speckle pattern interferometer mixes a local oscillator beam with a beam reflected from a target surface to create a speckle pattern at each of two separate image planes. The speckle pattern includes speckles whose intensities vary as a result of time-varying Doppler shifting of the reflected beam by movement or deformation of the target surface. The local oscillator beam is phase-locked to the Doppler signature of a lock-point speckle on one image plane. The phase-locking of the local oscillator beam to Doppler information of interest enables the interferometer to coherently detect speckle in the image plane sharing frequency, amplitude, and phase characteristics with the lock-point speckle, which supports the efficient processing of images obtained from the other image plane. The processing produces a contoured image of the target surface, with demarcation between coherently and non-coherently detected speckle.

Claims

1. A method for phase-locked optical interferometric inspection of a surface, comprising the steps of:

producing a first beam of energy by reflection from a target surface;

producing a second beam of energy having signal characteristics, said signal characteristics including frequency and phase;

mixing said first and second beams to produce a first interference pattern at a first image plane and a second interference pattern at a second image plane;

from a portion of said second interference pattern, deriving a control signal with frequency and phase characteristics representing a modulation of said first beam;

in response to said control signal, changing a signal characteristic of said second beam in synchronism with said modulation; and

generating successive images from said first interference pattern and combining said successive images to produce a contoured target surface image.

2. The method of claim 1 wherein said energy is light and said modulation is phase modulation of said first beam, and wherein said step of changing a signal characteristic includes modulating the frequency of said second beam substantially in synchronism with said phase modulation.

3. The method of claim 2 wherein said second interference pattern is a pattern of speckles and said step of mixing includes mixing said first and second beams to produce a first interference pattern corresponding to a respective speckle in said second interference pattern.

4. The method of claim 1 wherein said second interference pattern is a pattern of speckles and said step of mixing and producing includes producing a first interference pattern corresponding to a first respective speckle in said second interference pattern.

5. The method of claim 4 further including the step of changing said first interference pattern in response to a second respective speckle in said first interference pattern.

6. The method of claim 1 wherein said energy is light energy, and:

said step of producing said second beam includes producing a first local oscillator field beam and a second local oscillator field beam, said first and second local oscillator field beams including coherent, orthogonally distinct optical fields, and combining said first and second local oscillator field beams to produce said second beam, said second beam including orthogonally distinct first and second local oscillator fields; and

said step of mixing includes mixing said first beam with said first local oscillator field to produce said first interference pattern, and mixing said first beam and said second local oscillator field to produce said second interference pattern.

7. The method of claim 6 wherein said step of changing a signal characteristic includes changing the frequencies of said first and second local oscillator field beams.

8. The method of claim 7 wherein said step of changing a signal characteristic includes substantially identically changing the frequencies of said first and second local oscillator field beams within a predetermined range in response to said control signal, and downshifting the frequency of said first local oscillator field beam by a predetermined amount.

9. The method of claim 8 further including applying said control signal to a bandpass filter having a passband substantially equal to said predetermined range.

10. The method of claim 9 further including, after said applying step, the steps of:

generating a mixing signal having a frequency characteristic corresponding to the predetermined amount by which said first local oscillator field beam is downshifted;

mixing said mixing signal with said control signal to produce mixing results in said control signals; and

, then,

applying said control signal to a low pass filter.

11. The method of claim 1 wherein said energy is light energy and said step of generating includes producing said successive images at a predetermined frame rate and subtracting adjacent images produced at said frame rate to produce said contoured target surface image, said method further including the step of selectively alternating the phase of said control signal between 0°

and 180°

at said frame rate.

12. The method of claim 1 wherein said energy is light energy, and:

said step of producing said second beam includes producing a second coherent beam of light having first and second, orthogonally distinct, local oscillator fields;

said step of deriving a control signal includes frequency synchronization of said control signal with said modulation and, then, selectively inverting the phase of said control signal;

said step of changing a signal characteristic includes selectively inverting the phase of said first local oscillator field in synchronism with the phase inversion of said control signal; and

said step of mixing includes mixing said first local oscillator field with said first coherent light beam to produce said first interference pattern and mixing said second local oscillator field with said first coherent light beam to produce said second interference pattern.

13. The method of claim 12 further including upshifting the frequencies of said first and second local oscillator fields by a predetermined frequency and, prior to said phase synchronization of said control signal, subjecting said control signal further to band-pass filtration in a frequency band including said predetermined frequency.

14. The method of claim 13 wherein said step of generating includes producing said successive frames at a predetermined frame rate and subtracting adjacent images produced at said frame rate, and said step of selectively inverting the phase of said control signal further includes inverting the phase of said control signal at said frame rate.

15. An optical, phase-locked speckle pattern interferometer, comprising:

an image processor with a display, responsive to a succession of interference image signals for generating a sequence of interference images, and for combining successive interference images for production of a contoured target surface image on said display;

an optical circuit for receiving a first beam of light by reflection from a target surface and for generating a second beam of light having signal characteristics of phase and frequency, and for mixing said first and second beams to produce respective first and second interference patterns;

a first imaging apparatus with a first imaging plane for receiving said first interference pattern at said first imaging plane to generate said succession of interference image signals, each of said interference signals corresponding to a speckle pattern image of a target surface;

a second imaging apparatus with a second imaging plane for receiving said second interference pattern at said second imaging plane to generate from said second interference pattern a control signal with frequency and phase characteristics representing speckle modulation of said first beam by said target surface; and

an electro-optical locking circuit connected to said optical circuit and to said second imaging apparatus for changing a signal characteristic of said second beam in synchronism with said modulation, said signal characteristic changing being in response to said control signal.

16. The optical, phase-locked speckle pattern interferometer of claim 15 wherein said optical circuit includes:

a source of coherent light for producing said second beam and a source beam of coherent light for projection against a target surface; and

an optical mixing apparatus for combining said second beam with a beam of light resulting from the reflection of said source beam by a target surface to produce first and second interference fields.

17. The optical, phase-locked speckle pattern interferometer of claim 15 wherein said second imaging apparatus includes:

photodetection means for selectably detecting Doppler signature modulation of a respective speckle in said speckle pattern and for producing said control signal with frequency characteristics reflecting said Doppler signature modulation.

18. The optical, phase-locked speckle pattern interferometer of claim 17 wherein said second beam includes first and second local oscillator fields and:

said electro-optical locking circuit includes first modulation means responsive to said control signal for modulating the frequency of said first local oscillator field in synchronism with said Doppler signature modulation and for downshifting the frequency of said first local oscillator field by a fixed amount;

said electro-optical locking circuit includes second modulation means responsive to said control signal for modulating the frequency of said second local oscillator field in synchronism with said Doppler signature modulation; and

,

said optical circuit includes means for mixing said first beam with said first and second local oscillator fields and for directing said first beam, mixed with said first local oscillator field to said first image plane and directing said first beam, mixed with said second local oscillator field to said second image plane.

19. The optical, phase-locked speckle pattern interferometer of claim 18 wherein said first imaging apparatus produces said succession at a predetermined display rate and said electro-optical locking circuit includes means for inverting the phase of said control signal at said display rate.

20. The optical, phase-locked speckle pattern interferometer of claim 19 wherein said image processor combines said successive interference images by subtraction, said subtraction being followed by an absolute value operation.

21. The optical, phase-locked speckle pattern interferometer of claim 19 wherein said electro-optical locking circuit further includes:

a bandpass filter connected to said second imaging apparatus for receiving said control signal from said second image apparatus and subjecting said control signal to band pass filtration;

a circuit for producing a mixing signal with a frequency characteristic reflecting said fixed amount;

a mixer connected to said band pass filter and to said circuit for mixing said control signal with said mixing signal to produce mixing results in said control signal; and

a low-pass filter connected to said mixer and to said first and second modulation means for subjecting said control signal mixing results to low-pass filtration, and for providing said control signal with low-pass filtered mixing results to said first and second modulation means.

22. The optical, phase-locked speckle-pattern interferometer of claim 17 wherein said second beam includes first and second local oscillator fields, said first imaging apparatus produces said succession at a predetermined display rate, and:

said electro-optical locking circuit includes;

a phase-locked loop connected to said second imaging apparatus for producing a first modified control signal with a frequency synchronously locked to said Doppler modulation; and

phase inversion means responsive to said first modified control signal and to said succession for selectively inverting the phase of said first local oscillator field in synchronism with the phase of said first modified control signal and with said predetermined display rate; and

said optical circuit includes means for mixing said first beam with said first and second local oscillator fields and for providing said first beam mixed with said first local oscillator field to said first image plane and providing said first beam mixed with said second local oscillator field to said second image plane.

23. The optical, phase-locked speckle pattern interferometer of claim 22 wherein said phase inversion means includes means for selectively inverting the phase of said first modified control signal to produce a second modified control signal, and said electro-optical modulator includes optical phase modulating means responsive to said second modified control signal for modulating the phase of said first local oscillator field in synchronism with the phase of said second modified control signal.

24. The optical phase-locked speckle pattern interferometer of claim 23 wherein said image processor combines said successive interference images by subtraction.

25. The optical, phase-locked speckle pattern interferometer of claim 17, further including:

field means in said electro-optical locking circuit for generating a local oscillator field in said second beam and for modulating the frequency of said local oscillator field in synchronism with said Doppler signature modulation;

amplitude scaling means connected to said field means for adjustably changing the amplitude of said local oscillator field; and

means in said optical circuit for mixing said first beam with said second beam and for directing said first beam, mixed with said local oscillator field, to said first image plane.

26. The optical, phase-locked speckle pattern interferometer of claim 17, further including:

field means in said electro-optical locking circuit for generating a local oscillator field in said second beam and for modulating the frequency of said local oscillator field in synchronism with said Doppler signature modulation;

phase adjustment means connected to said field means for adjustably changing the phase of said local oscillator field; and

means in said optical circuit for mixing said first beam with said second beam and for directing said first beam, mixed with said local oscillator field, to said first imaging plane.

27. The optical, phase-locked speckle pattern interferometer of claim 26, further including:

amplitude scaling means connected to said field means for adjustably changing the amplitude of said local oscillator field.