Grooved DMOS process with varying gate dielectric thickness

• US 4,914,058 A
• Filed: 12/29/1987
• Issued: 04/03/1990
• Est. Priority Date: 12/29/1987
• Status: Expired due to Term

• Current Assignee: Siliconix Incorporated 2201 Laurelwood RD Santa Clara CA
• Original Assignee: Siliconix Incorporated (Vishay Intertechnology Incorporated)
• Inventors: Blanchard, Richard A.
• Primary Examiner(s): Hearn, Brian E.
• Assistant Examiner(s): QUACH, TUAN N
• Application Number:
  US07/138,999
• Time in Patent Office: 826 Days
• Field of Search: 437/203, 437/79, 437/41, 437/913, 437/44, 437/45, 437/38, 437/66, 437/239, 148/DIG. 167, 148/DIG. 168, 148/DIG. 50, 357/23.4
• US Class Current: 438/270
• CPC Class Codes: H01L 29/0696 of cellular field-effect devices, e.g. multicellular DMOS transistors or IGBTs
• CPC Class Codes: H01L 29/42312 Gate electrodes for field effect devices
• CPC Class Codes: H01L 29/4236 within a trench, e.g. trench gate electrode, groove gate electrode
• CPC Class Codes: H01L 29/42368 the thickness being non-uniform
• CPC Class Codes: H01L 29/7397 and a gate structure lying on a slanted or vertical surface or formed in a groove, e.g. trench gate IGBT
• CPC Class Codes: H01L 29/749 with turn-on by field effect
• CPC Class Codes: H01L 29/7813 with trench gate electrode, e.g. UMOS transistors trench gate electrodes per se H01L29/4236
• CPC Class Codes: Y10S 148/05 Etch and refill
• CPC Class Codes: Y10S 148/126 Power FETs
• CPC Class Codes: Y10S 148/168 V-Grooves

Abstract

Disclosed is a process for making a DMOS, including lining a groove with a dielectric material to form an inner groove having sidewalls extending through the bottom of the first groove, and lining the inner groove with a dielectric material to obtain increased thickness of the gate dielectric on the sidewalls of the inner groove.

Claims

1. A method of making a semiconductor device comprising the steps of:

providing a first region of semiconductor material having a first conductivity type;

forming a second region of semiconductor material having a second conductivity type, overlying said first region;

forming a first groove, said first groove extending through said second and third regions and into said first region so that a first portion of said third region and a first portion of said second region lie on at least one side of said first groove;

lining said first groove with a dielectric material thereby forming a second, inner groove, having a first portion of said dielectric material of a predetermined thickness on a sidewall of said first groove thicker than a second portion thereof of a predetermined thickness on said sidewall of said first groove, with the first portion thereof closer to the depth of the first groove than the second portion thereof;

filling the depth of said second, inner groove with a conductive material; and

forming an insulating layer over the device resulting from the preceding steps.

2. The method of claim 1 further comprising the steps of:

forming a mask on a first portion of said conductive material in said second, inner groove, a second portion of said conductive material not being covered by said mask;

removing part of said second portion of said conductive material, the remaining conductive material in said second, inner groove serving as a gate; and

forming an electrically conductive layer for electrically contacting said first portion of said conductive material.

3. The method of claim 1 further comprising the step of removing a portion of said conductive material in said second, inner groove so that a top portion of said second, inner groove adjacent to said dielectric material is not filled with semiconductive material, said step of forming an insulating layer comprising the step of forming insulating material in said top portion of said second, inner groove.

5. The method of claim 1 wherein said step of filling the bottom portion comprises the step of forming said conductive material in said second inner groove and etching a portion of said conductive material in said second, inner groove.

6. The method of claim 1, wherein said first groove is formed so as to be rectangular in cross section, and said second groove is formed so that the sidewalls of said second groove are parallel to the sidewalls of said first groove.

7. The method of claim 1, wherein said first portion of said dielectric material has a thickness at least 500Å

greater than the thickness of said second portion of said dielectric material.

8. Method of claim 1, wherein at each step the structure with the exception of the first and second grooves has a flat surface for the carrying out of the succeeding step.

4. The method of claim 10 wherein said step of filling the bottom portion comprises the steps of forming said conductive material in said second, inner groove and on the surface of said third region and then etching said conductive material so that said conductive material on the surface of said third region adjacent to said second, inner groove is removed.

9. A method of making a semiconductor device comprising the steps of:

providing a first region of semiconductor material having a first conductivity type;

forming a second region of semiconductor material having a second conductivity type, opposite the first conductivity type, overlying said first region;

forming a third region of said first conductivity type overlying a portion of said second region;

forming a first groove having sidewalls and a bottom, said first groove extending through said second and third regions so that a first portion of said third region and a first portion of said second region lie n at least one side of said first groove;

lining said first groove with a dielectric material having a uniform thickness on said sidewalls of said first groove;

forming a second groove having a sidewalls extending through the bottom of said first groove, said second groove extending into said first region;

lining said second groove with a dielectric material having a uniform thickness on the sidewalls of said second groove;

whereby said dielectric material on said sidewalls of said second groove is thicker than said dielectric material on said sidewalls of said first groove;

filling said first and second grooves with a conductive material; and

forming an insulating layer over the device resulting from the preceding steps;

and wherein at each step the structure with the exception of the first and second grooves has a flat surface for carrying out of the succeeding step.