Near field scanning optical microscopy

• US 4,917,462 A
• Filed: 08/16/1989
• Issued: 04/17/1990
• Est. Priority Date: 06/15/1988
• Status: Expired due to Term

• Current Assignee: Cornell Research Foundation Incorporated (Cornell University)
• Original Assignee: Cornell Research Foundation Incorporated (Cornell University)
• Inventors: Harootunian, Alec, Isaacson, Michael, Betzig, R. Eric, Lewis, Aaron
• Primary Examiner(s): Bovernick, Rodney B.
• Assistant Examiner(s): Kachmarik, Ronald M.
• Application Number:
  US07/394,304
• Time in Patent Office: 244 Days
• Field of Search: 350/1.1, 350/162.11, 350/319, 350/507, 250/216
• US Class Current: 359/368
• CPC Class Codes: G01Q 60/22 Probes, their manufacture, or their related instrumentation, e.g. holders
• CPC Class Codes: G02B 6/00 Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings

Abstract

An aperture probe in the form of a tapered metal-coated glass pipette having a thin tip provides near-field access to a sample for near-field microscopy. The pipette is formed from a glass tube drawn down to a fine tip, and then coated, as by evaporation, by a metallic layer. The central opening of the tube is drawn down to a submicron diameter, and the metal coating is formed with an aperture at that opening. Aperture diameters down to 500 Angstroms diameter are provided. Also disclosed is a microscope utilizing the pipette aperture for scanning near-field imaging of samples.

Claims

1. Apparatus for near-field microscopy, comprising:

a tapered, generally tubular pipette having an axial central opening, an upper body portion and a lower tip portion, a tapered glass wall coated with an opaque, metallic layer, and a submicron aperture at the end of said tip portion;

means for mounting said pipette for controlled axial motion, in a z direction;

stage means for receiving a sample to be observed;

means for moving said stage means in an x-y plane with respect to said aperture; and

means for determining the proximity of said aperture to the surface of a sample, and for activating said means for mounting said pipette to move said aperture with respect to a sample to position the surface of the sample within the near-field region of said aperture.

2. The apparatus of claim 12, further including vibration-absorbing means for supporting said stage means and said means for mounting said pipette.

3. The apparatus of claim 2, wherein said vibration-absorbing means includes a support plate carried by pneumatic support means for absorbing vibrations having a frequency above about 5 Hz.

4. The apparatus of claim 12, wherein said means for mounting said pipette includes:

a housing; and

positioning means mounted on said housing and supporting said pipette, said positioning means being responsive to control signals for incrementally moving said pipette in said z direction in steps less than the extent of the near-field region of said aperture.

5. The apparatus of claim 4, wherein said positioning means comprises a piezoelectric positioner for moving said aperture in incremental steps of about 20 Angstroms.

6. The apparatus of claim 5, wherein said means for moving said stage means includes a coarse x-y positioner for locating a sample with respect to said aperture, and a fine x-y positioner for incrementally scanning a sample with respect to said aperture.

7. The apparatus of claim 6, wherein said fine x-y positioner includes a piezoelectric positioning means for moving said stage means in incremental steps of about 20 Angstroms in an x direction and a y direction.

8. The apparatus of claim 4, further including optical means for visually monitoring the position of said pipette with respect to a sample.

9. The apparatus of claim 1, further including means for directing intense visible light onto a sample on said stage means, and optical means for visually monitoring the position of said pipette with respect to such a sample.

10. The apparatus of claim 9, wherein said means for directing light onto a sample includes a source of light, an objective lens located to direct light from said source through said stage means and toward said pipette, whereby a sample on said stage means will be illuminated from one side and light emitted from its opposite side will be detected within the near filled region of the surface of the sample by said pipette aperture.

11. The apparatus of claim 10, wherein said means for directing light onto a sample includes a source of light, means for directing light from said source through said pipette and toward the upper surface of said stage means, said pipette collecting reflected light within the near-field region of the surface of a sample on said stage means.

12. The apparatus of claim 1, wherein said means for determining the proximity of said aperture to the surface of a sample on said stage means includes means for applying a voltage between said metallic layer on said pipette and said stage means, and means for measuring the current flow therebetween, the current flow providing a measure of the distance between said aperture and the surface of a sample on said stage means.

13. The apparatus of claim 1, further including means for directing intense, visible light onto a sample carried on said stage means.

14. The apparatus of claim 13, wherein said means for directing light is a laser.

15. The apparatus of claim 13, wherein said means for directing light onto a sample comprises means for directing light through said stage means and toward said pipette for transmission illumination of a sample.

16. The apparatus of claim 13, wherein said means for directing light onto a sample comprises means for directing light through said pipette toward said stage means for epiillumination of a sample.

17. The apparatus of claim 13, wherein said submicron aperture has a diameter less than the wavelength of said visible light.

18. The apparatus of claim 17, wherein said tapered glass wall has at its lower tip portion an outer diameter equal to or greater than the wavelength of said visible light, and an inner diameter less than the wavelength of said visible light, said metallic layer covering the wall of said lower tip portion surrounding said axial central opening of said pipette to provide said submicron aperture, whereby light travelling in said pipette toward said aperture travels in a propagating mode throughout the length of the pipette, travels through said aperture in a decaying mode, and thereafter again travels in a propagating mode, said pipette and aperture producing collimated light in the projected image of said aperture within the near-field region of said aperture.

19. The apparatus of claim 18, wherein said near-field region extends a distance equal to at least one-half the diameter of said submicron aperture.

20. Apparatus for near-field microscopy, comprising:

a pipette having a glass wall forming an upper body portion and a lower elongated tip portion and including an axially extending opening terminating in a submicron aperture at the lower end of said tip portion;

an opaque metallic layer on the outer surface of said glass wall and surrounding said submicron aperture;

means for mounting said pipette for motion with respect to a sample; and

means for moving said pipette to position at least a portion of said sample within the near field region of said aperture.

21. The apparatus of claim 20, further including light source means for illuminating said sample, whereby light from said sample will be detected by said pipette within its near field region.

22. The apparatus of claim 21, wherein said aperture has a diameter less than the wavelength of light from said sample.

23. The apparatus of claim 20, wherein said near field region extends a distance equal to at least one-half the diameter of said submicron aperture.

24. The apparatus of claim 20, wherein said pipette glass wall tapers in thickness from said upper body portion to said tip portion.

25. The apparatus of claim 24, wherein the lower end of said tip portion includes an annular bottom tip wall surrounding said aperture, and wherein the outer surface of said annular tip wall includes said metallic layer.

26. The apparatus of claim 24, wherein the outer diameter of said elongated tip portion is greater than the wavelength of light from said sample, and wherein the diameter of said aperture is smaller than the wavelength of light from said sample.