Target source for ion beam sputter deposition

• US 4,915,810 A
• Filed: 04/25/1988
• Issued: 04/10/1990
• Est. Priority Date: 04/25/1988
• Status: Expired due to Term

• Current Assignee: Unisys Corporation
• Original Assignee: Unisys Corporation
• Inventors: Gillin, John F., Kestigian, Michael
• Primary Examiner(s): Nguyen, Nam X.
• Application Number:
  US07/185,669
• Time in Patent Office: 715 Days
• Field of Search: 204/192.1, 204/192.11, 204/192.12, 204/298, 204/298 BD, 204/298 TS, 204/298 TC
• US Class Current: 204/298.04
• CPC Class Codes: C23C 14/08 Oxides C23C14/10 takes precedence
• CPC Class Codes: C23C 14/3414 Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy

Abstract

A target for use in ion beam sputtering is arranged for varying the chemical composition of the deposited film without requiring substantial fabrication of a new target. The target is comprised of a disc having therein a plurality of openings which extend only part way through the disc. The target is fabricated from a predetermined chemical composition similar to that desired to be deposited. The openings within the target are filled with plugs of a varied chemical composition. By choice of the number of plugs and their composition, as well as the size of the plug, the structure of the film may readily be varied to a small degree or a large degree. The invention is applicable to all methods of deposition that use a target as a source of material for the film.

Claims

1. A sputtering apparatus comprising:

a source of plasma disposed within a chamber and having a predetermined pattern of ion beam intensity,

an intermediate target angularly disposed in relationship with said source of plasma and in angular relationship with a substrate, said target comprising a matrix of material to be deposited upon said substrate and including a plurality of bore,, said bores disposed in a predetermined radial pattern comprising an axial bore of a first predetermined diameter, a first plurality of radially disposed bores of a second predetermined diameter surrounding said axial bore, a second plurality of radially disposed bores of said first predetermined diameter surrounding said first plurality, and a third plurality of radially disposed bores surrounding said second plurality and of diameters alternating between said first predetermined diameter and said second predetermined diameter, each of said bores having an aspect ratio of between 0.1875 and 0.375 and a predetermined depth of one-half the thickness of said target, and

a plurality of plugs of predetermined composition, adapted for a press fit and disposed within said bores,

wherein ions are made to collide against said target so as to liberate particles of materials of which said target and said plugs are made, thereby depositing a thin homogeneous film of said particles in a further predetermined composition on said substrate.

2. A sputtering apparatus as set forth in claim 1, wherein said target has a thickness between 1/8 to 1/4 inch, and said first predetermined diameter exceeds said second predetermined diameter by a ratio of 2:

1.

3. A sputtering apparatus as set forth in claim 2, wherein said substrate is disposed in face-to-face relationship with said target.

4. A sputtering apparatus set forth in claim 2, wherein said plugs are comprised of a rare earth composition.

5. A sputtering apparatus as set forth in claim 4, wherein said plugs and said bores have a circular cross-section.

6. A sputtering apparatus as set forth in claim 4, wherein said plugs have a rectangular cross-section.

7. A sputtering apparatus as set forth in claim 4, wherein said matrix is a material selected from the group of rare earth metals including yttrium iron garnet and lutetium iron garnet and said substrate is comprised of gadolinium garnet.

8. A sputtering apparatus as set forth in claim 7, wherein said plugs are selected from the group of materials including BiFeO₃, Bi₂ O₃, and Bi₃ Fe₅ O₁₂.

9. A sputtering apparatus as set forth in claim 1, wherein said matrix is comprised of a composite of chemical elements.