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Method of forming solid lubricaitng film on ceramic material and product produced by the same

  • US 4,917,953 A
  • Filed: 02/26/1988
  • Issued: 04/17/1990
  • Est. Priority Date: 02/28/1987
  • Status: Expired due to Fees
First Claim
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1. A method of forming an inorganic solid lubricating film on the surface of a ceramic material comprising the steps of:

  • (1) evaporating a liquid or solid organic material by heating the same in a vacuum atmosphere having a vacuum degree of not less than 10-4 Torr, said organic material having a vapor pressure of not more than 10-4 Torr at room temperature thereby decomposing the same into molecules or clusters;

    (2) emitting and depositing said organic material, in the form of molecules or clusters, onto the surface of said ceramic material disposed in said vacuum atmosphere, and(2) irradiating the ions of a gas element at a dosage of not less than 1×

    1015 ions/cm2 on the surface of said ceramic material simultaneously with said emitting and depositing step, said gas element having an energy of not less than 1 kev, so as to carabonize said organic material into an inorganic material containing carbon at a high density.

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