Method of forming solid lubricaitng film on ceramic material and product produced by the same
First Claim
1. A method of forming an inorganic solid lubricating film on the surface of a ceramic material comprising the steps of:
- (1) evaporating a liquid or solid organic material by heating the same in a vacuum atmosphere having a vacuum degree of not less than 10-4 Torr, said organic material having a vapor pressure of not more than 10-4 Torr at room temperature thereby decomposing the same into molecules or clusters;
(2) emitting and depositing said organic material, in the form of molecules or clusters, onto the surface of said ceramic material disposed in said vacuum atmosphere, and(2) irradiating the ions of a gas element at a dosage of not less than 1×
1015 ions/cm2 on the surface of said ceramic material simultaneously with said emitting and depositing step, said gas element having an energy of not less than 1 kev, so as to carabonize said organic material into an inorganic material containing carbon at a high density.
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Abstract
A ceramic member composed of a ceramic material which is coated with a solid lubricating film. The solid lubricating film is formed on the surface of the ceramic material by heating and evaporating in a vacuum atmosphere having a vacuum degree of not less than 10-4 Torr an organic material which has a vapor pressure of not more than 10-4 Torr at room temperature while implanting the ions of a gas element having an energy of not less than 1 keV on the surface of the organic material at the rate of not less than 1×1015 ions/cm2. A method of forming such a solid lubricating film on the surface of a ceramic material is also disclosed.
20 Citations
14 Claims
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1. A method of forming an inorganic solid lubricating film on the surface of a ceramic material comprising the steps of:
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(1) evaporating a liquid or solid organic material by heating the same in a vacuum atmosphere having a vacuum degree of not less than 10-4 Torr, said organic material having a vapor pressure of not more than 10-4 Torr at room temperature thereby decomposing the same into molecules or clusters; (2) emitting and depositing said organic material, in the form of molecules or clusters, onto the surface of said ceramic material disposed in said vacuum atmosphere, and (2) irradiating the ions of a gas element at a dosage of not less than 1×
1015 ions/cm2 on the surface of said ceramic material simultaneously with said emitting and depositing step, said gas element having an energy of not less than 1 kev, so as to carabonize said organic material into an inorganic material containing carbon at a high density. - View Dependent Claims (2, 3, 4, 5, 10, 11)
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6. A ceramic member comprising:
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a ceramic material; an inorganic solid lubricating film formed on the surface of said ceramic material, which is produced by the steps of; (1) evaporating a liquid or solid organic material by heating the same in a vacuum atmosphere having a vacuum degree of not less than 10-4 Torr, said organic material having a vapor pressure of not more than 10-4 Torr at room temperature thereby decomposing he same into molecules or clutters; (2) emitting and depositing said heated and evaporated organic material in the form of molecules or cluters onto the surface of said ceramic material in said vacuum atmosphere, (3) irradiating the ions of a gas element at a dosage of not less than 1×
1015 ions/cm2 on the surface of said ceramic material simultaneously with said emitting and depositing step, said gas element having an energy of not less than 1 kev so as to carbonize said organic material into an inorganic material containing carbon at a high density. - View Dependent Claims (7, 8, 9, 12, 13, 14)
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Specification